GB/T 30901: Evolution and historical versions
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| GB/T 30901-2025 | English | RFQ |
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High purity ammonium fluoride solution
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GB/T 30901-2025
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| GB/T 30901-2014 | English | 329 |
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High purity ammonium fluoride solution for industrial use
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GB/T 30901-2014
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Basic data | Standard ID | GB/T 30901-2025 (GB/T30901-2025) | | Description (Translated English) | High purity ammonium fluoride solution | | Sector / Industry | National Standard (Recommended) | | Date of Implementation | 2026-03-01 | | Older Standard (superseded by this standard) | GB/T 30901-2014 | GB/T 30901-2014: High purity ammonium fluoride solution for industrial use---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
High purity ammonium fluoride solution for industrial use
ICS 71.060.50
G12
National Standards of People's Republic of China
High purity ammonium fluoride solution
Issued on. 2014-07-08
2014-12-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
The standard proposed by China Petroleum and Chemical Industry Association.
This standard by the National Standardization Technical Committee chemical inorganic chemicals Club (SAC/TC63/SC1) centralized.
This standard was drafted. Zhe Jiang Kaiheng Electronic Materials Co., Ltd., Fujian Shaowu Wing Fei Chemical Co., Ltd., Ying Peng Group/Xuancheng Heng
Thai Chemical Technology Co., Juhua Group Technology Center, Shandong-fluoro-New Materials Co., Ltd., CNOOC Tianjin Chemical Research Institute, National
Mineral products Quality Supervision and Inspection Center.
The main drafters of this standard. Tian Zhiyang, Asia Zhao, Wan group level, Lin Yixing, Zhang Hongying, Zhou Pengpeng, Guofeng Xin, Wang Fang.
High purity ammonium fluoride solution
1 Scope
This standard specifies the classification of high purity ammonium fluoride solution, requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage and
Safety.
This standard applies to high-purity ammonium fluoride solution. The products are mainly used in integrated circuits and VLSI chip cleaning, etching
Carved and other industries.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 191-2008 Packaging - Pictorial signs
GB/T 6678 General Principles for Sampling Chemical Products
GB/T 6680 General rules for sampling liquid chemical products
Laboratory use specifications and test methods GB/T 6682-2008 Analysis
GB/T 8170 repair value expressed about the rules and limit values \u200b\u200band judgment
GB/T 23769-2009 aqueous solution of inorganic chemical products - General method for determination of pH
GB/T 23770-2009 liquid inorganic chemical products Chroma General method
HG/T 3696.1 inorganic chemical products, chemical analysis standard solution, Preparations Part 1. Standard titration solution
Preparation liquid
HG/T 3696.2 inorganic chemical products, chemical analysis standard solution, Preparations Part 2. impurity standard solution
Preparation liquid
HG/T 3696.3 inorganic chemical products, chemical analysis standard solution, Preparations Part 3. Formulation and products
Preparation
3 formula and relative molecular mass
Molecular formula. NH4F.
Molecular Weight. 37.04 (according to 2011 international relative atomic mass).
4 rating
High purity ammonium fluoride solution use is divided into two levels.
--- UP-S grade. mainly used for integrated circuit line width of 0.2μm or more cleaning and etching;
--- UP-SS grade. mainly used for integrated circuit line width of 0.09μm ~ 0.2μm cleaning and etching.
5 Requirements
5.1 Appearance. colorless, transparent liquid.
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