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Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters
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GB/T 26113-2010
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Basic data | Standard ID | GB/T 26113-2010 (GB/T26113-2010) | | Description (Translated English) | Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | L55 | | Classification of International Standard | 31.200 | | Word Count Estimation | 12,152 | | Date of Issue | 1/10/2011 | | Date of Implementation | 10/1/2011 | | Quoted Standard | GB/T 3505; GB/T 18779.2; GB/T 26111 | | Regulation (derived from) | Announcement of Newly Approved National Standards 2011 No. (No. 166 overall) 1 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This Standard specifies the basic principles of assessment of micro-geometry, the assessment factors, assessment procedures, evaluation methods and assessment rules. This Standard is applicable to enterprises, research institutions, and other testing organizations engaged in MEMS technology and product research, design, production and testing. | GB/T 26113-2010: Micro-electromechanical system technology -- General rules for the assessment of micro-geometrical parameters
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Micro-electromechanical system technology. General rules for the assessment of micro-geometrical parameters
ICS 31.200
L55
National Standards of People's Republic of China
Micro-electromechanical systems (MEMS) technology
Micro Geometrical assessment - General
Issued on. 2011-01-10
2011-10-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the National MEMS Technology Standardization Technical Committee (SAC/TC336) and focal points.
This standard is mainly drafted by. The machine Productivity Promotion Center, Xi'an Jiaotong University, Tianjin University, Zhongyuan University of Technology.
The main drafters of this standard. Ding Hongyu, Zhang Ping, Liu Wei, Jiang Zhuang Germany, King Xuan Wei, Hu Xiaodong, Zhao Zexiang.
Micro-electromechanical systems (MEMS) technology
Micro Geometrical assessment - General
1 Scope
This standard specifies the basic principles of assessment of the amount of the micro-geometry, elements of assessment, assessment procedures, evaluation methods and assessment rules.
This standard applies to enterprises, research institutions, testing institutions engaged in MEMS technology and product research, design, production and testing.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the edition are not applicable to the present
file. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 3505 Geometrical product specifications (GPS) Surface texture Profile method - Terms, definitions and surface texture parameters
GB/T 18779.2 Geometrical Product Specifications (GPS) - Inspection by measurement of workpieces and measuring equipment - Part 2. measuring equipment
Calibration and product testing in GPS measurements Uncertainty Evaluation Guide
GB/T 26111 micro-electromechanical systems (MEMS) technology terms
3 Terms and Definitions
Terms and definitions in GB/T 3505 and GB/T 26111 and given the following terms and definitions apply to this document.
3.1
Micro geometric elements micro-geometricalfeature
Dots microstructure geometric features basic, line, surface.
3.2
Micro-geometry micro-geometricalparameter
Geometric parameters of MEMS components.
3.3
Dimensional characteristics featureofsize
By a certain size of linear or angular dimensions sizing geometry.
3.4
Surface structure surfacestructure
Geometric repetitive or accidental deviation surface, these deviations form a three dimensional topography of the surface.
3.5
Surface (structural) parameter surface (structure) parameter
Surface micro-geometry parameters representing characteristics.
3.6
Shape Feature characteristicofform
The actual shape of the single elements of the whole amount of variation allowed.
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