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US$209.00 ยท In stock Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 39159-2020: High purity copper alloy target for integrated circuit Status: Valid
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| GB/T 39159-2020 | English | 209 |
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High purity copper alloy target for integrated circuit
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GB/T 39159-2020
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Basic data | Standard ID | GB/T 39159-2020 (GB/T39159-2020) | | Description (Translated English) | High purity copper alloy target for integrated circuit | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H62 | | Classification of International Standard | 77.150.30 | | Word Count Estimation | 11,183 | | Date of Issue | 2020-11-19 | | Date of Implementation | 2021-10-01 | | Regulation (derived from) | National Standard Announcement No. 26 of 2020 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration |
GB/T 39159-2020: High purity copper alloy target for integrated circuit---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(High purity copper alloy target for integrated circuit)
ICS 77.150.30
H62
National Standards of People's Republic of China
High purity copper alloy target for integrated circuit
2020-11-19 released
2021-10-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed by China Nonferrous Metals Industry Association.
This standard is under the jurisdiction of the National Nonferrous Metals Standardization Technical Committee (SAC/TC243).
Drafting organizations of this standard. Ningbo Jiangfeng Electronic Materials Co., Ltd., Youyan Yijin New Materials Co., Ltd., Ningbo Weitai Vacuum Technology
Limited company.
The main drafters of this standard. Cao Huanhuan, Yuan Haijun, Yao Lijun, Wang Xueze, Zeng Hao, Bian Yijun, Zhong Weihua, Zhou Youping, He Xin, Mu Erlong,
Gao Yan, Jiang Weilong.
High purity copper alloy target for integrated circuit
1 Scope
This standard specifies the classification, technical requirements, test methods, and inspection rules of high-purity copper alloy targets for integrated circuits (hereinafter referred to as targets)
And signs, packaging, transportation, storage, quality certificate and purchase order (or contract) content.
This standard applies to high-purity copper-aluminum (CuAl) alloy targets and high-purity copper-manganese (CuMn) alloy targets for integrated circuit manufacturing.
2 Normative references
The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this article
Pieces. For undated references, the latest version (including all amendments) applies to this document.
GB/T 8170 Numerical rounding rules and the expression and determination of limit values
GB/T 8651 Ultrasonic plate wave flaw detection method for sheet metal
GB/T 14265 General rules for analysis methods of hydrogen, oxygen, nitrogen, carbon and sulfur in metallic materials
GB/T 36165 Determination of the average grain size of metals by electron backscatter diffraction (EBSD) method
YS/T 347 Copper and copper alloy average grain size determination method
YS/T 482 Copper and copper alloy analysis method photoelectric emission spectrometry
YS/T 837 Sputtering target-backplane bonding quality ultrasonic inspection method
YS/T 922 Chemical analysis method for high purity copper. Determination of trace impurity element content. Glow discharge mass spectrometry
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
Target
The cathode part in sputtering deposition technology. The cathode material is in the form of molecules, atoms or ions under the impact of positively charged cations.
The formula is separated from the cathode and deposited on the anode surface.
3.2
Target blank
The material used as the sputtering material on the cathode.
3.3
Backplane
The material used to support or fix the target.
Note. The target blank and the back plate can be connected by welding (such as brazing, electron beam welding, diffusion welding, etc.), mechanical compounding, and bonding.
3.4
Surface roughness
Ra
The processing surface has small spacing and small peak and valley unevenness. The average arithmetic deviation value Ra of the profile, that is, at a certain measurement length l
Within the range, the average arithmetic deviation of the absolute value of the distance y from each point on the contour to the center line. Expressed by the formula.
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