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GB/T 32996-2025: Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry
Status: Valid GB/T 32996: Evolution and historical versions
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Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry
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GB/T 32996-2025
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| GB/T 32996-2016 | English | 674 |
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Surface chemical analysis -- Analysis of metal oxide films by glow-discharge optical emission spectrometry
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GB/T 32996-2016
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PDF similar to GB/T 32996-2025
Basic data | Standard ID | GB/T 32996-2025 (GB/T32996-2025) | | Description (Translated English) | Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 38,386 | | Date of Issue | 2025-06-30 | | Date of Implementation | 2026-01-01 | | Older Standard (superseded by this standard) | GB/T 32996-2016 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 32996-2025: Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry
---This is an excerpt. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.), auto-downloaded/delivered in 9 seconds, can be purchased online: https://www.ChineseStandard.net/PDF.aspx/GBT32996-2025
ICS 71.040.40
CCSG04
National Standard of the People's Republic of China
Replaces GB/T 32996-2016
Surface chemical analysis - glow discharge optical emission spectrometry
Analysis of metal oxide films
(ISO /T S25138.2025, IDT)
Released on June 30, 2025
Implementation on January 1, 2026
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface III
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Principle 1
5 Instruments 1
6 Adjusting the Glow Discharge Spectrometer System Settings 3
7 Sampling 9
8 Create a working curve 9
9 Analysis of test samples 14
10 Presentation of analysis results 15
11 Precision 16
12 Test Report 16
Appendix A (Informative) Calculation of working curve constants and quantitative evaluation of depth analysis 17
Appendix B (Informative) Recommended Spectral Lines for Determination of Elements 24
Appendix C (Informative) Examples of Oxide Density and Related Quantities ρ0 26
Appendix D (Informative) Metal Oxide Film Interlaboratory Test Report 27
Reference 32
Preface
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document replaces GB/T 32996-2016 "Surface chemical analysis of metal oxide films by glow discharge optical emission spectrometry" and
Compared with GB/T 32996-2016, in addition to structural adjustments and editorial changes, the main technical changes are as follows.
--- Added the metal element Zr in the oxide range (see Chapter 1);
--- Added terms and definitions (see Chapter 3);
--- Changed 5.1.1 Overview and modified the instrument description, including the use of CCD and CID, COMS type solid-state array detectors
Spectrometer (see 5.1.1, 4.1.1 of the.2016 edition);
--- Added a 2.5mm anode size commonly found in commercial instruments (see 5.1.3.1);
--- Changed 6.1 Overview to introduce the most common working modes of RF sources and the differences between RF sources and DC sources, and emphasized the
The importance of forming a good vacuum seal between the test sample and other samples (see 6.1, 5.1 of the.2016 edition);
--- Changed the optical system inspection to include instruments equipped with array detectors (see 6.1, 6.2.1.1, 5.1, 5.2.1.2 of the.2016 edition);
--- Changed "Set detector high voltage" to "Set detector sensitivity parameters" and changed these settings to accommodate array detectors
Notes (see 6.1, 6.2.1.1, 6.2.2, 6.3.2, 6.3.3, 6.3.4,.2016 edition 5.1, 5.2.1.2, 5.2.2, 5.3.1, 5.3.2,
5.3.3);
--- Added 6.2.3 constant voltage and gas pressure mode, which sets the DC source discharge parameters by constant voltage and gas pressure mode.
Number (see 6.2.3);
--- Changed the description of optimized crater shape from mandatory to optional (see 6.2.1.3, 6.2.2, 6.2.3, 6.3.2, 6.3.3,
6.3.4, 5.2.1.4, 5.2.2, 5.3.1, 5.3.2, 5.3.3 of the.2016 edition);
--- Added 6.4.4 Control lamp cleanliness and starting performance, and introduced the method to verify whether the starting performance of the lamp meets the requirements for analysis
Procedure for ultra-thin films (see 6.4.4);
--- Changed the overview of 8.2.1 to change the minimum number of samples required to establish the working curve of each element from 5 to 3 (see 8.2.1,
7.2.1 of the.2016 edition);
--- Changed 8.4 Determination of sputtering rate of working curve sample and confirmation sample. The calculation of absolute sputtering rate should be in accordance with the manufacturer's
The method provided calculates the spatter volume of each crater, compensating, if possible, for craters with non-flat bottoms (see 8.4,.2016 edition).
7.4).
This document is equivalent to ISO /T S25138.2025 "Surface chemical analysis of metal oxide films by glow discharge optical emission spectrometry".
The file type was adjusted from ISO 's technical specifications to my country's national standards.
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document is proposed and coordinated by the National Technical Committee for Standardization of Surface Chemistry Analysis (SAC/TC608).
This document was drafted by. Shanghai Institute of Metrology and Measurement Technology, Shanghai University of Science and Technology, and Institute of Chemistry, Chinese Academy of Sciences.
The main drafters of this document are. Chen Yongkang, Xu Jian, Zhao Zhijuan, Zhang Yunyan, Zhang Xiaomin, Hao Ping, Wang Shuai, Zhou Ying, Liu Fen, and Wu Limin.
The previous versions of this document and the documents it replaces are as follows.
---First published in.2016 as GB/T 32996-2016;
---This is the first revision.
Surface chemical analysis - glow discharge optical emission spectrometry
Analysis of metal oxide films
1 Scope
This document describes the determination of metal oxide film thickness, mass per unit area, and chemical properties using glow discharge optical emission spectroscopy.
Composition method.
This method is suitable for measuring oxide films with a thickness of 5nm~10000nm on metals. The metal elements of the oxides include iron, chromium,
One or more of nickel, copper, titanium, silicon, molybdenum, zinc, magnesium, manganese, zirconium and aluminum. Other detectable elements include oxygen, carbon, nitrogen, hydrogen, phosphorus and sulfur.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
ISO 14284 Steel and iron - Sampling and preparation of samples for determination of chemical composition
Note. GB/T 20066-2006 Steel and iron — Sampling and preparation of samples for determination of chemical composition (ISO 14284.1996, IDT)
Note. GB/T 19502-2023 Surface chemical analysis - Glow discharge optical emission spectroscopy - General rules (ISO 14707.2021, IDT)
3 Terms and Definitions
There are no terms or definitions that require definition in this document.
4 Principles
Glow discharge emission spectroscopy analysis includes the following steps.
a) Prepare the sample to be tested, which is generally in the shape of a flat plate or disc (circular or rectangular with a width greater than 5 mm) suitable for the instrument or analysis requirements.
Sample, usually 20mm~100mm);
b) In a DC or RF glow discharge source device, causing cathode sputtering on the surface of a metal oxide;
c) In a glow discharge device, analyte atoms are excited in a plasma;
d) Spectral measurement of the emission intensity of the atomic characteristic lines of the object being measured over time (qualitative depth profiling);
e) Through the working curve, the change of intensity with time in the depth profile is converted into the change of mass fraction with sputtering depth (quantification).
Measure samples of known chemical composition and sputtering rate to establish a system working curve.
5 Instruments
5.1 Glow Discharge Optical Emission Spectrometer
5.1.1 Overview
The required apparatus shall consist of a Grimm type [4] or similar glow discharge source (DC or RF) and a multi-channel
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