Search result: GB/T 43916-2024
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Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
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GB/T 43916-2024
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| Standard ID | GB/T 43916-2024 (GB/T43916-2024) | | Description (Translated English) | Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J78 | | Classification of International Standard | 23.160 | | Word Count Estimation | 22,258 | | Date of Issue | 2024-04-25 | | Date of Implementation | 2024-04-25 | | Issuing agency(ies) | State Administration for Market Regulation, National Standardization Administration |
GB/T 43916-2024: Vacuum technology Vacuum gauges Capacitance diaphragm vacuum gauges Specifications, calibration and measurement uncertainty
ICS 23:160
CCSJ78
National Standards of People's Republic of China
Vacuum Technology Vacuum Gauge Capacitance Thin Film Vacuum Gauge
Specifications, calibration and measurement uncertainty
Vacuum technology - Vacuum gauges - Specifications, calibration and
(ISO :20146:2019, IDT)
Released on 2024-04-25
2024-04-25 implementation
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface III
1 Range 1
2 Normative references 1
3 Terms and Definitions 1
3:1 Composition 2
3:2 Physical parameters 2
3:3 Other parameters 3
4 Abbreviations 5
5 Capacitance diaphragm vacuum gauge 5
5:1 Principle 5
6 Capacitance Film Vacuum Gauge Specifications 6
6:1 Capacitance diaphragm vacuum gauge types 6
6:2 Regulating temperature control 6
6:3 Display and measurement of signal output unit 6
6:4 Measuring range of capacitance diaphragm vacuum gauge 6
6:5 Target measurement uncertainty 6
6:6 Temperature coefficient of zero point and full scale 7
6:7 Resolution 7
6:8 Regulatory response time 7
6:9 Warm-up time 7
6:10 Allowable pressure (maximum load pressure) 7
6:11 Destruction pressure (burst pressure) 7
6:12 Materials in contact with gases 7
6:13 Regulation installation direction 7
6:14 Chamber Interface 7
6:15 Internal volume 7
6:16 Interface and Pin Connection 7
6:17 Compatibility of regulators and controllers 7
6:18 Dimensions and mass of regulators and controllers 8
6:19 Normal working (environmental) conditions 8
6:20 Storage and transportation conditions 8
6:21 Power supply requirements 8
7 Additional (optional) specifications for capacitance diaphragm vacuum gauges 8
7:1 Reproducibility (long-term stability) 8
7:2 The tilt effect of the zero point 8
7:3 Zero point repeatability 8
7:4 Zero point durability after pressurization to full scale 8
7:5 Range durability after pressurization to full range 8
7:6 Zero point durability after pressurization to allowable pressure 8
7:7 Range durability after pressurization to allowable pressure 9
7:8 Update interval 9
7:9 Inner diameter of connecting pipe 9
7:10 Cable length 9
7:11 Pressure set point 9
7:12 Photo 9
7:13 Test records and calibration certificates 9
8 Calibration 9
8:1 Calibration Procedure 9
8:2 Calibration uncertainty 10
8:3 Calibration certificate 10
9 Measurement uncertainty in use 10
Appendix A (Informative) Compensation for thermal runaway effects 11
Reference 14
Preface
This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents"
Drafting:
This document is equivalent to ISO :20146:2019 "Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainty of capacitance diaphragm vacuum gauges":
"Determination":
The following minimal editorial changes were made to this document:
--- Supplemented the reference number description for the symbols in Figure A:1:
Please note that some of the contents of this document may involve patents: The issuing organization of this document does not assume the responsibility for identifying patents:
This document was proposed by the China Machinery Industry Federation:
This document is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18):
This document was drafted by: China Institute of Metrology, Shanghai Zhentai Instrument Co:, Ltd:, Lanzhou Institute of Space Technology Physics, Zibo City
Institute of Metrology Technology, Anhui Gebo Technology Co:, Ltd:, Hunan Weige Magnetic Fluid Co:, Ltd:, Anhui Wanrui Refrigeration Technology Co:, Ltd:,
Shenyang Huizhen Vacuum Technology Co:, Ltd:, Guangzhou Tushi Jingyi Technology Co:, Ltd:, Huizhou Yuzhiguang Technology Co:, Ltd:, Guangdong Weiwo Technology
Co:, Ltd:, Henan Huajia New Materials Technology Co:, Ltd:, Shenzhen Hengyunchang Vacuum Technology Co:, Ltd:, China National Nuclear Corporation Seventh Research and Design Institute Co:, Ltd:
Company, Anhui Jingyimen Technology Development Co:, Ltd:, Sichuan Xintu Fluid Control Technology Co:, Ltd:, Zhongke Jiuwei Technology Co:, Ltd:, Shenyang Zhen
Air Technology Research Institute Ltd:
The main drafters of this document are: Yu Hongyan, Wang Jinku, Ding Jimin, Tang Yunjian, Cheng Yongjun, Gao Xiang, Sun Wenjun, Cui Yongfeng, Zhu Yingqing, Yan Jichun,
Yan Wenjing, Ding Huaikuang, Song Qingzhu, Li Zhihui, Tu Jinhong, Jiang Zhenlan, Zhang Haiying, Liu Baoling, Yue Weiping, Li Zhengming, Pan Zhou, Zhou Tingzhi, Sun Weihua,
Zhao Lan, Pei Xiaoqiang, Wu Chengyao, Ding Dong, Liu Junming, and Wang Lingling:
Vacuum Technology Vacuum Gauge Capacitance Thin Film Vacuum Gauge
Specifications, calibration and measurement uncertainty
1 Scope
This document defines the terms related to capacitance diaphragm vacuum gauge (CDG), specifies the parameters that must be given for capacitance diaphragm vacuum gauge, and describes
It describes the measurement uncertainty that must be considered during calibration and operation of the instrument:
This document is applicable to the calibration of CDG using ISO 3567 and ISO 27893 and is a supplementary note when used as a reference standard:
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document:
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document:
ISO 3529-1 Vacuum technology-Vocabulary-Part 1: General terms
General terms)
Note: GB/T 3163-2007 Vacuum technical terms (ISO 3529:1981, MOD)
ISO 3529-3 Vacuum technology - Vocabulary - Part 3: Total and partial pressure vacuum gauges
Note: GB/T 3163-2007 Vacuum technical terms (ISO 3529:1981, MOD)
Note: GB/T 34873-2017 Vacuum gauge calibration by direct comparison with a standard vacuum gauge (ISO 3567:2011, IDT)
ISO 27893 Vacuum technology - Uncertainty assessment of calibration results of vacuum gauges directly compared with standard vacuum gauges
Note: GB/T 34876-2017 Vacuum technology Vacuum gauge and standard vacuum gauge direct comparison calibration results uncertainty assessment (ISO 27893:
2011, IDT)
ISO /IEC Guide 98-3 Uncertainty of measurement Part 3: Guide to the expression of uncertainty in measurement
Note: GB/T 27418-2017 Evaluation and expression of measurement uncertainty (ISO /IEC Guide 98-3, MOD)
ISO /IEC Guide 99 International Vocabulary of Metrology Basics and Common Concepts and Related Terms (VIM) [Internationalvocabu-
3 Terms and definitions
ISO 3529-1, ISO 3529-3, ISO 3567, ISO 27893, ISO /IEC Guide98-3, ISO /IEC Guide99
The following terms and definitions apply to this document:
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