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GB/T 19500-2025: Surface chemical analysis - General rules for X-ray photoelectron spectroscopic analysis method
Status: Valid GB/T 19500: Evolution and historical versions
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Surface chemical analysis - General rules for X-ray photoelectron spectroscopic analysis method
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GB/T 19500-2025
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| GB/T 19500-2004 | English | 259 |
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General rules for X-ray photoelectron spectroscopic analysis method
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GB/T 19500-2004
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Basic data | Standard ID | GB/T 19500-2025 (GB/T19500-2025) | | Description (Translated English) | Surface chemical analysis - General rules for X-ray photoelectron spectroscopic analysis method | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 27,265 | | Date of Issue | 2025-06-30 | | Date of Implementation | 2026-01-01 | | Older Standard (superseded by this standard) | GB/T 19500-2004 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 19500-2025: Surface chemical analysis - General rules for X-ray photoelectron spectroscopic analysis method
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ICS 71.040.40
CCSG04
National Standard of the People's Republic of China
Replaces GB/T 19500-2004
Surface chemical analysis X-ray photoelectron spectroscopy
General principles of the method
Released on June 30, 2025
Implementation on January 1, 2026
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Symbols and abbreviations 8
5 Method Principle 9
6 Instruments 9
6.1 Instrument composition 9
6.2 Instrument Performance 13
7 Sample 13
8 Analysis Step 14
8.1 Overview 14
8.2 Analysis Preparation 14
8.3 Analysis Notes 15
8.4 Qualitative Analysis 16
8.5 Quantitative Analysis 17
8.6 Imaging and Micro-area Analysis 18
8.7 In-depth analysis 18
8.8 Data Processing and Analysis 19
9 Results Report 19
9.1 Overview 19
9.2 Basic Information 20
9.3 Extended Information 20
Reference 21
Preface
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document replaces GB/T 19500-2004 "General rules for X-ray photoelectron spectroscopy analysis methods" and is consistent with GB/T 19500-2004.
In addition to structural adjustments and editorial changes, the main technical changes are as follows.
a) The referenced documents in “Normative References” have been changed (see Chapter 2);
b) Added references to “Terms and Definitions” and some terms and definitions (see Chapter 3, 3.1, 3.2, 3.4, 3.6, 3.7, 3.8, 3.9,
3.11, 3.19, 3.20, 3.25, 3.26, 3.27, 3.28, 3.32, 3.37, 3.38, 3.39 and 3.40);
c) Added a chapter on “Symbols and Abbreviations” (see Chapter 4);
d) The chapter “Principles of the Method” was modified (see Chapter 5, Chapter 4 of the.2004 edition);
e) The overview and Figure 1 in the item “Instrument composition” have been changed (see 6.1.1, 5.1 of the.2004 edition);
f) The description of the entry "X-ray excitation source" was changed, and Table 1 and the description of the synchrotron radiation source were added (see 6.1.2,.2004 edition).
5.1.1);
g) Added the entry “Electronic lens system” (see 6.1.3);
h) Change the description of the entry "Electronic detector" (see 6.1.5, 5.1.3 of the.2004 edition);
i) The description of the entry "Charge Neutralizer" has been changed (see 6.1.7, 5.1.6 of the.2004 edition);
j) The name of the item "Data Acquisition and Processing System" was changed and the content was added (see 6.1.9, 5.1.4 of the.2004 edition);
k) Changed the referenced documents in the “Instrument Performance” item and added anode power, signal intensity and energy resolution, charge neutralization,
Ion sputtering, etc. (see 6.2, 5.2 of the.2004 edition);
l) The name and content of the chapter "Specimens" have been changed (see Chapter 7, Chapter 6 of the.2004 edition);
m) Added references to the chapter “Analysis Steps” (see 8.1);
n) Modified and added the overview and content of the item “Analysis Preparation” (see 8.2, 7.1 of the.2004 edition);
o) Changed the description of the items “Charge correction” and “Spectrometer energy resolution” (see 8.3.1 and 8.3.2, 7.2.1 and
7.2.2);
p) Added the items “Imaging and Micro-area Analysis”, “Depth Profiling” and “Data Processing and Analysis” (see 8.6, 8.7 and 8.8);
q) The title and content of the chapter “Results Reporting” have been changed (see Chapter 9, Chapter 8 of the.2004 edition).
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document is proposed and coordinated by the National Technical Committee for Standardization of Surface Chemistry Analysis (SAC/TC608).
This document was drafted by. Peking University, Tsinghua University, Beijing Normal University, Institute of Chemistry, Chinese Academy of Sciences, Institute of Physics, Chinese Academy of Sciences
Institute.
The main drafters of this document are. Xie Jinglin, Xu Yao, Zhou Xiong, Yao Wenqing, Wu Zhenglong, Liu Fen, and Shen Dianhong.
The previous versions of this document and the documents it replaces are as follows.
---First issued in.2004 as GB/T 19500-2004;
---This is the first revision.
introduction
X-ray photoelectron spectroscopy (XPS) is an experimental technique widely used in materials science and surface chemistry.
The beam irradiates the material and measures the kinetic energy and number of photoelectrons escaping from the top of the material being analyzed within a depth of 0nm~10nm to obtain
Characteristic XPS spectra of each element. The laboratory uses a typical X-ray excitation source, which can detect all elements except hydrogen and helium (original
The detection limits of most elements can be within a few thousandths of an ppm range.
The XPS method has low destructiveness to the test sample and high surface sensitivity, and can be used to analyze the chemical composition and electronic structure of the material surface.
XPS imaging and micro-area analysis technology have high
The XPS depth analysis can obtain the element distribution and chemical state of the surface of the material at the micron level.
Qualitative and quantitative results at different nanometer depths below the surface.
This document describes the basic specifications and method flow of XPS analysis technology, including instrument structure and function, pre-experimental preparation,
The experimental steps and post-experimental data processing involve the preparation and installation of XPS samples, the selection of instrument parameters and data
Acquisition, spectrum processing and qualitative and quantitative analysis, as well as the preparation of inspection and testing reports. Following this document and process can ensure the XPS experiment
The accuracy, reliability and comparability of the results provide powerful data for obtaining the true electronic structure and chemical composition information of the material surface.
support.
From basic research to industrial applications, the development of XPS analysis technology has enabled scientists to gain a deeper understanding of the surface characteristics of materials.
It helps the research of surface chemistry and materials science, and continues to play an important role in the development of new materials and new technologies.
Surface chemical analysis X-ray photoelectron spectroscopy
General principles of the method
1 Scope
This document specifies the general requirements for a general surface analysis method using X-ray photoelectron spectroscopy (XPS).
This document defines terminology related to XPS surface chemistry analysis.
This document applies to X-ray photoelectron spectrometers.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 22461.1 Vocabulary for surface chemical analysis Part 1.General terms and spectral terms
GB/T 25184 Verification method for X-ray photoelectron spectrometers
GB/T 28892 Surface chemical analysis - X-ray photoelectron spectroscopy - Selection of instrument performance parameters
GB/T 30704 Guide to surface chemical analysis - X-ray photoelectron spectroscopy
3 Terms and Definitions
The terms and definitions defined in GB/T 22461.1 and the following apply to this document.
3.1
surface
The interface between a condensed phase and a gas phase, vapor, or free space.
Note 1 to entry. The interface between the solid and gas phases is called a surface.
NOTE 2 For the purpose of surface analysis, it is recommended to distinguish between the general “surface”, “physical surface” and “experimental surface”. Surface – a sample with an uncertain depth
The "external part" of the sample is used for general discussion of the external area of the sample; the physical surface is the outermost atomic layer of the sample. If the sample is placed in a vacuum
In the experimental surface, the layer in contact with the vacuum is the experimental surface, which is the part of the sample from which the excited electrons can escape. It is the sample volume or the corresponding
The volume from which the electron escapes is the larger of the two.
[Source. GB/T 22461.1-2023, 6.458; PAC-2019-0404, 183, with modifications]
3.2
Standard sample reference material; RM
Reference Materials
Standard substances
A material that is sufficiently homogeneous and stable in one or more specified properties and has been determined to be suitable for its intended use in a measurement process.
Note 1.Standard sample is a general term.
Note 2 to entry. Properties can be quantitative or qualitative (e.g. characteristics of a substance or species).
Note 3 to entry. Uses may include calibration of measurement systems, evaluation of measurement procedures, assigning values to other substances, and quality control.
[Source. GB/T 15000.2-2019, 2.1.1, modified]
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