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SJ 20842-2002 English PDF

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SJ 20842-2002: Test method for Ga/As ratio of surface of gallium arsenide
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Basic data

Standard ID SJ 20842-2002 (SJ20842-2002)
Description (Translated English) Test method for Ga/As ratio of surface of gallium arsenide
Sector / Industry Electronics Industry Standard
Classification of Chinese Standard H83;L90
Word Count Estimation 5,536
Date of Issue 2002-10-30
Date of Implementation 2003-03-01
Summary This standard specifies the ratio of gallium arsenide GaAs surface X-ray photoelectron spectroscopy test methods. This standard applies to GaAs devices for monitoring various surface treatment during the manufacturing process of the gallium arsenide GaAs wafer surface than the impact, but also suitable for wafer processing in a variety of surface treatment.


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