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GB/T 25915.15-2022: Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
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Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
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GB/T 25915.15-2022
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Basic data | Standard ID | GB/T 25915.15-2022 (GB/T25915.15-2022) | | Description (Translated English) | Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | C70 | | Classification of International Standard | 13.040.35 | | Word Count Estimation | 22,254 | | Date of Issue | 2022-12-30 | | Date of Implementation | 2023-07-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 25915.15-2022: Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 13.040.35
CCSC70
National Standards of People's Republic of China
Cleanrooms and related controlled environments
Part 15.Assessment by concentration of gaseous chemicals
Suitability of equipment and materials
(ISO 14644-15.2017, IDT)
Posted on 2022-12-30
2023-07-01 implementation
State Administration for Market Regulation
Released by the National Standardization Management Committee
table of contents
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 symbols 3
5 detection device 4
6 representative mode6
7 Visual inspection 7
8 Detection process 7
9 Calculation of concentration 8
10 Calculation of specific release rate 8
11 rating 9
12 records 10
Appendix A (informative) Examples of suitability assessment of installed equipment 12
Appendix B (informative) Calculation example for suitability assessment of installed wall materials in clean room or clean area 13
Appendix C (informative) Applicability assessment of clean room equipment and floor materials at the design stage 14
Reference 16
foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules for Standardization Documents"
drafting.
This document is Part 15 of GB/T 25915 "Clean Rooms and Related Controlled Environments". GB/T 25915 has issued the following
part.
--- Part 1.Classification of air cleanliness by particle concentration;
--- Part 2.Monitoring of air particle concentration in clean rooms;
--- Part 3.Detection methods;
--- Part 4.Design, construction, start-up;
--- Part 5.Operation;
--- Part 6.Vocabulary;
--- Part 7.Isolation device (clean air hood, glove box, isolator, micro-environment);
--- Part 8.Classification of air cleanliness (ACC) grades by chemical concentration;
--- Part 9.Classification of surface cleanliness by particle concentration;
--- Part 10.Classification of surface cleanliness by chemical concentration;
--- Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air;
--- Part 13.Surface cleaning to meet particle and chemical cleanliness requirements;
--- Part 14.Evaluation of equipment suitability by particle concentration;
--- Part 15.Evaluate the suitability of equipment and materials according to the concentration of gaseous chemicals.
This document is identical to ISO 14644-15.2017 "Clean rooms and related controlled environments - Part 15.Assessment by concentration of gaseous chemicals
Suitability of Equipment and Materials".
The following minimal editorial changes have been made to this document.
---Corrected the symbol meaning error in Table 1, and "x is related to the specific index related to the detection target" and "x is related to the evaluation target" in the table
The number of" is merged and revised to "x the area of testing materials or the number of testing equipment".
Please note that some contents of this document may refer to patents. The issuing agency of this document assumes no responsibility for identifying patents.
This document is proposed and managed by the National Standardization Technical Committee for Cleanrooms and Related Controlled Environments (SAC/TC319).
This document is drafted by. Shenzhen Jilong Clean Technology Co., Ltd., China Electronics System Engineering Second Construction Co., Ltd., Shenzhen Tiansu
Metrology and Testing Co., Ltd., Suzhou Metrology and Testing Institute, Suzhou Antai Air Technology Co., Ltd., Beijing Zhongbang Xingye Technology Co., Ltd.,
China Association for Standardization, Jiangsu Futai Purification Technology Co., Ltd., Tianjin University, China Academy of Building Research Co., Ltd., China Electronics
System Fourth Construction Co., Ltd., China Electronics Engineering Design Institute Co., Ltd., Shanghai Indoor Environmental Purification Industry Association, Guangdong Clean Technology
Technology Industry Association, Jianghan University, Henan Shengchuan Purification Engineering Co., Ltd., China National Accreditation Center for Conformity Assessment, Zhongke Shengjie (Shenzhen) Technology
Group Co., Ltd., Shanghai Jianke Environmental Technology Co., Ltd., Guangzhou Second Decoration Co., Ltd., Shenzhen Langao Clean Technology Co., Ltd.
Co., Ltd., Nanjing University of Technology.
The main drafters of this document. Hu Maocong, Wang Tianyi, Hao Yinbo, Feng Xin, Pei Jingjing, Huang Jihui, Bao Haixia, Sun Yucheng, Wu Jianhua, Yuan Yue,
Yuan Jia, Wu Zhijian, Yan Dong, Chen Jingjing, Xu Xiaoli, Shi Xia, Xia Gaofeng, Han Hui, Zhang Zhixing, Zhang Zhongjie, Dong Xuexin, Zhou Bin, Liu Yong, Chen Jian, Hu Xiangyang,
Fanna.
Introduction
GB/T 25915 adopts the ISO 14644 series of international standards, and the settings of each part are consistent with the international standards. It is proposed to be composed of 15 parts
constitute.
--- Part 1.Classification of air cleanliness by particle concentration. The purpose is to differentiate the degree of particle contamination.
--- Part 2.Monitoring of air particle concentration in clean rooms. The purpose is to guide the monitoring of particle contamination to avoid possible contamination
risk.
--- Part 3.Detection method. The purpose is to guide the detection of various pollution and related environmental elements in the clean room.
--- Part 4.Design, construction, start-up. The purpose is to guide the design, construction and start-up of clean rooms.
--- Part 5.Operation. The purpose is to guide the operation of the clean room.
--- Part 6.Vocabulary. The purpose is to unify and standardize technical terms.
--- Part 7.Isolation device (clean air hood, glove box, isolator, micro-environment). The aim is to propose the basis for isolators for cleanrooms
This requirement.
--- Part 8.Classification of air cleanliness (ACC) by chemical concentration. The purpose is to distinguish the degree of air chemical pollution.
--- Part 9.Classification of surface cleanliness by particle concentration. The purpose is to differentiate the degree of surface particle contamination.
--- Part 10.Classification of surface cleanliness by chemical concentration. The purpose is to differentiate the degree of chemical contamination of the surface.
--- Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air. The aim is to propose the detection of particle contamination at the nanoscale
Require.
--- Part 13.Surface cleaning to achieve particle and chemical cleanliness requirements. The purpose is to put forward the cleaning requirements for the surface of the clean room to
Avoid the risk of possible particle and chemical contamination.
--- Part 14.Assessment of equipment suitability by particle concentration. The purpose is to pass the relevant equipment that may generate particle contamination in the clean room
A test to determine the suitability of the device.
--- Part 15.Evaluate the suitability of equipment and materials according to the concentration of gaseous chemicals. The purpose is to make possible
Tests for gaseous chemical contamination in clean rooms to determine the suitability of equipment and materials.
--- Part 16.Improve the energy efficiency of clean rooms and air purification devices. The aim is to save energy consumption in clean room operation.
Cleanrooms and associated controlled environments provide contamination control at levels appropriate for operations sensitive to contaminants. Pollution control is good for aviation
Products and processes in industries such as aerospace, microelectronics, optics, nuclear energy and life sciences (pharmaceuticals, medical devices, food, medical).
This part uses the classification of air cleanliness according to the concentration of chemicals to evaluate the suitability of equipment in clean rooms and related controlled environments.
Appendices A, B, and C give examples of applicability assessments.
Cleanrooms and related controlled environments
Part 15.Assessment by concentration of gaseous chemicals
Suitability of equipment and materials
1 Scope
This document specifies requirements and provides guidance for assessing the suitability of equipment and materials for use in cleanrooms and related controlled environments.
This document does not apply to the following.
---Health and safety requirements;
--- Compatibility of cleaning agents and cleaning technologies;
---cleanliness;
--- Biological contamination;
--- Process and product specific requirements for equipment and materials;
---Design details of the equipment.
2 Normative references
The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references
For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
this document.
GB/T 25915.8-2021 Clean rooms and related controlled environments Part 8.Classification of air cleanliness by chemical concentration (ACC)
Class (ISO 14644-8.2013, IDT)
3 Terms and Definitions
The following terms and definitions apply to this document.
3.1
Any non-particulate chemical substance present in the air whose chemical properties may adversely affect products, processes, and equipment.
[Source. GB/T 25915.8-2021, 3.1.3, modified]
3.2
Expressed in ISO -ACC, it represents the maximum allowable concentration in grams per cubic meter for a given chemical species or group of chemicals.
Note. Biomacromolecules are classified as particles and are not included in this definition.
[Source. GB/T 25915.8-2021, 3.1.2]
3.3
Maximum gas carrying capacity breakthrough volume
At a specific temperature, the maximum volume of blown gas that can be drawn from the sampling device without loss of analyte.
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