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Methods for chemical analysis of nickel-platinum target alloys - Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, coppe, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon contents - Induc
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Basic data | Standard ID | GB/T 43603.2-2024 (GB/T43603.2-2024) | | Description (Translated English) | Methods for chemical analysis of nickel-platinum target alloys - Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, coppe, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon contents - Induc | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H15 | | Classification of International Standard | 77.040.30 | | Word Count Estimation | 30,381 | | Date of Issue | 2024-03-15 | | Date of Implementation | 2024-10-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 43603.2-2024: Methods for chemical analysis of nickel-platinum target alloys - Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, coppe, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon contents - Induc
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 77.040.30
CCSH15
National Standards of People's Republic of China
Chemical analysis method of nickel-platinum target alloy
Part 2.Magnesium, aluminum, titanium, vanadium, chromium, manganese, iron,
Cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon
Determination of content
Inductively Coupled Plasma Mass Spectrometry
tin, samarium, lead, silicon contents-
Published on March 15, 2024, implemented on October 1, 2024
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document is part 2 of GB/T 43603 "Chemical analysis methods for nickel-platinum target alloys". GB/T 43603 has been published for the following
part.
--- Part 1.Determination of platinum content by inductively coupled plasma atomic emission spectrometry;
--- Part 2.Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content by inductive coupling
In-Plasma Mass Spectrometry;
--- Part 3.Determination of carbon content-High frequency infrared detection method.
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed by China Nonferrous Metals Industry Association.
This document is under the jurisdiction of the National Technical Committee on Standardization of Nonferrous Metals (SAC/TC243).
This document was drafted by. Guiyan Platinum Co., Ltd., Guiyan Testing Technology (Yunnan) Co., Ltd., Beijing Nonferrous Metals and Rare Earth Applications
Research Institute Co., Ltd., Youyan Yijin New Materials Co., Ltd., Shenzhen Zhongjin Lingnan Nonferrous Metals Co., Ltd., National Standard (Beijing) Inspection
Verification and Certification Co., Ltd., North Mine Testing Technology Co., Ltd., Tongling Nonferrous Metals Group Holdings Co., Ltd., Daye Nonferrous Design and Research Institute
Co., Ltd., Zijin Copper Co., Ltd., Nanjing Product Quality Supervision and Inspection Institute (Nanjing Quality Development and Advanced Technology Application Research Institute),
Shanxi North Copper Co., Ltd., Guangdong Academy of Sciences Industrial Analysis and Testing Center.
The main drafters of this document are. Li Qiuying, Zhao Wanchun, Wang Chuanjun, Zhu Wuxun, Sun Qi, He Jiao, Fang Haiyan, Wang Yuanyi, Yao Fang, Bao Yelin,
He Jianwen, Zhang Qiang, Sun Menghe, Wang Yang, Zheng Pei, Huang Lulu, Gao Ruifeng, Zan Minjiao, Chen Xiaodong, Liao Guiping, Xiao Hongxin, Yan Peng, Pan Xiaoling,
Liu Fangmei, Zhang Mengtian, and Liu Chaofang.
Introduction
Nickel-platinum target alloy is widely used in the semiconductor industry. It is a key material to ensure the performance of semiconductor devices and develop semiconductor technology.
The nickel-platinum target alloy with platinum content has special structure and properties, which plays an important role in the semiconductor manufacturing process.
The impurity composition of the nickel-platinum target alloy is directly related to the sputtering performance. Therefore, the chemical composition analysis of the nickel-platinum target alloy is particularly important;
GB/T 43603 is planned to consist of three parts according to the different test objects and test methods.
--- Part 1.Determination of platinum content by inductively coupled plasma atomic emission spectrometry. The purpose is to specify nickel-platinum target alloy
Inductively coupled plasma atomic emission spectrometry for determination of platinum content in water and its applicable determination range;
--- Part 2.Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content by inductive coupling
Plasma mass spectrometry. The purpose is to determine the content of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver,
Inductively coupled plasma mass spectrometry for the determination of palladium, tin, samarium, lead and silicon content and its applicable determination range;
--- Part 3.Determination of carbon content by high frequency infrared detection method. The purpose is to specify the high frequency infrared detection method for the determination of carbon content in nickel platinum target alloys.
Frequency infrared detection method and applicable measurement range.
The above documents clarify the scope of application, standardize reagents, materials, test equipment and procedures, and have been repeatedly tested by multiple laboratories.
The precision data is given through verification and validation, which enhances the consistency and comparability of data between different laboratories and provides a basis for testing the quality of nickel-platinum target alloys.
Establish a rigorous and standardized standardization foundation.
Chemical analysis method of nickel-platinum target alloy
Part 2.Magnesium, aluminum, titanium, vanadium, chromium, manganese, iron,
Cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon
Determination of content
Inductively Coupled Plasma Mass Spectrometry
Warning---People who use this document should have practical experience in formal laboratory work. This document does not address all possible safety issues.
The user is responsible for taking appropriate safety and health measures and ensuring compliance with the conditions stipulated in relevant national laws and regulations.
1 Scope
This document describes the determination of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon in nickel-platinum target alloys.
Determine the method.
This document is applicable to the determination of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content in nickel-platinum target alloys.
The measurement range is shown in Table 1.
Table 1 Measurement range
element
Measurement range (mass fraction)
element
Measurement range (mass fraction)
Ti 0.000010~0.010 Pd 0.000050~0.010
Ag 0.000010~0.010 Pb 0.000050~0.010
Sn 0.000010~0.010 Mg 0.00010~0.010
Sm 0.000010~0.010 Cu 0.00010~0.010
Zn 0.000050~0.010 Fe 0.00010~0.010
Al 0.000050~0.010 Co 0.00010~0.010
Cr 0.000050~0.010 Zr 0.00010~0.010
Mn 0.000050~0.010 Si 0.00050~0.010
V 0.000050~0.010 - -
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 8170 Rules for rounding off values and expression and determination of limit values
GB/T 17684 Terminology of precious metals and their alloys
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GB/T 43603.2-2024: Methods for chemical analysis of nickel-platinum target alloys - Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, coppe, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon contents - Induc
Status: Valid
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