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GB/T 25915.17-2024: Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications
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Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications
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GB/T 25915.17-2024
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Basic data | Standard ID | GB/T 25915.17-2024 (GB/T25915.17-2024) | | Description (Translated English) | Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | C70 | | Word Count Estimation | 32,345 | | Date of Issue | 2024-08-23 | | Date of Implementation | 2024-08-23 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 25915.17-2024: Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 13.040.35
CCSC70
National Standard of the People's Republic of China
Cleanrooms and related controlled environments
Part 17.Application of particle deposition rate
(ISO 14644-17.2021, IDT)
Released on 2024-08-23
2025-03-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Symbols 3
5 Particle deposition rate usage 3
6 Measurement of particle deposition rate 4
7 Particle deposition rate level 4
8 Records 5
Appendix A (Informative) Measurement of particle deposition rate 7
Appendix B (Informative) Particle Deposition Rate Measurement Example 9
Appendix C (Informative) Measurement of particle shielding rate 12
Appendix D (Informative) Relationship between particle deposition rate and suspended particle concentration 15
Appendix E (Informative) Assessment and Control of Particle Deposition 16
References 19
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document is part 17 of GB/T 25915 Cleanrooms and Related Controlled Environments. GB/T 25915 has been published for the following
part.
--- Part 1.Classification of air cleanliness levels according to particle concentration;
--- Part 2.Monitoring of particle concentration in clean room air;
--- Part 3.Detection methods;
--- Part 4.Design, construction and start-up;
--- Part 5.Operation;
--- Part 6.Vocabulary;
--- Part 7.Isolation devices (clean air hoods, glove boxes, isolators, microenvironments);
--- Part 8.Classification of air cleanliness (ACC) levels according to chemical concentration;
--- Part 9.Classification of surface cleanliness levels according to particle concentration;
--- Part 10.Classification of surface cleanliness levels according to chemical concentration;
--- Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air;
--- Part 13.Surface cleaning to meet particle and chemical cleanliness requirements;
--- Part 14.Assessment of equipment suitability according to particle concentration;
--- Part 15.Assessment of suitability of equipment and materials according to concentration of gaseous chemicals;
--- Part 16.Improving the energy efficiency of clean rooms and air purification devices;
--- Part 17.Application of particle deposition rate.
This document is equivalent to ISO 14644-17.2021 "Cleanrooms and related controlled environments Part 17.Application of particle deposition rates".
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed and coordinated by the National Technical Committee for Standardization of Clean Rooms and Related Controlled Environments (SAC/TC319).
This document was drafted by. Laser Fusion Research Center of China Academy of Engineering Physics, Suzhou Antai Air Technology Co., Ltd., Suzhou Suxin
Environmental Technology Co., Ltd., China Electronics System Engineering Second Construction Co., Ltd., Wujiang Huayu Purification Equipment Co., Ltd., China Standardization
Association, Shanghai Shangyuan Construction Engineering Co., Ltd., China Electronics Engineering Design Institute Co., Ltd., Institute of Atmospheric Physics, Chinese Academy of Sciences,
Taibaoyuan Purification Co., Ltd., Beijing Dyna Laboratory Technology Co., Ltd., Guangzhou Baorui Medical Technology Co., Ltd., Pony Testing Group Co., Ltd.
Co., Ltd., Shanghai Indoor Environment Purification Industry Association, Zhongkai Agricultural and Engineering University, Coretech (Xiamen) Purification Technology Co., Ltd., Hangzhou Jierui
Intelligent Equipment Co., Ltd., Hui Te Science and Technology Co., Ltd., Lang Heng Technology Group Co., Ltd., and Xintuoyang Bioengineering Co., Ltd.
The main drafters of this document are. Miao Xinxiang, Yuan Xiaodong, Wang Tianyi, Sun Yang, Hao Yinbo, Wu Zhijian, Hui Lufeng, Lu Jing, Ding Yulong, Gao Yiting,
Xi Xiaopeng, Yang Yuntao, Wang Fang, He Lekai, Ding Lixing, Gao Zheng, Wei Lan, Shan Xiangju, Zhang Changan, Hu Siwei, Huang Diwen, Zhang Jianguo, Li Huaxin,
Wei Yonghua, Xi Guangming.
Introduction
GB/T 25915 adopts the ISO 14644 series of standards. The settings of each part are consistent with international standards and are intended to consist of 18 parts.
--- Part 1.Classification of air cleanliness levels according to particle concentration. The purpose is to distinguish the degree of particle contamination.
--- Part 2.Monitoring of particle concentration in clean room air. The purpose is to guide the monitoring of particle contamination to avoid possible contamination
risk.
--- Part 3.Detection methods. The purpose is to guide the detection of various pollution and related environmental factors in clean rooms.
--- Part 4.Design, construction and startup. The purpose is to guide the design, construction and startup of clean rooms.
--- Part 5.Operation. The purpose is to guide the operation of the clean room.
--- Part 6.Vocabulary. The purpose is to unify and standardize technical terms.
--- Part 7.Isolation devices (clean hoods, glove boxes, isolators, microenvironments). The purpose is to propose basic
This requirement.
--- Part 8.Classification of air cleanliness (ACC) levels by chemical concentration. The purpose is to distinguish the degree of chemical pollution in the air.
--- Part 9.Classification of surface cleanliness levels according to particle concentration. The purpose is to distinguish the degree of surface particle contamination.
--- Part 10.Classification of surface cleanliness levels according to chemical concentration. The purpose is to distinguish the degree of chemical contamination on the surface.
--- Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air. The purpose is to propose the detection of nano-scale particle pollution
Require.
--- Part 13.Surface cleaning to achieve particle and chemical cleanliness requirements. The purpose is to provide cleaning requirements for surfaces within clean rooms to
Avoid possible risks of particle and chemical contamination.
--- Part 14.Assessment of equipment suitability by particle concentration. The purpose is to assess the possible particle contamination that may be generated in the clean room by the relevant equipment.
Tests to determine the suitability of the equipment.
--- Part 15.Assessment of the suitability of equipment and materials according to the concentration of gaseous chemicals. The purpose is to assess the suitability of equipment and materials by assessing the possible
Tests that generate gaseous chemical contamination in clean rooms to determine the suitability of equipment and materials.
--- Part 16.Improving the energy efficiency of clean rooms and air purification equipment. The goal is to reduce clean room energy consumption and the resulting global impact.
--- Part 17.Application of particle deposition rate. The purpose is to provide a method for evaluating the particle cleanliness of sensitive surfaces of products and to give
Classification standards related to surface large particle settling pollution.
--- Part 18.Evaluation of the suitability of consumables. The purpose is to evaluate the appropriate use of consumables in clean rooms, clean areas or controlled areas.
--- Part 21.Suspended particle sampling technology. The purpose is to sample suspended particles in clean areas, reduce sampling errors and particle
loss.
Cleanrooms and related controlled environments are used to control contamination to levels suitable for accomplishing contamination-sensitive activities. Products that benefit from contamination control
Products and processes include those in industries such as aerospace, microelectronics, optics, nuclear, food, healthcare, pharmaceuticals and medical devices.
GB/T 25915.1-2021 considers the air particles in the clean room and classifies the cleanliness of the clean room by the maximum allowable concentration.
This document is based on the Netherlands
The VCCN Guide 9 considers the particle deposition rate on surfaces in cleanrooms. The Importance of Particle Deposition Rate (PDR)
The probability of suspended particles contaminating vulnerable surfaces (such as finished products) is directly related to PDR.
GB/T 25915.3-2024 describes the method for determining the deposition of particles larger than or equal to 0.1 μm. In this document, the focus is on
It is the deposition rate of large particles larger than 5μm on the surface and its application in clean room contamination control.
In a clean room, people, machinery, tools and process activities generate particles of various sizes and spread in the clean room through airflow.
According to GB/T 25915.1-2021, in clean rooms with a cleanliness level of ISO 5 or better and related controlled environments, particles larger than
The concentration of particles with a diameter of 5 μm is zero or extremely low. However, due to different industries and process activities, particles may appear on the surface during the dynamic operation of the clean room.
The particle size of the particles is 5μm~500μm or even larger, which exceeds the particle size limit of the cleanliness classification in GB/T 25915.1-2021.
Although this is an accidental phenomenon, there are sedimentation losses at the sampling entrance, in the sampling tube, and in the particle counter, so large particles in the air cannot be detected.
Large particles can cause contamination problems and the presence and deposition of large particles on vulnerable surfaces is best determined by measuring the PDR on the surface.
Ability.
When the particle size is less than 5μm, it is removed by the clean room ventilation system. However, for particles with a size greater than 10μm, more than 50% of
The particles will settle on the surface. When the particle size is greater than 40μm, the deposition rate reaches more than 90%. The main deposition mechanism of particles of this size is gravity.
However, air turbulence and electrostatic adsorption can also cause deposition. These deposited particles will not be redistributed by the clean room airflow, but can be transported by people walking.
Resuspension occurs due to movement and cleaning actions. Therefore, it is necessary to remove these particles by cleaning.
The particles with a size larger than 5 μm and their resuspension in the clean room are mainly related to human or mechanical activities.
In the dynamic state, there is almost no activity, particles with a diameter greater than 5 μm rarely diffuse, their concentration is close to zero, and no significant deposition occurs.
PDR only needs to be considered in this situation.
PDR is a property of a cleanroom or clean area that determines the probability that airborne particles will deposit on surfaces in the cleanroom (such as product or
Through risk assessment, determine the acceptable amount of contamination on vulnerable surfaces and obtain PDR to ensure that the deposited particles
The amount of pollution does not exceed this amount.
This document provides a method for measuring PDR in a cleanroom or clean area. Use this method during cleanroom operation to obtain the required
PDR and demonstrate that air contamination is being continually controlled by monitoring cleanrooms and clean areas. Monitoring PDR also enables PDR peaks to be correlated with activities.
to identify the source of contamination and propose improvements to the work process to reduce the risk of contamination.
PDR refers to the rate at which particles are deposited on a surface when the surface is exposed to polluted air, see formula (1).
RD=
CfD-CiD
tf-ti
(1)
Where.
D --- particle size, in micrometers (μm);
RD --- the deposition rate of particles with a particle size greater than or equal to D, in units of pieces per square meter per hour [pieces/(m2·h)];
CfD --- Final concentration of surface particles with a particle size greater than or equal to D, in units of pieces per square meter (pieces/m
2);
CiD --- Initial concentration of surface particles with a particle size greater than or equal to D, in units of pieces per square meter (pieces/m
2);
tf --- final exposure time, in hours (h);
ti --- initial exposure time, in hours (h).
If the PDR is determined at or near a vulnerable surface (such as a product surface), the particle density in the air can be estimated using formula (2).
Amount deposited on the surface.
ND=RD·t·a (2)
Where.
ND --- the number of surface particles with a particle size greater than or equal to D, in pieces;
t ---Exposure time, in hours (h);
a --- The area exposed to polluted air, in square meters (m2).
Some industries use cleanrooms to manufacture optical instruments and components, such as mirrors, lenses, and solar panels for aerospace applications.
The quality of a product is related to the amount of light absorbed or reflected by surface particles. Therefore, this document also considers the exposure to cleanroom in Appendix C.
Particle obscuration rate (POR) of the test surface. POR and obscuration are calculated using the PDR of different particle sizes and similar methods are used to calculate the POR and obscuration.
to reduce the risk of surface contamination.
Cleanrooms and related controlled environments
Part 17.Application of particle deposition rate
1 Scope
This document provides information on the interpretation and use of particle deposition rate (PDR) measurements on delicate surfaces in cleanrooms as part of a contamination control program.
Provides guidance for application. Provides factors affecting PDR and instructions for reducing the risk of particle contamination on delicate surfaces.
This document provides a cleanroom PDR measurement method to determine the acceptable concentration limit of large particles on vulnerable surfaces and a risk assessment method to ensure
The acceptable risk of particles depositing on vulnerable surfaces is determined by the cleaning control measures. When the risk is unacceptable, cleanliness control measures are required to reduce the PDR.
The particle obscuration rate (POR) is an alternative to PDR and is defined as the increasing coverage of a surface by particles over time.
POR is used in a similar manner to PDR to calculate the required POR for a given surface to reduce the risk of particle deposition.
This document.
---Does not provide a method for grading clean rooms based on PDR or POR;
--- The activity of deposited microbial-carrying particles is not directly considered;
--- Surface deposition caused by contact, such as contamination caused by personnel touching the product, is not considered.
2 Normative references
The contents of the following documents constitute essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 25915.3-2024 Cleanrooms and related controlled environments Part 3.Test methods (ISO 14644-3.2019, IDT)
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
Clean room
Rooms where the concentration of airborne particles is controlled and graded are designed, constructed, and operated in such a way that the particles that enter, are generated, and are retained in the room are
controlled.
Note 1.Classification based on airborne particle concentration is specified.
Note 2.Other factors that affect the cleanliness level, such as the concentration of chemicals, microorganisms or nano-sized particles in the air, and the factors that affect the cleanliness of the surface
Other factors of the grade, such as particle, nanoparticle, chemical or microbial concentrations, are specified and controlled.
Note 3.Related physical parameters such as temperature, humidity, pressure, vibration and static electricity can also be controlled as required.
[Source. GB/T 25915.1-2021, 3.1.1]
3.2
Clean areacleanzone
A confined space in which the concentration of airborne particles is controlled and graded. Its construction and operation make the particles entering, generated and retained in the space
controlled.
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