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GB/T 37466-2019 | English | 359 |
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Laser lift-off equipment used for GaN
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GB/T 37466-2019
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Basic data Standard ID | GB/T 37466-2019 (GB/T37466-2019) | Description (Translated English) | Laser lift-off equipment used for GaN | Sector / Industry | National Standard (Recommended) | Classification of Chinese Standard | L95 | Classification of International Standard | 31.550 | Word Count Estimation | 18,152 | Date of Issue | 2019-06-04 | Date of Implementation | 2019-10-01 | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration |
GB/T 37466-2019: Laser lift-off equipment used for GaN---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Laser lift-off equipment used for GaN
ICS 31-550
L95
National Standards of People's Republic of China
GaN laser stripping equipment
Published on.2019-06-04
2019-10-01 implementation
State market supervision and administration
China National Standardization Administration issued
Content
Foreword III
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Product Classification and Marking 2
4.1 Classification 2
4.2 Model Mark 3
5 working conditions 4
5.1 Power supply 4
5.2 Ambient temperature 4
5.3 Relative humidity 4
5.4 Atmospheric pressure 4
5.5 Clean room level 4
5.6 Electromagnetic interference 4
5.7 Ground vibration requirements 4
6 Requirements 4
6.1 Appearance 4
6.2 Laser requirements 4
6.3 Scan Station 5
6.4 Machine Performance 5
6.5 Electrical requirements 5
6.6 Control device 5
6.7 Software Requirements 6
6.8 Electromagnetic compatibility 6
6.9 Noise 6
6.10 Mean Time Between Failures 6
6.11 Security Requirements 6
7 Detection method 7
7.1 Visual inspection 7
7.2 Laser inspection 7
7.3 Scanning Station Inspection 8
7.4 Machine performance test 9
7.5 Electrical inspection 9
7.6 Control device inspection 10
7.7 Software Detection 10
7.8 Electromagnetic compatibility test 10
7.9 Noise Test 10
7.10 Mean Time Between Failures Verification 10
7.11 Safety Requirements Check 10
8 Inspection rules 11
8.1 Inspection classification 11
8.2 Identification test 11
8.3 Factory inspection 11
8.4 Decision Rule 11
9 Marking, packaging, transport and storage 12
9.1 Mark 12
9.2 Packing 12
9.3 Transportation 13
9.4 Storage 13
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
Please note that some of the contents of this document may involve patents. The issuing organization of this document is not responsible for identifying these patents.
This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203).
This standard was drafted. Dongguan Zhongjiao Semiconductor Technology Co., Ltd., China Electronics Technology Standardization Institute.
The main drafters of this standard. Sun Yongjian, Liu Peng, Ding Xiaomin, Feng Yabin, Wang Qing.
GaN laser stripping equipment
1 Scope
This standard specifies the product classification and marking, working conditions, and requirements for GaN laser stripping equipment (hereinafter referred to as "laser stripping equipment").
Requirements, test methods, inspection rules, marking, packaging, transportation and storage.
This standard applies to equipment for stripping gallium nitride (GaN)-based epitaxial layers grown by sapphire substrates by laser method, aluminum nitride
Laser stripping equipment can refer to this standard.
2 Normative references
The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article.
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 191 packaging storage and transportation icon
GB 2893-2008 security color
GB 2894-2008 Safety signs and guidelines for their use
GB/T 3768-2017 Acoustic sound pressure method for the determination of noise source sound power level and sound energy level using the envelope measurement surface above the reflective surface
Simple method
GB/T 4208-2017 enclosure protection grade (IP code)
GB 4824-2013 Industrial, scientific and medical (ISM) radio frequency equipment disturbance characteristics limits and methods of measurement
GB/T 4942.1-2006 Degree of protection (IP code) for the overall structure of rotating electrical machines - Grading
GB/T 5080.7-1986 Equipment reliability test Verification test for failure rate and mean time between failures under the assumption of constant failure rate
Inspection plan
GB/T 5171.1-2014 Low-power motors - Part 1. General technical conditions
GB 5226.1-2008 Mechanical electrical safety machinery and electrical equipment - Part 1. General technical conditions
GB/T 6388 transport packaging receipt and delivery mark
GB 7247.1-2012 Safety of laser products - Part 1. Equipment classification, requirements
GB/T 7251.1-2013 Low-voltage switchgear and control equipment - Part 1. General
GB/T 9969 General guidelines for the use of industrial products
GB/T 14436 General Rules for Industrial Product Assurance Documents
GB/T 15706-2012 Mechanical Safety Design General Risk Assessment and Risk Reduction
GB/T 18268.1-2010 Electromagnetic compatibility requirements for electrical equipment - Part 1 . General requirements
GB/T 18490.1-2017 Mechanical safety laser processing machines - Part 1. General safety requirements
GB 50073-2013 clean factory design specification
GB/T 50087-2013 Industrial Enterprise Noise Control Design Specification
SJ/T 37-1996 Modeling and naming methods for special equipment for the electronics industry
3 Terms and definitions
The following terms and definitions as defined in GB/T 15706-2012 and GB 7247.1-2012 apply to this document.
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