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GB/T 36969-2018: Nanotechnology -- Method for the measurement of the nanofilm-thickness by atomic force microscopy
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Nanotechnology -- Method for the measurement of the nanofilm-thickness by atomic force microscopy
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GB/T 36969-2018
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Basic data | Standard ID | GB/T 36969-2018 (GB/T36969-2018) | | Description (Translated English) | Nanotechnology -- Method for the measurement of the nanofilm-thickness by atomic force microscopy | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J04 | | Classification of International Standard | 17.040.20 | | Word Count Estimation | 10,135 | | Date of Issue | 2018-12-28 | | Date of Implementation | 2018-12-28 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 36969-2018: Nanotechnology -- Method for the measurement of the nanofilm-thickness by atomic force microscopy
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Nanotechnology--Method for the measurement of the nanofilm--thickness by atomic force microscopy
ICS 17.040.20
J04
National Standards of People's Republic of China
Nanotechnology atomic force microscopy
Nano film thickness method
Published on.2018-12-28
2018-12-28 implementation
State market supervision and administration
China National Standardization Administration issued
Content
Foreword I
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Principle 1
5 Test conditions 2
5.1 Environmental conditions 2
5.2 Operating conditions 2
6 equipment 2
6.1 Atomic Force Microscope 2
6.2 Probe selection 2
6.3 Calibration of the instrument 2
7 sample 2
7.1 Preparation of samples 2
7.2 Cleaning of samples 2
8 Test Step 2
8.1 Preparation before collecting image data 2
8.2 Collection of image data 2
9 Data Processing and Calculation 3
10 repeatability and reproducibility 4
11 Test Report 4
Appendix A (informative) Preparation of film steps 5
Reference 6
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed by the Chinese Academy of Sciences.
This standard is under the jurisdiction of the National Nanotechnology Standardization Technical Committee (SAC/TC279).
This standard was drafted. Shanghai Jiaotong University, National Engineering Research Center for Nanotechnology and Applications.
The main drafters of this standard. Li Huiqin, Jin Chengyu, Liang Qi, He Dannong, Wei Feifei.
Nanotechnology atomic force microscopy
Nano film thickness method
1 Scope
This standard specifies the principle, test conditions, equipment, samples, test steps for measuring the thickness of nanofilms using atomic force microscopy (AFM).
And data processing.
This standard is applicable to inorganic material films with uniform and flat surface thickness in the nanometer range. Film thickness measurement of thicker and some organic films
Can also refer to the implementation.
2 Normative references
The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article.
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 31227 Atomic force microscope for measuring the surface roughness of sputtered films
JJF1059.1-2012 Measurement uncertainty evaluation and representation
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
Atomic force microscopy atomicforcemicroscopy
Control the distance between the probe and the sample by detecting the interaction force (attraction or repulsive force) between the probe and the sample surface to obtain a table
Scanning probe microscopy of surface topography.
[GB/T 27760-2011, definition 3.1]
3.2
Scan length scanlength
The distance from the start to the end of a scan.
3.3
Full scan raster
The scanning is repeated in the x direction when the probe is gradually moved in the y direction, and also refers to the area scanned by such motion.
[GB/T 31226-2014, definition 3.1.14]
4 Principle
First, an atomic force microscope (AFM) test was used to obtain a microscopic morphology including nanofilm steps. Atomic force microscope is making
The tip of the sample is contacted with the tip of the sample, and the interaction between the tip and the sample is used as feedback, and the feedback system is based on the detector voltage.
The change continuously adjusts the position of the tip or the z-axis of the sample, and the sample is scanned for the change in the scanning position of the sample.
The surface topography image of the product (see GB/T 31227). Then calculate the height difference between the film and its substrate from the topographical image, that is,
The thickness of the film.
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