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GB/T 32997-2016: Surface chemical analysis -- General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
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Surface chemical analysis -- General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
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GB/T 32997-2016
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Basic data | Standard ID | GB/T 32997-2016 (GB/T32997-2016) | | Description (Translated English) | Surface chemical analysis -- General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 30,342 | | Date of Issue | 2016-10-13 | | Date of Implementation | 2017-09-01 | | Regulation (derived from) | National Standard Notice No.1716 of 2016 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 32997-2016: Surface chemical analysis -- General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
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Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
ICS 71.040.40
G04
National Standards of People's Republic of China
Surface chemistry analysis glow discharge emission spectroscopy quantitative
General rules for component depth analysis
(ISO 11505..2012, IDT)
2016-10-13 released
2017-09-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
China National Standardization Management Committee released
Directory
Preface III
1 Scope 1
2 normative reference document 1
Principle 1
4 instrument 1
5 to adjust the glow discharge emission spectrometer system settings 3
6 Sample Handling 7
7 to establish the work curve 7
Analysis of test samples
9 Analysis of the results of the analysis 11
10 precision 12
11 Experimental Report 13
Appendix A (normative appendix) Calculation and quantitative evaluation of work curve constants in depth analysis 14
Appendix B (informative) Recommended line of determination of elements 23
Reference 25
Foreword
This standard is drafted in accordance with the rules given in GB/T 1.1-2009.
This standard uses the translation method equivalent to ISO 11505..2012 "Surface Chemistry Analysis Glow Discharge Emission Spectroscopy Quantitative Component Depth Profile
Analysis of the general rules. "
And the normative reference in this standard international documents are consistent with the relationship between China's documents are as follows.
Surface chemical analysis - Glow discharge emission spectrometric method (ISO 14707..2000, IDT); GB/T 19502-2004.
GB/T 20066-2006 Sampling and sample preparation methods for the determination of chemical constituents of steels and iron (ISO 14284..1996,
IDT).
This standard is proposed by the National Microparraph Analysis Standardization Technical Committee (SAC/TC38).
The drafting of this standard unit. Baoshan Iron and Steel Co., Ltd.
The drafting of this standard. Zhang Yi, Miao Leide, He Xiaolei, Wu Junfei, Chen Yingying.
Surface chemistry analysis glow discharge emission spectroscopy quantitative
General rules for component depth analysis
1 Scope
This standard specifies the method of measuring the thickness, mass (unit area) and chemical composition of the surface film of the material by glow discharge emission spectroscopy.
This standard is limited to glow discharge emission spectroscopy depth analysis of the description of quantitative general procedures, and can not be directly applied to a different
Thickness and element of the individual materials to be measured quantification.
Note. Any standard for surface analysis of test materials requires clear surface thickness and analytical elements, and provides inter-laboratory test results to
The validity of the method.
2 normative reference documents
The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article
Pieces. For undated references, the latest edition (including all modifications) applies to this document.
ISO 14707 Surface Chemical Analysis Glow Discharge Emission Spectroscopy General [Surfacechemicalanalysis-Glowdis-
chargeopticalemissionspectrometry (GD-OES) -Introductiontouse)]
ISO 14284 Sampling and sample preparation of steel and iron chemical composition samples (Steelandiron-Samplingand
preparationofsamplesforthedeterminationofchemicalcomposition
3 principle
The analysis of glow discharge emission spectroscopy includes the following process.
a) In a DC or RF glow source device, cathode sputtering is generated on the surface of the sample.
b) glow discharge of the plasma, the measured atoms and ions excited.
c) Spectral measurements (qualitative depth analysis) of time-dependent changes in emission intensity of atomic and ionic characteristic lines.
d) Through the work curve, the relationship between the intensity of time in the qualitative depth analysis is transformed into the relationship between the mass fraction and the sputter depth
). The system operating curve was established by measuring samples of known chemical composition and sputtering rate.
4 instruments
4.1 glow discharge emission spectrometer
4.1.1 Overview
The equipment required, as described in ISO 14707, shall include a Grimm type or similar glow discharge (direct current or radio frequency) and a multi-channel
The emission spectrometer provides an appropriate spectral line for the analytical element. Sequential spectrometers are not suitable because they must be measured simultaneously at high speed data acquisition
Multiple analysis of the intensity of the element wavelength.
Glow discharge light source of the hollow anode diameter size should be 1mm ~ 8mm, thin sample analysis recommended the use of cooling devices, such as with a cycle
The metal blocks of the coolant are not required to be provided in the operation of this method.
Since the principle of sample determination is based on the continuous sputtering of the surface film, the spectrometer should be equipped with a digital readout system to record the time resolution
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