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Specification for serial alphanumeric marking of the front surface of wafers
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YS/T 986-2014
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Basic data | Standard ID | YS/T 986-2014 (YS/T986-2014) | | Description (Translated English) | Specification for serial alphanumeric marking of the front surface of wafers | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H80 | | Classification of International Standard | 29.045 | | Word Count Estimation | 12,138 | | Date of Issue | 10/14/2014 | | Date of Implementation | 4/1/2015 | | Quoted Standard | SEMI M13; SEMI AUX001; SEIM AUX015 | | Adopted Standard | SEMI M12-0706, IDT | | Regulation (derived from) | People's Republic of China Ministry of Industry and Information Technology Notice 2014 No. 63; Industry Standard Filing Notice 2014 No. 12 (Overall No. 180) | | Issuing agency(ies) | Ministry of Industry and Information Technology | | Summary | This Standard specifies the marker geometry and spatial position include alphanumeric, especially for the reference plane and with a band gap of silicon polished. This Standard does not involve the production of marker technology. |
YS/T 986-2014: Specification for serial alphanumeric marking of the front surface of wafers---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Specification for serial alphanumeric marking of the front surface of wafers
ICS 29.045
H80
People's Republic of China Nonferrous Metals Industry Standard
Wafer front series alphanumeric symbol specification
Issued on. 2014-10-14
2015-04-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard uses the translation method is equivalent to using SEMIM12-0706 "wafer front series of alphanumeric symbol specification."
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized.
This standard was drafted. Grinm Semiconductor Materials Co., Ltd., Hangzhou Haina Semiconductor Co., Ltd., has a universal silicon peak Electronics Co.
Ltd., Zhejiang Jinrui Hong Technology Co., Ltd.
The main drafters. Zhang Jing, while Wing-chi, Sun Yan, Lu Jinjun, Chunlan floor, Wang Feiyao, He Liangen, Zhang Haiying.
Wafer front series alphanumeric symbol specification
1. Purpose
1.1 standard specifies the silicon or other semiconductor wafer string of consecutive letters and numbers mark. The ID tag and associated
Information is stored into the database, for each wafer and played a silicon wafer during device manufacturing traceability and control purposes.
1.2 This standard defines the basic provisions of the wafer mark coding. Without processing a wafer, using a simple automated optical character recognition device can
To mark the independent and rapid manual identification, to ensure that the silicon wafer manufacturer marked consistency, help monitor wafer process
Variety.
1.3 This standard applies to a wide range of wafer products, such as epitaxial wafers, SOI sheet, polished and so on.
2 range
This standard defines the geometry and spatial position markers include alphanumeric, especially for band gap reference plane and with a cast of silicon
Rays.
This standard does not involve the production of marker technology.
3 Normative References
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
SEMIM13 silicon alphanumeric symbol specification (Specificationforalphanumericmarkingofsiliconwafers)
SEMIAUX001 supply-side flag code table (Listofwaferssupplieridentificationcodes)
SEMIAUX015 optical character recognition (OCR) character set Summary (SEMIOCRcharacteroutlines)
4 Terms and Definitions
The following terms and definitions apply to this document.
4.1
Misalignment of adjacent characters adjacentcharactermisalignment
Radj
The vertical distance between two adjacent character's baseline on the same line between characters.
4.2
Character spacing characterseparation
The horizontal distance between the adjacent boundary between any two characters.
4.3
Character spacing characterspacing
The horizontal distance between any two characters centerline between adjacent characters.
4.4
Character window characterwindow
It will contain all of the characters, including the rectangular window.
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