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JJF 1318-2011: Calibration Specification for Imaging Probe Measuring Machines
Status: Valid JJF 1318: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| JJF 1318-2011 | English | 509 |
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Calibration Specification for Imaging Probe Measuring Machines
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JJF 1318-2011
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| JJF 1318-1990 | English | 199 |
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Operating Technical Norm of Luminance Secondary Standard
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PDF similar to JJF 1318-2011
Basic data | Standard ID | JJF 1318-2011 (JJF1318-2011) | | Description (Translated English) | Calibration Specification for Imaging Probe Measuring Machines | | Sector / Industry | Metrology & Measurement Industry Standard | | Classification of Chinese Standard | A52 | | Classification of International Standard | 17.040 | | Word Count Estimation | 22,284 | | Date of Issue | 2011-11-14 | | Date of Implementation | 2012-02-14 | | Quoted Standard | JJF 1001; JJF 1094-2002; JJF 1130-2005; GB/T 24762-2009 | | Regulation (derived from) | AQSIQ Announcement No. 165 of 2011 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine | | Summary | This standard applies to plane rectangular coordinate system image measuring instrument, including in the plane perpendicular to the direction of a Cartesian coordinate system with positioning or measuring function image measuring instrument. | JJF 1318-2011: Calibration Specification for Imaging Probe Measuring Machines---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Calibration Specification for Imaging Probe Measuring Machines
People's Republic of China National Metrology Technical Specifications
Image measuring instrument calibration specification
Issued on. 2011-11-14
2012-02-14 implementation
The State Administration of Quality Supervision, Inspection and Quarantine released
Image measuring instrument calibration specification
Machines
This specification by the State Administration of Quality Supervision, Inspection and Quarantine approved on November 14, 2011, and from
From February 14, 2012 into effect.
Focal point. the National Technical Committee of length measuring geometry
Main drafting unit. Shenzhen Academy of Metrology and Quality Inspection
China Institute of Metrology
Zhejiang Institute of Metrology
Participated in the drafting. Guangdong Institute of Metrology
Shenzhen Digital Technology Development Co. Matussek
This specification length measuring geometry commissioned the National Technical Committee is responsible for interpretation
The main drafters of this specification.
In Jiping (Shenzhen Academy of Metrology and Quality Inspection)
Xue Zi (China Institute of Metrology)
Miao Huaqing (Shenzhen Academy of Metrology and Quality Inspection)
South side home (Shenzhen Academy of Metrology and Quality Inspection)
Mao Zhenhua (Zhejiang Institute of Metrology)
Drafters participate.
Leung even (Guangdong Institute of Metrology)
Tang Ning (Mosaic Shenzhen Digital Technology Development Co.)
table of Contents
1 Scope (1)
2. References (1)
3 Terms (1)
4 Overview (2)
5 Metrological characteristics (2)
5.1 Size measurement error (2)
5.2 each cross-section measurement consistency (EC) (3)
5.3 Error detection (3)
5.4 zoom probing error (PZ) (3)
6 calibration conditions (3)
Environmental conditions 6.1 (3)
6.2 Operating Conditions (3)
6.3 Configuration measuring system (3)
6.4 standard devices and other equipment (3)
6.5 Other Conditions (3)
7 calibration items and calibration methods (4)
7.1 size measurement calibration error EZ, EXY EV and general requirements (4)
7.2 dimensional measurement error P2D (5)
7.3 (measured in the plane) size measurement error EXY (5)
7.4 vertical dimension measurement error EZ (6)
7.5 each cross-section measurement consistency EC (6)
7.6 Imaging Touch probe error PV (6)
7.7 Imaging probe size measurement error EV (6)
7.8 magnification error detection PZ (6)
8 calibration results expression (7)
9 Recalibration interval (7)
Appendix A special steps Regulations Specification (8)
Appendix B single, bi-directional approach and a single, two-way and for measuring (10)
EXY two dimensions mask alignment method with Appendix C (11)
Appendix D measurements Uncertainty about Indication Error of example (12)
Image measuring instrument calibration specification
1 Scope
This instruction applies to image measuring instrument Cartesian coordinate system, including in the plane perpendicular to the direction of a Cartesian coordinate system
With positioning or measuring function image measuring instrument.
2. References
This specification refers to the following documents.
JJF 1001 common measurement terms and definitions
JJF 1094-2002 measuring instrument characteristics evaluation
JJF 1130-2005 geometric measurement equipment calibration Uncertainty Evaluation Guide
GB/T 24762-2009 Geometrical product specifications (GPS) image measuring instrument of acceptance and reverification
Detect
For dated references, only the dated edition applies to this specification; undated reference documents
Member, the latest edition (including any amendments) applies to this specification.
3 Terms
JJF 1001 defined and the following terms and definitions apply to this specification.
3.1 image detection system imagingprobingsystem
Get detection system measuring point by imaging system.
3.2 (image detection system) measurement plane measuringplane (oftheimagingprobingsystem)
Two-dimensional plane by the image detection system decisions.
3.3 (measured in-plane) dimension measurement error (EXY) lengthmeasurementerror (inmeasuringplane)
And measured in a direction perpendicular to the optical axis of the detection system of indication error of measuring the size of the plane.
Note.
1. In the present specification, XY plane parallel to the measuring plane by default, if not, shall be marked accordingly (for example EXZ or EYZ)
2. If only a direction parallel to the X-axis direction or only in a direction parallel to the Y-axis shows the resulting error can be expressed as EX or EY.
3.4 vertical dimension measurement error (EZ) perpendicularlengthmeasurementerror
Measured perpendicular to the plane direction indication error size measurement.
NOTE. In the present specification, Z-axis is parallel to the default imaging system optical axis and perpendicular to the measurement plane, if not, shall be marked accordingly
(Such as EX or EY).
3.5 Imaging probe size measurement error (EV) imagingprobelengthmeasurementerror
In the image measuring instrument motion platform and image detection system does not make any movement, the image field of view of the probe range
Indication error anywhere within the enclosed size measurement.
3.6 each cross-section measurement consistency (EC) consistencyofmeasurementresultindifferent
measuringplane
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