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GB/T 31226-2014 English PDF

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GB/T 31226-2014: Standard test method for determination of surface roughness by scanning tunneling microscopy for gas distribution system components
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PDF similar to GB/T 31226-2014


Standard similar to GB/T 31226-2014

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Basic data

Standard ID GB/T 31226-2014 (GB/T31226-2014)
Description (Translated English) Standard test method for determination of surface roughness by scanning tunneling microscopy for gas distribution system components
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard J04
Classification of International Standard 17.040.20
Word Count Estimation 16,146
Date of Issue 9/30/2014
Date of Implementation 4/15/2015
Quoted Standard ASTM E691; ANSI B46.1-1985
Regulation (derived from) People's Republic of China Announcement of Newly Approved National Standards 2014 No. 22
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This Standard specifies a gas distribution system components to analyze the surface roughness of the method using a scanning tunneling microscope (STM). This Standard is applicable to the characterization of the surface roughness Ra of stainless steel mea

GB/T 31226-2014: Standard test method for determination of surface roughness by scanning tunneling microscopy for gas distribution system components


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Standard test method for determination of surface roughness by scanning tunneling microscopy for gas distribution system components ICS 17.040.20 J04 National Standards of People's Republic of China Scanning tunneling microscopy measuring the gas distribution system components The method of surface roughness Issued on. 2014-09-30 2015-04-15 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard was proposed by the Chinese Academy of Sciences. This standard by the National Standardization Technical Committee of nano technology (SAC/TC279) centralized. This standard was drafted. Shanghai Jiaotong University, nano-technology and application National Engineering Research Center. Drafters of this standard. Lihui Qin, Liang Qi, Lu Qinghua, Dannong, Zhang Bing.

Introduction

Semiconductor clean rooms need to protect the purity gas distribution system, this standard provides for the gas distribution system in one or more Evaluation of surface roughness elements'. STM surface profile is a non-contact method of testing the ability to test the nanoscale 3D surface topography of the sample, and the ability to characterize the surface structure and provide their assessment parameters. Such a surface structure as the basis of the test from a square Application method, hoping to get a different component surface roughness of comparative data to obtain high-quality gas purification system accessories. Directional etching or conductor coating may improve the surface wettability of gas, this standard does not address. This standard is assumed operator STM Who has mastered the principles of instrument operation and illusion. This standard defines a standard data representation format, and presents data analysis and evaluation of STM to get three-dimensional surface structure parameter. Scanning tunneling microscopy measuring the gas distribution system components The method of surface roughness

1 Scope

This standard specifies a method using a scanning tunneling microscope (STM) to analyze the gas distribution system components, surface roughness of. This standard applies to the characterization of the surface roughness Ra of less than 0.25μm stainless determination. This standard does not apply to not produce a thick layer of iron oxide tunneling effect.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. Test Method for Determination of ASTME691 between precision laboratory studies Standard Practice (PracticeforConducting anInterlaboratoryStudytoDeterminethePrecisionofaTestMethod) ANSIB46.1. 1985 surface structure (surface roughness, waviness and torsion degree) [SurfaceTexture (SurfaceRough- ness, Waviness, andLay)] 3 Terms and definitions, symbols and abbreviations 3.1 Terms and Definitions The following terms and definitions apply to this document. 3.1.1 Artifact artifact Non-real surface topography, including vibration, electrical noise, thermal drift or no influence over the formation of a probe topography. 3.1.2 Centerline centerline Image centerline graphicalcenterline Test direction parallel to the contour lines, so that the area between it and the contour equal on both sides of the center line. 3.1.3 Intercept length cutofflength lc Herein for the contour, i.e. the length of the sample, i.e. a scan length in nanometers (nm). 3.1.4 Current current This standard middle finger under certain conditions, the current flowing through the tunnel (nA) probe and the sample surface in any direction. 3.1.5 Characteristics height featureheight Scanning tunneling within the scope of any point relative to the lowest point of elevation data (height z direction), which is generated from the probe during scanning

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