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GB/T 29731-2013: Surface chemical analysis -- High resolution auger electron spectrometers -- Calibration of energy scales for elemental and chemical-state analysis
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Surface chemical analysis -- High resolution auger electron spectrometers -- Calibration of energy scales for elemental and chemical-state analysis
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GB/T 29731-2013
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Basic data | Standard ID | GB/T 29731-2013 (GB/T29731-2013) | | Description (Translated English) | Surface chemical analysis -- High resolution auger electron spectrometers -- Calibration of energy scales for elemental and chemical-state analysis | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 28,254 | | Quoted Standard | GB/T 22461-2008; GB/T 27025-2008 | | Adopted Standard | ISO 17974-2002; MOD | | Regulation (derived from) | National Standards Bulletin No. 18 of 2013 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies: for surface elements and chemical state analysis Auger electron spectroscopy the kinetic energy of standard calibration methods. | GB/T 29731-2013: Surface chemical analysis -- High resolution auger electron spectrometers -- Calibration of energy scales for elemental and chemical-state analysis
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Surface chemical analysis. High resolution auger electron spectrometers. Calibration of energy scales for elemental and chemical-state analysis
ICS 71.040.40
G04
National Standards of People's Republic of China
Surface chemical analysis of high resolution Auger electron spectroscopy
Elemental analysis and chemical state energy scale calibration
(ISO 17974.2002, MOD)
Issued on. 2013-09-18
2014-06-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Preface Ⅰ
Introduction Ⅱ
1 Scope 1
2 Normative references 1
3 Terms and definitions
4 Symbols and abbreviations 1
5 Summary of Method 2
6 energy scale calibration step 5
The maximum number of points in Appendix A (normative) to 0.1eV energy spectrum peaks are spaced Savitzky-Golay smoothing of a single 16
Appendix B (normative) with a simple method for calculating least squares method to determine the kinetic energy peak 17
Derivation Annex C (informative) Uncertainty 19
Annex D (informative) the measured kinetic energy of the uncertainty of reference 21
References 23
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard uses redrafted Law Amendment uses ISO 17974.2002 "Surface chemical analysis of high resolution Auger electron spectroscopy element
Energy and chemical state analysis by standard calibration. "
This standard and ISO 17974.2002 technical differences and the following reasons.
--- On normative references, this standard has been adjusted technical differences, in order to adapt our technical conditions, the adjusted situation
Focus is reflected in the status of Chapter 2, "Normative references", the specific adjustments are as follows.
● with the GB/T 22461-2008 instead of ISO 18115.2001, IDT;
● increase the GB/T 27025-2008 instead of ISO 17025-2005, MOD.
This standard also made the following editorial changes.
--- The standard name was changed to "surface chemical analysis of high resolution Auger electron spectroscopy and elemental chemical state analysis of energy calibration
quasi";
--- The abbreviations, figures, tables, formulas, notes, and normative changes.
The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.
This standard was drafted. Tsinghua University, Xiamen University.
The main drafters of this standard. Yao Wenqing, Wang Shui Ju, Zhang accounted M, Mu hero, Li Zhanping, Zhu law.
Introduction
Auger electron spectroscopy (AES) is widely used for surface analysis of materials. By measuring the spectrum is determined by the Auger electron kinetic energy peaks with different elements
The kinetic energy of a list of values \u200b\u200bor manual alignment of spectrum to identify the samples contained elements other than hydrogen and helium. Information can be chemical states of these elements
Auger electron peaks measured with respect to the chemical shift reference state is obtained. Identification of chemical state requirements for chemical shift measurement accuracy up to
To 0.1eV, one by one the required measurements, and the need for a sufficiently accurate reference source, thus requiring the Auger electron spectroscopy were the kinetic energy standard
Calibration is usually uncertainty to ≤0.3eV.
Kinetic energy calibration method using a metal target sample copper (Cu) and aluminum (Al) specified in this standard, or gold (Au). The calibration method
Auger electron spectroscopy for measuring the relative resolution of 0.2% or better direct spectrum. The kinetic energy of its application range for gold is 0 ~ 2250eV,
For aluminum, compared with 0 ~ 1550eV.
Auger electron kinetic energy is usually a reference to the vacuum level, such references are still many analysts use. Vacuum level is uncertain, however, not
The instrument will vary with 0.5eV or more. Although the use of vacuum level as a reference does not lead to the identification of the elements of fuzzy, but it will lead to the chemical
About the state of high-resolution measurement uncertainty. Therefore, in designing Auger electron spectroscopy and X-ray photoelectron spectroscopy with the instrument, the Senate
The kinetic energy of the Fermi level test, its value is higher than the reference vacuum level 4.5eV. The kinetic energy of the reference standard Fermi level.
To provide compliance with GB/T 27025 (ISO 17025) [1] analysis requirements, and calibration for other purposes Auger electron spectroscopy, can
You can require an estimated calibration uncertainty statement. These instruments are limited within a certain tolerance limit ± δ to give school its kinetic measurements
quasi. δ values \u200b\u200bin this standard is not specified because it depends on Auger electron spectroscopy application and design may be. δ value by a user in accordance with this standard
Stability of experience, instrument calibration, instrument uncertainty of measurement as well as the kinetic energy of the calibration work required in the intended application
The amount of their own choice. This standard can be used to select the appropriate δ provides value information. Typically δ≥0.2eV and larger than the repeatability standard deviation of σR
4 times.
For the instrument to be calibrated after a count recorded instrument drift over time, the reference value of the kinetic energy of the discrete plus 95% confidence level is not extended calibration
Determined shall not exceed the tolerance limit selected. Before spectrometer may miss school, it should be recalibrated. its calibration measurements and take measures to reduce
The difference between the reference value and the measured value. This difference does not have to be reduced to zero, but usually reduced to the analytical work required tolerance limits
Several one-half.
Although this standard does not consider all possible defective instrument itself, as required by the test can be very time consuming, and requires both expertise
Knowledge and equipment. But the standards discussed the Auger electron spectroscopy kinetic energy standard calibration basic and common problems.
Surface chemical analysis of high resolution Auger electron spectroscopy
Elemental analysis and chemical state energy scale calibration
1 Scope
This standard specifies the kinetic energy of the standard calibration method of Auger electron spectroscopy for surface elemental and chemical state analysis. And also provides for calibration
Schedule for the energy value in the middle of a test standard linear kinetic energy, kinetic energy at the level of uncertainty from each region one o'clock confirm the scale calibration,
Small scale calibration drift, and provisions at 95% confidence level expanded uncertainty of the kinetic energy scale calibration (this includes laboratories of uncertainty
Inter study observed phenomena, but does not cover all possible defects).
This standard applies only to sputter ion gun cleaning equipment. Instrument does not apply to the following conditions. Kinetic energy scale with error
Nonlinear change significantly; spectrometer resolution at relatively lower than 0.2% fixed ΔE/E [Delta] E mode or fixed mode when 1.5eV,
It requires tolerance limit of ± 0.05eV or less. Does not apply to the electron gun can not be the instrument 5keV ~ 10keV energy range operations.
This standard does not provide a full scale calibration test, the test should be verified for each point on the energy scale can be set, and should be the instrument manufacturer
's Recommended procedures.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001)
GB/T 27025-2008 testing and calibration laboratories General requirements (ISO 17025.2005)
3 Terms and Definitions
Terms and definitions GB/T 22461-2008, as defined in this document apply.
4 Symbols and Abbreviations
This standard uses the following symbols and abbreviations (see Annex B).
AES Auger electron spectroscopy
A reduction factor analyzer
The proportion of energy a measured error
b measured zero offset error in units of eV
c R factor
d R2 coefficients
Results Ecorr kinetic energy after correcting Emeas in units of eV
Kinetic Eelem a frequent objective element, whose value has been set on the indicated kinetic energy standard, after calibration can be read out accurately to eV
Units
Emeas measured kinetic energy in eV units
Measuring the average kinetic energy Emeas, n n-th peak, units of eV
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