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SJ/T 10312-1992 English PDF

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SJ/T 10312-1992: General specification of electron beam exposure system
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SJ/T 10312-1992English459 Add to Cart 3 days [Need to translate] General specification of electron beam exposure system   SJ/T 10312-1992

PDF similar to SJ/T 10312-1992


Standard similar to SJ/T 10312-1992

GB 17341   JB/T 7403   

Basic data

Standard ID SJ/T 10312-1992 (SJ/T10312-1992)
Description (Translated English) General specification of electron beam exposure system
Sector / Industry Electronics Industry Standard (Recommended)
Classification of Chinese Standard N38;L99
Word Count Estimation 13,143
Date of Issue 6/15/1992
Date of Implementation 12/1/1992
Quoted Standard SJ/Z 1793; SJ 1276; JB 8; GBN 193; GB 191; GB 6388
Summary This standard specifies the electron beam lithography machine (hereinafter referred to as the exposure machine) terminology, technical requirements, test methods, inspection rules. This standard applies to a fine pattern of integrated circuits, microwave devices, optoelectronic devices, SAW devices such as the production of electron-beam lithography.

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