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GB/T 42604-2023: Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
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Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
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GB/T 42604-2023
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Basic data | Standard ID | GB/T 42604-2023 (GB/T42604-2023) | | Description (Translated English) | Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J78 | | Classification of International Standard | 23.160 | | Word Count Estimation | 21,289 | | Date of Issue | 2023-05-23 | | Date of Implementation | 2023-05-23 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 42604-2023: Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
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ICS 23:160
CCSJ78
National Standards of People's Republic of China
Vacuum Technology Vacuum Gauge
Specification for hot cathode ionization vacuum gauges
Vacuumtechnology-Vacuumgauges-
(ISO 27894:2009, IDT)
Released on 2023-05-23
2023-05-23 Implementation
State Administration for Market Regulation
Released by the National Standardization Management Committee
table of contents
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Symbols and abbreviations5
5 Principle of Hot Cathode Ionization Vacuum Gauge 6
6 Specifications for hot cathode ionization gauges given by the manufacturer6
7 Specifications of the hot cathode ionization vacuum gauge given by the manufacturer (optional) 8
8 Contribution components of measurement uncertainty of hot cathode ionization vacuum gauge 9
Appendix A (informative) Typical BA-type vacuum gauge with glass housing12
Appendix B (Informative) Typical Electrical Connections of Type BA Vacuum Gauge 13
Appendix C (Informative) Question 14 for Ionization Vacuum Gauge
Reference 15
foreword
This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules for Standardization Documents"
drafting:
This document is equivalent to ISO 27894:2009 "Specification for Hot Cathode Ionization Vacuum Gauges for Vacuum Technology Vacuum Gauges":
Please note that some contents of this document may refer to patents: The issuing agency of this document assumes no responsibility for identifying patents:
This document is proposed by China Machinery Industry Federation:
This document is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18):
This document was drafted by: The 510th Research Institute of the Fifth Research Institute of China Aerospace Science and Technology Corporation, Shanghai Precision Metrology and Testing Research Institute
Institute, Hefei Zhihai Photoelectric Technology Co:, Ltd:, Shenyang Huizhen Vacuum Technology Co:, Ltd:, Foshan Shunde District Quality and Technical Supervision Standards and Codes
Institute, Chongqing University, Hunan Weige Magnetic Fluid Co:, Ltd:, Zibo Institute of Metrology Technology, Guangzhou Tushi Jingyi Technology Co:, Ltd:, Hui
City Yuzhiguang Technology Co:, Ltd:, Guangdong Weiwo Technology Co:, Ltd:, Shenzhen Times High-Tech Equipment Co:, Ltd:, Shenyang Vacuum Technology Co:, Ltd:
Institute of Technology Co:, Ltd:
The main drafters of this document: Cheng Yongjun, Zhao Lan, Sun Wenjun, Zhang Huzhong, Xiao Yinfeng, Weng Jun, Ni Bo, Liu Lei, Zhao Yan, Song Qingzhu, Wang Zhuang,
Li Chun, Hou Junxia, Luo Fuqiang, Yan Jichun, Yan Wenjing, Zhang Xiaolin, Dong Meng, Chen Lian, Zhang Ruifang, Guan Baoguo, Feng Tianyou, Tu Jinhong, Jiang Zhenlan,
Zhang Haiying, Tian Hanrong, Wang Lingling:
Introduction
Ionization vacuum gauge is a common instrument for measuring high vacuum and ultra-high vacuum: In the high vacuum and ultra-high vacuum environment of known temperature, the true
The flow of ions collected by the air gauge is proportional to the gas density and pressure: High-speed electrons collide with ionized neutral gas molecules to produce ions, electrons
It is generated by a self-sustained discharge or an electron-emitting cathode: In commercial ionization gauges, the electron emitting cathode is a hot wire, also called a "hot cathode":
Pole", which realizes electron emission through the principle of thermal emission:
Due to the self-sustained discharge of the ionization vacuum gauge in the cross electromagnetic field, the non-linear characteristics between the discharge current and the gas density make it calibrated
Quite cumbersome: Therefore, in the pressure range of high vacuum and ultra-high vacuum, the "hot cathode" ionization vacuum gauge with better measurement linearity can be used
Passed by value:
If the ionization vacuum gauge is used for value transmission and accurate measurement in the range of high vacuum and ultra-high vacuum, the relevant parameters and uncertainty values of the vacuum gauge must be
essential and will be described in this document: Therefore, when using an ionization vacuum gauge as a reference standard, this document is to ISO /T S3567
Replenish:
Vacuum Technology Vacuum Gauge
Specification for hot cathode ionization vacuum gauges
1 Scope
This document defines terms related to hot cathode ionization vacuum gauges and specifies the specific parameters to be given by the manufacturer of hot cathode ionization vacuum gauges:
and the components of measurement uncertainty that need to be considered when operating these instruments: The reason is as follows:
a) This document updates some terms and definitions given in ISO 3529-3:1981:
b) Hot cathode ionization vacuum gauges are usually used as reference standards, and this document specifies the
Information on proper calibration of vacuum gauges for high vacuum: Traceable pressure for high and ultra-high vacuum using ionization gauges
When measuring, it is suitable to quote the information containing the relevant parameters and characteristics of the vacuum gauge in the manufacturer's instructions:
c) This document also lists important uncertainty components associated with ionization gauge pressure measurements, and also gives these uncertainties
Guidelines for the evaluation of weight: For some current or future vacuum gauges, the list of uncertainty components may not be comprehensive:
d) When the ionization vacuum gauge is used as a reference standard, this document is a supplement to ISO /T S3567 and ISO /T S27893:
2 Normative references
The contents of the following documents constitute the essential provisions of this document through normative references in the text: Among them, dated references
For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
this document:
GB/T 27418-2017 Evaluation and Expression of Measurement Uncertainty (ISO /IEC Guide98-3:2008, MOD)
Note: There is no technical difference between the referenced content of GB/T 27418-2017 and the referenced content of ISO /IEC Guide98-3:2008:
ISO /T S3567 Calibration for direct comparison of vacuum gauges with standard vacuum gauges (Vacuumgauges-Calibrationbydirect
Note: GB/T 34873-2017 Vacuum gauge and standard vacuum gauge direct comparison calibration (ISO 3567:2011, IDT)
3 Terms and Definitions
The following terms and definitions apply to this document:
3:1 Definition of part components
3:1:1
Gaugehead
regulation gaugetube
The component of a vacuum gauge that is exposed to vacuum:
[Source: ISO 3529-3:1981, with modifications]
Note: The gauge head of the hot cathode ionization vacuum gauge contains at least one cathode or filament, anode, collector and corresponding electric vacuum feedthrough, see Figure A:1 in Appendix A:
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