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GB/T 29558-2013: Surface chemical analysis -- Auger electron spectroscopy -- Repeatability and constancy of intensity scale
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Surface chemical analysis -- Auger electron spectroscopy -- Repeatability and constancy of intensity scale
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GB/T 29558-2013
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Basic data | Standard ID | GB/T 29558-2013 (GB/T29558-2013) | | Description (Translated English) | Surface chemical analysis -- Auger electron spectroscopy -- Repeatability and constancy of intensity scale | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 16,141 | | Adopted Standard | ISO 24236-2005, IDT | | Regulation (derived from) | National Standards Bulletin No. 10 of 2013 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies: an assessment of its intensity scale repeatability and constancy methods. It applies only to clean with a sputter ion gun instrument. This standard does not purport to be a strength/energy response function calibration, This calib | GB/T 29558-2013: Surface chemical analysis -- Auger electron spectroscopy -- Repeatability and constancy of intensity scale
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Surface chemical analysis.Auger electron spectroscopy.Repeatability and constancy of intensity scale
ICS 71.040.40
G04
National Standards of People's Republic of China
Surface chemical analysis - Auger electron spectroscopy
Repeatability and consistency of intensity scale
(ISO 24236.2005, IDT)
Issued on. 2013-07-19
2014-03-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard uses the translation method identical with ISO 24236.2005 "Surface chemical analysis - Auger electron spectroscopy and repeatability of intensity scale
consistency".
The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.
This standard is drafted by. China University of Science and Technology Department of Physics.
Drafters of this standard. DING ZE-JUN, Zhangzeng Ming, who glory, Mao Shifeng, Li Yonggang, Mei Hongping.
Introduction
The material is widely used in surface analysis by Auger electron spectroscopy (AES). Elements in the sample (except hydrogen and helium) can be measured by comparing
Outgoing Auger electron kinetic energy corresponding to the value of the different elements of the manual to identify the table values. For information about the content of these elements can be measured from the
Auger electron intensity was obtained. The formula to calculate the content available and relative sensitivity factors provided by the spectrometer manufacturer to carry out. weight
To the sensitivity factors to be applied to the spectrometer, and this is precisely when the general spectrometer installed or by the appropriate body strength equipment/energy
The response of function after calibration. This standard focuses on two aspects of the Auger electron spectroscopy instrument intensity measurement uncertainty important contribution.
2) intensity over time drift; 1) strength measurement repeatability.
Repeatability analysis of the differences and similarities between similar samples is important. Instrument limit measurement repeatability factors include. electron-beam source
The stability of the detector sensitivity settings, the instrument is placed on the sample, the data acquisition parameters and data processing steps. The strength of the underlying instrument drift
The accuracy of the overall shift will limit any quantitative analysis, it is the source. EDS structural components, electronics accessories and detector aging equivalent
should. It has been found, Auger electron spectroscopy During use, the strength of the instrument/energy response function can change over the life of the instrument.
This standard describes the strength of the underlying instrument to determine the repeatability and consistency of a simple way in order to make the following correction, such as improved
Operating procedures, reset or recalibrate the instrument parameters intensity/energy response function. Therefore, this method should be regularly implemented, and the manufacturer
The most useful cycle or other appropriate institutions for verification of instrument work properly. The method uses a copper (Cu) sample, and an electron gun beam suitable for
Can at least 2keV Auger electron spectroscopy.
Since the required test can be very time consuming and requires expert knowledge and auxiliary equipment, so this method is not possible to cover all the instruments missing
trap. However, this conventional method is to solve the basic problem of Auger electron spectroscopy repeatability and drift intensity scale and design. This
Method with the use of ISO 17973 [1] or ISO 17974 [2] spectrometer energy calibration performed simultaneously.
Surface chemical analysis - Auger electron spectroscopy
Repeatability and consistency of intensity scale
1 Scope
Energy electron gun for use in routine analysis of at least 2keV Auger electron spectroscopy, this standard provides an assessment of its strong
Repeatability and constancy of the subject methods. It applies only to a sputter ion gun cleaning equipment. This standard is not intended to become a
Species intensity/energy response calibration functions such calibration by equipment manufacturers or other bodies to develop. The method provides data to assess and determine
Recognized instrument intensity/energy response function to maintain a constant accuracy, this can affect the constancy of some instrument settings given guidance.
2 Symbol
By HL differential mode CuL3VV average peak peak - peak height
HLj a set of measurements in the measurement of the value of the j HL contribution
Under HM differential mode CuM2,3VV average peak peak - peak height
H Mj a set of measurements in the j-th value measurement of HM contribution
i Pi, one of the five parameters identifier
Mark j parameters Pij one single measurement
CuL3VV peak located directly under the NL average maximum intensity mode
NLj a set of measurements in the measurement of the value of j-th contribution NL
CuM2,3VV position of the peak at an average maximum intensity NM Direct Mode
NMj a set of measurements in the measurement of the value of j-th contribution NM
Pi represents the parameter HL, HM, NL, NM and HL/HM any one of the average
Pij having the j-th average value of Pi measured parameter
Uncertainty of average value of Pi U95 P () i confidence level of 95%
W peak FWHM
β analog system scan rate
δ confidence level of 95% (set by analysts) when HL/HM tolerance limits
σP () parameter Pi repeatability standard deviation
The time constant τ analog detection system
3 Method Summary
This summary is intended to facilitate the detailed steps presented in Chapter 4 understanding. This step is evaluated by Auger electron spectroscopy, and need to get registration
Preparation of reference foil, and electronics to measure CuM2,3VV Auger peak intensity CuL3VV where appropriate instrument settings. We chose these
Peak is low because of their proximity kinetic analysis of the actual end use. They have been recognized, and corresponding reference data. Choose low
CuM2,3VV peak energy, which is due to its energy range can be used to monitor stray fields undesirable change in strength.
4.1 to 4.5 describes the initial steps of sample preparation and instrument settings, as shown in the flowchart in Figure 1, the figure in the corresponding sub-headings paraphrase.
If you do not do strength repeatable measurements should be 4.6 to 4.7 feed. In 4.7, the order of repeated measurements and 7 times CuM2,3VV
CuL3VV peak intensity. These data give the peak intensity repeatability standard deviation, both from the electron beam intensity, energy spectrometer detectors and electronics attached
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