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Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, analysis area, and sample area viewed by the analyser
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GB/T 29556-2013
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PDF similar to GB/T 29556-2013
Basic data | Standard ID | GB/T 29556-2013 (GB/T29556-2013) | | Description (Translated English) | Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, analysis area, and sample area viewed by the analyser | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 18,181 | | Adopted Standard | ISO/TR 19319-2003, IDT | | Regulation (derived from) | National Standards Bulletin 2013 No. 10 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies: Auger electron spectroscopy and X-ray photoelectron spectroscopy lateral resolution, analysis area and the analyzer can detect the sample size measurement method. This standard applies to Auger electron spectroscopy and X-ray phot |
GB/T 29556-2013: Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, analysis area, and sample area viewed by the analyser
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser
ICS 71.040.40
G04
National Standards of People's Republic of China
Surface chemical analysis - Auger electron spectroscopy and X-ray
XPS lateral resolution, analysis area and
Determination of analyzer can detect the sample area
analysisarea, andsampleareaviewedbytheanalyser
(ISO /T R19319.2003, IDT)
Issued on. 2013-07-19
2014-03-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard is based on the rules of GB/T 1.1-2009 and GB/T 20000.2-2009 given draft.
This standard uses the translation method identical with ISO /T R19319.2003 "Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron
Lateral resolution spectrum analysis measurement "area and the analyzer can detect the sample area.
The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.
This standard is drafted by. Xiamen Ailao De Optoelectronics Co., Ltd., Department of Chemistry, Institute of Chemistry.
Drafters of this standard. aqua regia chrysanthemum, Cen Danxia, \u200b\u200bYao Wenqing, Li Zhanping, Liu Fen.
Introduction
This standard applies to the following four aspects.
a) providing a measured Auger electron spectroscopy and X-ray photoelectron spectroscopy lateral resolution guidance, here it is measured on the surface of the sample
Auger electron or X-ray photoelectron peak intensity associated with the location.
b) provide guidance on the measurement and analysis in the area of \u200b\u200bAuger electron spectroscopy and X-ray photoelectron spectroscopy applications.
c) to provide measurement analyzer can detect in the Auger electron spectroscopy and X-ray photoelectron spectroscopy applications in the area of \u200b\u200bthe sample
guide.
d) for the development of measuring Auger electron spectroscopy and X-ray photoelectron spectroscopy lateral resolution, analysis area, and the analyzer can detect
New international standards and national standards provide the basis for the sample area.
Surface chemical analysis - Auger electron spectroscopy and X-ray
XPS lateral resolution, analysis area and
Determination of analyzer can detect the sample area
1 Scope
This standard specifies the Auger electron spectroscopy and X-ray photoelectron spectroscopy lateral resolution, analysis area and the analyzer can detect the sample
Measurement product area.
This standard applies to Auger electron spectroscopy and X-ray photoelectron spectroscopy lateral resolution, analysis area and analyzer testing.
2 Terms and definitions
ISO 18115 [1] Definition of terms and definitions apply to this document. For ease of use, it is given below ISO 18115 [1] The "surface analysis
Plot < for sample> "and" lateral resolution "is defined.
2.1
Analysis area analysisarea
< For samples> in the sample to detect a two-dimensional flat surface of the flat surface of the total analysis signal or the signal of a specific percentage
area.
2.2
Lateral resolution lateralresolution
In the sample with a flat surface or within the imaging plane orthogonal to the optical axis, respectively, can be trusted to determine when to change the composition of the tested
distance.
Note 1. The selected plane should be described.
Note 2. In practice, the lateral resolution can be understood as.
a) FWHM (FWHM) intensity from the sample is very small emission point distribution; or
B) When a sample containing the cross section significantly stepped function of the signal and to distinguish the nature of the relevant line scan performed, a strength of between 12% and 88% of points
Distance of the Gaussian intensity distribution is concerned, these two values \u200b\u200bare the same. Other distribution, the choice of the other parameters may be more appropriate. On the stairs
Function, often using online scanner intensity of 20% and 80% of the strength of two points or between 16% and 84% of the distance between two points. The latter pair is
Gauss resolution 2σ width function.
2.3
Analyzer can detect the sample area sampleareaviewedbytheanalyzer
< For Spectrometer> flat surface when the test sample, the analyzer can collect all the analysis of the sample signal or the signal of a specific percentage
Two-dimensional area of \u200b\u200bthe sample surface.
NOTE. The standard term "analyzer that can be detected in a sample area" in the area of \u200b\u200bthe first sample is placed in the spectrometer axis at right angles to the plane
The corresponding area distinguished.
3 Symbols and Abbreviations
AES Auger electron spectroscopy
Error function Erf
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