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GB/T 25184-2010 English PDF

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GB/T 25184-2010: Verification method for X-ray photoelectron spectrometers
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PDF similar to GB/T 25184-2010


Standard similar to GB/T 25184-2010

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Basic data

Standard ID GB/T 25184-2010 (GB/T25184-2010)
Description (Translated English) Verification method for X-ray photoelectron spectrometers
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard G04
Classification of International Standard 71.040.40
Word Count Estimation 26,211
Date of Issue 2010-09-26
Date of Implementation 2011-08-01
Quoted Standard GB/T 19500-2004; GB/T 21006-2007; GB/T 22461-2008; GB/T 20175-2006; GB/T 22571-2008; GB/T 25185-2010; ISO 15470-1999; ISO 18116; ISO 18118-2004; ISO 18516-2006; ISO 19319; ISO 24237
Regulation (derived from) National Standard Approval Announcement 2010 No.6 (Total No.161)
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies test methods of X-ray photoelectron spectrometer. This standard applies to the use of non- monochromatic Al or Mg X -rays or monochromatic Al X -rays, and with a sputter ion gun cleaning X-ray photoelectron spectroscopy of the test.

GB/T 25184-2010: Verification method for X-ray photoelectron spectrometers

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Verification method for X-ray photoelectron spectrometers ICS 71.040.40 G04 National Standards of People's Republic of China X-ray photoelectron spectrometer test method Issued on. 2010-09-26 2011-08-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Table of Contents

Preface Ⅰ 1 Scope 1 2 Normative references 1 3 Symbols and Abbreviations 1 4 principle of the method and system configuration 3 Technical indicators and measurement units 5 4 6 test environment 5 7 test items and methods 5 8 report test results 22 9 22 test cycle

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. The standard micro-beam analysis by the National Standardization Technical Committee Sub-Committee under the jurisdiction of surface analysis. The standard unit is responsible for drafting. Fujian Optical Co., Ltd., State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University. The main drafters of this standard. aqua regia chrysanthemum, when Swallow, Ding Xunmin. X-ray photoelectron spectrometer test method

1 Scope

This standard specifies the test methods of X-ray photoelectron spectrometer. This standard applies to the use of non-monochromatic radiation or Al or MgX AlX monochromatic radiation, and with a sputter ion gun cleaning X-ray photoelectron spectrometer calibration.

2 Normative references

The following documents for the application of this document is essential, dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 19500-2004 X-ray photoelectron spectroscopy analysis General GB/T 21006-2007 Surface chemical analysis - X-ray photoelectron spectroscopy and Auger electron spectroscopy Linearity of intensity scale (ISO 21270.2004, IDT) GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT) GB/T 20175-2006 Surface chemical analysis - Sputter depth profiling using layered systems as reference materials optimization method (ISO 14606.2000, IDT) GB/T 22571-2008 Surface chemical analysis - X-ray photoelectron spectrometer energy scale calibration (ISO 15472.2001, IDT) GB/T 25185-2010 Surface chemical analysis of X-ray photoelectron spectroscopy charge control and charge correction method (ISO 19318.2004, IDT) ISO 15470.1999 Surface chemical analysis - X-ray photoelectron spectrometer instrument performance parameters of the selected representation (Surface Chemical Analysis-X-ray photoelectron spectrometers-Description of selected instrumental performanceparameters) ISO 18116 Surface chemical analysis sample preparation and installation procedures Standard Guide (Surfacechemicalanalysis- Guidelinesforpreparationandmountingofspecimensforanalysis) ISO 18118.2004 Surface chemical analysis AES and XPS quantitative analysis of homogeneous materials by experimentally determined relative sensitivity factor User guide (Surfacechemicalanalysis-Augerelectronspectroscopyand X-rayphotoelectron spectroscopy-Guidetotheuseofexperimentalydeterminedrelativesensitivityfactorsforthequantitative analysisofhomogeneousmaterials) ISO 18516.2006 Surface chemical analysis - Determination of lateral resolution of AES and XPS (Surfacechemicalanalysis- AugerelectronspectroscopyandX-rayphotoelectronspectroscopy-Determinationoflateralresolution) ISO 19319 Surface chemical analysis - Determination of AES and XPS lateral resolution, analysis area and analyzer analysis area (Surfacechemicalanalysis-AugerelectronspectroscopyandX-rayphotoelectronspectroscopy- Determinationoflateralresolution, analysisarea, andsampleareaviewedbytheanalyzer) ISO 24237 Surface chemical analysis XPS intensity scale repeatability and consistency (Surfacechemicalanalysis-X-ray photoelectronspectroscopy-Repeatabilityandconstancyofintensityscale)

3 Symbols and Abbreviations

The following symbols and abbreviations apply to this document.

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