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GB/T 11164-2011: Vacuum coating plant generic specification
Status: Valid GB/T 11164: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 11164-2011 | English | 259 |
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3 days [Need to translate]
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Vacuum coating plant generic specification
| Valid |
GB/T 11164-2011
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| GB/T 11164-1999 | English | 319 |
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Vacuum coating plant generic specification
| Obsolete |
GB/T 11164-1999
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| GB/T 11164-1989 | English | RFQ |
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3 days [Need to translate]
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Vacuum deposition equipments generic specification
| Obsolete |
GB/T 11164-1989
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PDF similar to GB/T 11164-2011
Basic data | Standard ID | GB/T 11164-2011 (GB/T11164-2011) | | Description (Translated English) | Vacuum coating plant generic specification | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J78 | | Classification of International Standard | 23.160 | | Word Count Estimation | 11,167 | | Date of Issue | 2011-11-21 | | Date of Implementation | 2012-06-01 | | Older Standard (superseded by this standard) | GB/T 11164-1999 | | Quoted Standard | GB/T 191-2008; GB/T 3161-2007; GB 5226.1-2008; GB/T 6070-2007; GB/T 13306-2011; GB/T 13384-2008; GB/T 15945-2008; GB 18209.1-2010; JB/T 7673 | | Regulation (derived from) | Announcement of Newly Approved National Standards No. 18 of 2011 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the vacuum coating equipment, technical requirements, test methods, inspection rules and signs, packaging, transportation and storage requirements. This standard applies to pressure 100000/1 Pa ~ 1000/1 Pa range of vacuum evaporation class category sputtering, ion plating type vacuum coating equipment (hereinafter referred to as the device). | GB/T 11164-2011: Vacuum coating plant generic specification---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Vacuum coating plant generic specification
ICS 23.160
J78
National Standards of People's Republic of China
Replacing GB/T 11164-1999
Vacuum coating equipment General technical conditions
Issued on. 2011-11-21
2012-06-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Preface Ⅰ
1 Scope 1
2 Normative references 1
3 Terms and definitions
4 2 Technical Requirements
Test Method 4 5
6 Inspection rules 5
7 signs, packaging, transportation and storage 5
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard replaces GB/T 11164-1999 "vacuum coating equipment general technical conditions", compared with the GB/T 11164-1999 major change
Of the following.
--- For ease of use increases the directory;
--- Revised GB/T 11164-1999 in the pressure range of vacuum coating equipment by 10-4Pa ~ 10-3Pa modify 10-5Pa ~
10-3Pa;
--- Revised GB/T 11164-1999 Table 1 coating chamber size binned increased 300,400,450,1100,1350,2200,
2400,2500,2600,3200 size in ten stages, and with an "*" preferred size has been adjusted;
--- Revised GB/T 11164-1999 Table 1 binning coating equipment, coating equipment increases the C file, and add or modify various
Extreme pressure gear coating equipment, pumping time and boosting rate index;
--- Due to GB/T 11164-1999 part of the normative references have been revised, so the standard reference existing standards;
--- Revised GB/T 11164-1999 in 4.4.6, using tabular form provides equipment for electrical installations in various electrical circuits
The insulation resistance value;
--- Revised GB/T 11164-1999 in 4.5.4 and 4.5.12, increasing the safety content.
The standard proposed by China Machinery Industry Federation.
The vacuum technology standard by the National Standardization Technical Committee (SAC/TC18) centralized.
This standard is drafted by. Beijing North instrument innovative vacuum technology limited liability company.
Participated in the drafting of this standard. Shanghai Shuguang Machinery Works Co., Ltd., Lanzhou vacuum equipment limited liability company, Chengdu South-ray machines
Limited, China Aerospace Science and Technology Group, 510 Fifth Academy of Sciences, Shanghai Huifeng Petrochemical Co., Ltd., Shenyang Vacuum Technology Institute
The study.
The main drafters of this standard. Chen month by Xie Jun Rong Fan Liqun, Sun Kai, Wen Falan, Jin Yi, Qiang, Hui Jinde, ROCKETS.
This standard replaces the standards previously issued as follows.
--- GB/T 11164-1989, GB/T 11164-1999.
Vacuum coating equipment General technical conditions
1 Scope
This standard specifies the technical requirements for vacuum coating equipment, test methods, inspection rules and signs, packaging, transportation and storage requirements.
This standard applies to the pressure in the vacuum evaporation 10-5Pa ~ class 10-3Pa range, type sputtering, ion plating class vacuum coating equipment (hereinafter
Acronym equipment).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the edition are not applicable to the present
file. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 191-2008 Packaging - Pictorial signs
GB/T 3163-2007 term vacuum technology
GB 5226.1-2008 Safety of machinery - Electrical machinery and electrical equipment - Part 1. General requirements
GB/T 6070-2007 technical vacuum flange size
GB/T 13306-2011 signage
GB/T 13384-2008 mechanical and electrical products packaging General technical conditions
GB/T 15945-2008 power quality power system frequency deviation
GB 18209.1-2010 Electrical safety of machinery - Indication, marking and actuation - Part 1. Requirements for visual, auditory and tactile signals
Claim
JB/T 7673 model designation of vacuum equipment
3 Terms and Definitions
GB/T 3163-2007 and defined the following terms and definitions apply to this document.
3.1
Extreme pressure ultimatepressure
Pump in operation, no-load dry vacuum vessel approaching, reaching and maintaining a stable minimum pressure.
Note. Units Pa (Pa).
3.2
Recovery time vacuum suction pump-downtime
When the vacuum system is working properly, the load time of drying the coating chamber evacuated from a predetermined atmospheric pressure (105Pa) operating pressure required.
Note. in minutes (min).
3.3
Boosting rate rateofpressurerise
The drying of the coating chamber load continuous pumping to a stable minimum pressure, stop pumping, the interior coating or internal leakage due deflated by
Boost caused per unit time.
Note. Units Pa per hour (Pa/h).
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