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GB/T 29732-2021: Surface chemical analysis - Medium resolution auger electron spectrometers - Calibration of energy scales for elemental analysis
Status: Valid GB/T 29732: Evolution and historical versions
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Surface chemical analysis - Medium resolution auger electron spectrometers - Calibration of energy scales for elemental analysis
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GB/T 29732-2021
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| GB/T 29732-2013 | English | 599 |
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Surface chemical analysis -- Medium resolution auger electron spectrometers -- Calibration of energy scales for elemental analysis
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Basic data | Standard ID | GB/T 29732-2021 (GB/T29732-2021) | | Description (Translated English) | Surface chemical analysis - Medium resolution auger electron spectrometers - Calibration of energy scales for elemental analysis | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Word Count Estimation | 14,189 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 29732-2021: Surface chemical analysis - Medium resolution auger electron spectrometers - Calibration of energy scales for elemental analysis
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Surface chemical analysis -- Medium resolution auger electron spectrometers -- Calibration of energy scales for elemental analysis
ICS 71:040:40
CCSG04
National Standards of People's Republic of China
Replaces GB/T 29732-2013
Medium Resolution Auger Electron Spectrometer for Surface Chemical Analysis
Energy Scale Calibration for Elemental Analysis
(ISO 17973:2016, IDT)
Published on 2021-12-31
2022-07-01 Implementation
State Administration for Market Regulation
Released by the National Standardization Administration
directory
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Symbols and Abbreviations 1
5 Method overview 2
6 Energy Scale Calibration Step 3
6:1 Preparing reference materials 3
6:2 Mounting sample 3
6:3 Cleaning the sample 3
6:4 Selecting spectrometer settings for energy calibration 4
6:5 Instrument Operation 4
6:6 Measurement of reference peaks 5
6:7 Determining the Measured Kinetic Energy of the Reference Peak 6
6:8 Determining the calibration range of the kinetic energy scale of the instrument 6
6:9 Next calibration 8
Reference 9
foreword
This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules of Standardization Documents"
drafted:
This document replaces GB/T 29732-2013 "Energy for elemental analysis by medium resolution Auger electron spectrometer for surface chemical analysis"
Standard Calibration", compared with GB/T 29732-2013, except for editorial modifications, the main technical changes are:
---Change the "Resolution" in the file to "Resolution":
This document is identical to ISO 17973:2016 "Energy Scale for Elemental Analysis by Medium Resolution Auger Electron Spectrometer for Surface Chemical Analysis"
calibration":
Please note that some content of this document may be patented: The issuing agency of this document assumes no responsibility for identifying patents:
This document is proposed and managed by the National Microbeam Analysis Standardization Technical Committee (SAC/TC38):
This document was drafted by: Tsinghua University, China University of Petroleum (Beijing):
The main drafters of this document: Yao Wenqing, Yang Liping, Xu Tongguang, Wang Yajun, Duan Jianxia, Li Zhanping:
The previous versions of this document and its superseded documents are as follows:
---First published in:2013 as GB/T 29732-2013;
---This is the first revision:
Introduction
Auger Electron Spectroscopy (AES) is widely used for surface analysis of materials: By comparing the energy and shape of the Auger electron peak, identify the
Contains different elements other than hydrogen and helium: Usually, when the calibration uncertainty of the energy standard reaches 3 eV, the attribution of the peak can be determined: This document is only applicable to
Analysis for this level of accuracy (for higher level of accuracy analysis can be found in ISO 17974):
The calibration method for the kinetic energy scale specified in this document uses reference materials such as pure copper and pure aluminium (or pure gold): because the flaw is accurate
The effect of the degree level is not obvious, so the test for instrument defects is not included in the document:
Traditionally, the kinetic energy of Auger electrons is referred to the vacuum level, and this reference value is still used by many analysts: However, the vacuum energy level is not easy to determine,
The same instrument will differ by more than 0:5eV: Although the use of vacuum levels as a reference generally does not lead to ambiguity of element attribution, it can lead to
Uncertainty of high-resolution measurements related to chemical states: Therefore, when designing Auger electron spectroscopy and X-ray photoelectron spectroscopy instruments, the kinetic energy is
The Fermi level is used as a reference, which is 4:5eV higher than that of the vacuum level: According to this document, users can freely choose the parameters suitable for their work:
Exam level:
Medium Resolution Auger Electron Spectrometer for Surface Chemical Analysis
Energy Scale Calibration for Elemental Analysis
1 Scope
This document specifies a calibration method for an Auger electron spectrometer kinetic energy scale with an uncertainty of 3 eV for the identification of surface conventional elements:
White: In addition, this document also specifies a method for determining the calibration period:
This document applies to instruments in direct mode or differential mode whose resolution is less than or equal to 0:5%, and the peak value of the modulation amplitude in differential mode is
2eV, equipped with an inert gas ion gun or other sample cleaning method, a spectrometer with an electron gun of 4keV or higher beam energy:
2 Normative references
The contents of the following documents constitute essential provisions of this document through normative references in the text: Among them, dated citations
documents, only the version corresponding to that date applies to this document; for undated references, the latest edition (including all amendments) applies to
this document:
ISO 18115 Surface chemical analysis- Vocabulary
Note: GB/T 22461-2008 Surface Chemical Analysis Vocabulary (ISO 18115:2001, IDT)
3 Terms and Definitions
Terms and definitions defined in ISO 18115 apply to this document:
4 Symbols and Abbreviations
The following symbols and abbreviations apply to this document:
AES Auger Electron Spectroscopy
a Measured energy scalar error
b Measured zero offset error, in electron volts (eV)
Ecorr Kinetic energy result after calibration of Emeas, in eV
Emeas Kinetic energy measured in eV
Emeas,n Kinetic energy measured for the nth peak in Table 1, in eV
Eref,n The kinetic energy reference value for the nth peak in Table 1, in eV
FWHM Half-height peak width, in eV
FWHM of the W peak
Δn offset energy, for n=1, 2, 3, 4 peaks (see Table 1), subtract the reference kinetic energy value from the average of the measured calibration peak kinetic energy
given in eV
Additional correction to Emeas after ΔEcorr calibration to provide corrected kinetic energy results
β The energy scale scan rate of the simulated system in electron volts per second (eV/s)
τ Time constant of the analog detector electronics in seconds (s)
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