| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| GB/T 29056-2012 | English | 229 |
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Trichlorosilane for silicon epitaxy -- Determination of boron, aluminium, phosphorus, vanadium, chrome, manganese, iron, cobalt, nickel, copper, arsenic, molybdenum and antimony content -- Inductively coupled plasma mass spectrometric method
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GB/T 29056-2012
| Valid |
GB/T 29056-2012
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