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SJ 1794-1981 English PDF

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SJ 1794-1981: General specification for diffusion furnace for semiconductor device manufacturing
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SJ 1794-1981English239 Add to Cart 3 days [Need to translate] General specification for diffusion furnace for semiconductor device manufacturing   SJ 1794-1981

PDF similar to SJ 1794-1981


Standard similar to SJ 1794-1981

SJ/T 11723   SJ/T 11634   GB/T 5593   SJ/T 11450   SJ/T 11183   SJ 21546   

Basic data

Standard ID SJ 1794-1981 (SJ1794-1981)
Description (Translated English) General specification for diffusion furnace for semiconductor device manufacturing
Sector / Industry Electronics Industry Standard
Classification of Chinese Standard L97
Word Count Estimation 6,613
Date of Issue 10/1/1981
Date of Implementation 10/1/1981
Summary This standard applies to semiconductor devices, integrated circuits using raw materials oxidation, diffusion, and other heat diffusion furnace. General technical requirements of this standard without making explicit provisions shall SJ 142-78 "Electronic equipment overall technical conditions" execute. Various types of diffusion furnace special requirements to be specified in the relevant product standard.

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