GB/T 12963-2022 PDF in English
GB/T 12963-2022 (GB/T12963-2022, GBT 12963-2022, GBT12963-2022)
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Name of Chinese Standard | Status |
| GB/T 12963-2022 | English | 170 |
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Electronic-grade polycrystalline silicon
| Valid |
| GB/T 12963-2014 | English | 90 |
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Electronic-grade polycrystalline silicon
| Obsolete |
| GB/T 12963-2009 | English | 70 |
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Specification for polycrystalline silicon
| Obsolete |
| GB/T 12963-1996 | English | 239 |
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Polycrystalline silicon
| Obsolete |
| GB 12963-1991 | English | 199 |
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Polycrystalline silicon
| Obsolete |
Standards related to (historical): GB/T 12963-2022
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GB/T 12963-2022: PDF in English (GBT 12963-2022) GB/T 12963-2022
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 29.045
CCS H 82
Replacing GB/T 12963-2014
Electronic-Grade Polycrystalline Silicon
ISSUED ON: DECEMBER 30, 2022
IMPLEMENTED ON: JULY 1, 2023
Issued by: State Administration for Market Regulation;
Standardization Administration of the People’s Republic of China.
Table of Contents
Foreword ... 3
1 Scope ... 5
2 Normative References ... 5
3 Terms and Definitions ... 6
4 Designation and Category ... 6
5 Technical Requirements ... 6
6 Test Methods ... 8
7 Inspection Rules ... 9
8 Marking, Packaging, Transportation, Storage and Accompanying Documents ... 10
9 Contents of Order Form ... 11
Electronic-Grade Polycrystalline Silicon
1 Scope
This Document stipulates the designations and categories, technical requirements, test methods,
inspection rules, marking, packaging, transportation, storage, accompanying documents and
order form content of electronic grade polycrystalline silicon.
This Document applies to electronic grade polycrystalline silicon (hereinafter referred to as
"polycrystalline silicon") produced from chlorosilane and silane.
2 Normative References
The provisions in following documents become the essential provisions of this Document
through reference in this Document. For the dated documents, only the versions with the dates
indicated are applicable to this Document; for the undated documents, only the latest version
(including all the amendments) is applicable to this Document.
GB/T 1550 Test methods for conductivity type of extrinsic semiconducting materials
GB/T 1551 Test method for measuring resistivity of monocrystal silicon - In-line four-
point probe and direct current two-point probe method
GB/T 1553 Test methods for minority carrier lifetime in bulk silicon and germanium -
Photoconductivity decay method
GB/T 1557 Test method for determining interstitial oxygen content in silicon by infrared
absorption
GB/T 1558 Test method for substitutional carbon content in silicon by infrared absorption
GB/T 4059 Polycrystalline silicon - Examination method - Zone-melting on phosphorus
under controlled atmosphere
GB/T 4060 Polycrystalline silicon - Examination method - Vacuum zone-melting on boron
GB/T 4061 Polycrystalline silicon - examination method - assessment of sandwiches on
cross-section by chemical corrosion
GB/T 14264 Terminology of semiconductor materials
GB/T 14844 Designations of semiconductor materials
GB/T 24574 Test methods for photoluminescence analysis of single crystal silicon for Ⅲ-
Ⅴ impurities
GB/T 24581 Test method for Ⅲ and Ⅴ impurities content in single crystal silicon - Low
temperature FT-IR analysis method
GB/T 24582 Test method for measuring surface metal contamination of polycrystalline
silicon by acid extraction-inductively coupled plasma mass spectrometry
GB/T 29057 Practice for evaluation of polycrystalline silicon rods by float-zone crystal
growth and spectroscopy
GB/T 35306 Test method for carbon and oxygen content of single crystal silicon―Low
temperature Fourier transform infrared spectrometry
GB/T 37049 Test method for the content of metal impurity in electronic grade polysilicon
- Inductively coupled-plasma mass spectrometry method
3 Terms and Definitions
For the purposes of this Document, the terms and definitions given in GB/T 14264 apply.
4 Designation and Category
4.1 The designation indication of polycrystalline silicon shall comply with the provisions of
GB/T 14844.
4.2 Polycrystalline silicon is divided into bulk polycrystalline silicon and rod-shaped
polycrystalline silicon according to the shape; n-type and p-type according to the conductivity
type; and is divided into 4 grades according to the difference in technical indicators.
5 Technical Requirements
5.1 Technical indicators
The grade and related technical indicators of polycrystalline silicon shall comply with the
provisions of Table 1.
6 Test Methods
6.1 Before testing polycrystalline silicon for donor impurity content, acceptor impurity content,
carbon content, conductivity type, resistivity, minority carrier lifetime, and oxygen content, the
polycrystalline silicon shall be made into a monocrystalline specimen according to the methods
in GB/T 4059, GB/T 4060 or GB/T 29057.
6.2 The inspection of donor impurity content and acceptor impurity content in polycrystalline
silicon shall be carried out in accordance with the provisions of GB/T 24574 or GB/T 24581.
The arbitration inspection shall be carried out in accordance with the provisions of GB/T 24581.
6.3 The inspection of carbon content in polycrystalline silicon shall be carried out in accordance
with the provisions of GB/T 1558 or GB/T 35306. The arbitration inspection shall be carried
out in accordance with the provisions of GB/T 35306.
6.4 The inspection of the basis metal impurity content of the polycrystalline silicon shall be
carried out in accordance with the provisions of GB/T 37049.
6.5 The inspection of surface metal impurity content of polycrystalline silicon shall be carried
out in accordance with the provisions of GB/T 24582.
6.6 The inspection of conductivity type of polycrystalline silicon shall be carried out in
accordance with the provisions of GB/T 1550.
6.7 The inspection of resistivity of polycrystalline silicon shall be carried out in accordance
with the provisions of GB/T 1551.
6.8 The inspection of minority carrier lifetime of polycrystalline silicon shall be carried out in
accordance with the provisions of GB/T 1553.
6.9 The inspection of oxygen content of polycrystalline silicon shall be carried out in
accordance with the provisions of GB/T 1557 or GB/T 35306. The arbitration inspection shall
be carried out in accordance with the provisions of GB/T 35306.
6.10 The size distribution range of bulk polycrystalline silicon is tested by screening. The
dimensions and deviations of rod-shaped polycrystalline silicon are measured with measuring
tools of corresponding accuracy.
6.11 The inspection of polycrystalline silicon structure (oxidation interlayer, temperature
interlayer) shall be carried out in accordance with the provisions of GB/T 4061.
6.12 The particle size of the cross-section edge of polycrystalline silicon shall be measured with
measuring tools of corresponding accuracy, and other surface quality shall be visually inspected.
and surface metal impurity content, double sampling shall be required to be taken for that
unqualified item for reinspection. If the reinspection results are still unqualified, the batch of
products shall be deemed to be unqualified.
7.5.2 The judgment of conductivity type, resistivity, minority carrier lifetime, oxygen content,
size and tolerance, structure, and surface quality inspection results shall be determined through
negotiation between the supplier and the purchaser.
8 Marking, Packaging, Transportation, Storage and
Accompanying Documents
8.1 Marking
The outside of the product packaging box shall be marked with the words or signs of "Handle
with Care" and "Moisture-proof", and indicate:
a) Product name and designation;
b) Product quantity and net weight;
c) Name of supplier.
8.2 Packaging
The product is packed into clean polyethylene packaging bags and sealed. When packaging,
the polyethylene packaging bag shall be prevented from being damaged to avoid external
contamination of the product; and good protection shall be provided before being packed into
the outer packaging box. The packaging of polycrystalline silicon can also be determined
through negotiation between the supplier and the purchaser.
8.3 Transportation
During transportation, products shall be loaded and unloaded with care, not pressed or squeezed,
and shock-proof measures shall be taken.
8.4 Storage
Product shall be stored in a clean and dry environment.
8.5 Accompanying documents
Each batch of products shall be accompanied by accompanying documents, which shall include
the following contents in addition to supplier information, product information, this Document
number, exit-factory date or packaging date.
......
Source: Above contents are excerpted from the PDF -- translated/reviewed by: www.chinesestandard.net / Wayne Zheng et al.
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