JJF 1100-2016 (JJF1100-2016) & related versions
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Calibration Specification for Flat Equal Thickness Interferometers
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JJF 1100-2016
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JJF 1100-2016
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| JJF 1100-2003 | English | 559 |
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Calibration Specification for Flat Equal Thickness Interferometers
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JJF 1100-2003
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JJF 1100-2003
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JJF 1100-2016
Calibration Specification for Flat Equal Thickness Interferometers
National Metrological Technical Code of the People's Republic of China
Standard for Equal Thickness Interferometer Calibration
2016-11-30 release
2017-05-30 implementation
State Administration of Quality Supervision, Inspection and Quarantine issued
Standard for Equal Thickness Interferometer Calibration
Replacing JJF 1100-2003
Coordinate Unit. National Geometric Engineering Parameter Measurement Technical Committee
The main drafting unit. China Testing Technology Research Institute
China Institute of Metrology
Participated in the drafting unit. Institute of Optoelectronic Technology, Chinese Academy of Sciences
Test Technology Co., Ltd. in the test
The specification commissioned by the National Geometric Engineering Engineering Metrology Technical Committee is responsible for the interpretation
The main drafters of this specification.
Ran Qing (China Testing Technology Research Institute)
Zhang Heng (China Institute of Metrology)
Zhao xiaoping (China Test Technology Research Institute)
Kang Yanhui (China Institute of Metrology)
Participate in the drafters.
WU Shi-bin (Institute of Optoelectronic Technology, Chinese Academy of Sciences)
Xu Deyu (China Testing Technology Research Institute)
Qingguang Asia (in the test test Technology Co., Ltd.)
table of Contents
Introduction (II)
1 range (1)
2 References (1)
3 Overview (1)
4 Metrological characteristics (3)
4.1 Repeatability of interference fringe pitch measurements (3)
4.2 Test error of micrometer eyepiece (3)
4.3 The amount of interference fringes caused by the objective system (3)
4.4 Instrument indication error (3)
5 Calibration conditions (3)
5.1 Environmental conditions (3)
5.2 Calibration items and measuring standards and other equipment (3)
6 Calibration method (4)
6.1 Repeatability of Interference Fringe Spacing (4)
6.2 test eyepiece of the indication error (4)
6.3 The amount of interference fringes caused by the objective system (4)
6.4 Indication error of instrument (5)
7 Expression of calibration results (5)
8 Recurrence time interval (5)
Appendix A Graphic and Introduction of Planar Equal Thickness Interference Fringe Measurements (6)
APPENDIX B Example of Uncertainty Evaluation of Indication Error of Planar Equal Thickness Interferometer (7)
Appendix C Calibration Certificate Information and Format (10)
introduction
JJF 1071-2010 "Rules for the preparation of national metrological calibration specifications", JJF 1001-2011 "General measurement terms and
Definitions "and JJF 1059.1-2012" Measurement Uncertainty Assessment and Representation "together constitute support for this calibration specification revision
Work of the basic series of norms.
Compared with JJF 1100-2003 "flat equal thickness interferometer calibration standard", this specification, in addition to editorial changes, the main
The technical changes are as follows.
--- This specification eliminates the accuracy of the instrument on the plane equal thickness interferometer grading;
--- This specification eliminates the "no standard plane flat crystal plane equal thickness interferometer indication error can not measure" this
Regulations;
--- This specification adds an illustration and brief introduction to Appendix A. Method of measurement of plane equal thickness interference fringes;
--- The specification of the plane equal thickness interferometer indication error measurement is recommended by two φ150mm first-class standard plane
Flat crystal according to its two measurement cross-section one by one corresponding measurement method to obtain, and retain the original specification with three second-level flat crystal mutual inspection
method;
--- This specification eliminates the "recommended no more than one year" clause in the re-election interval, and the calibration interval is
According to their own business to determine the situation.
The previous versions of this specification are released.
--- JJF 1100-2003 "flat equal thickness interferometer calibration specification";
--- JJG336-1983 "plane equal thickness interferometer".
Standard for Equal Thickness Interferometer Calibration
1 Scope
This specification applies to the calibration of planar equal thickness interferometers.
2 reference file
This specification refers to the following documents.
JJG28-2000 flat crystal
JB/T 7401-1994 plane flat crystal
For dated references, only the dated edition applies to this specification; references that are not dated
, The latest version (including all amendments) applies to this specification.
3 Overview
Plane equal thickness interferometer (hereinafter referred to as instrument) is the use of equal thickness light interference principle for the object surface flatness
Measuring (or detecting) an optical instrument. According to the instrument structure is divided into standard flat crystal and standard flat crystal with two
Kind of plane equal thickness interferometer. Instrument shape and optical structure are shown in Figure 1, Figure 2, Figure 3 and Figure 4.
Figure 1 Outline structure without standard flat crystal interferometer
......
JJF 1100-2003
Calibration Specification for Flat Equal Thickness Interferometers
National Metrology Technical Specification of the People's Republic
Plane equal thickness interferometer calibration specification
Released on.2003-05-12
Implementation of.2003-11-12
The General Administration of Quality Supervision, Inspection and Quarantine issued
Plane equal thickness interferometer calibration specification
FlatEq
Instead of JJG336-1983
This specification was approved by the General Administration of Quality Supervision, Inspection and Quarantine on May 12,.2003, and
Implemented on November 12,.2003.
Focal Point. National Geometric Quantity Engineering Measurement Technology Committee
Responsible for drafting unit. China Testing Technology Research Institute
This specification is interpreted by the focal point
The main drafters of this specification.
Zhaoqing (China Testing Technology Research Institute)
Chen Yongkang (China Testing Technology Research Institute)
Participate in the drafters.
Li Jianmin (China Testing Technology Research Institute)
Cao Jian (China Testing Technology Research Institute)
table of Contents
1 range (1)
2 Citations (1)
3 Overview (1)
4 Measurement characteristics (1)
4.1 Repeatability of interference fringe spacing measurement (1)
4.2 Measuring error of micrometer eyepiece (1)
4.3 The amount of fringe caused by the objective system (1)
4.4 Instrument indication error (2)
5 Calibration conditions (3)
5.1 Environmental conditions (3)
5.2 Calibration standard and corresponding equipment (4)
6 Calibration items and calibration methods (4)
6.1 Repeatability of interference fringe spacing measurement (4)
6.2 Measuring error of micrometer eyepiece (4)
6.3 The amount of fringe caused by the objective system (4)
6.4 Instrument indication error (5)
7 Calibration result expression (5)
8 re-study interval (5)
Appendix A Calibration Certificate Contents (6)
Appendix B Analysis of Measurement Uncertainty of Indication Error of Planar Equal Thickness Interferometer (7)
Plane equal thickness interferometer calibration specification
1 Scope
This specification is applicable to the calibration of planar equal thickness interferometers. It is not applicable to the same type of interference that can only estimate the amount of interference fringe.
The calibration of the device.
2 Citations
JJF 1001-1998 General measurement terms and definitions
JJF 1059-1999 Measurement Uncertainty Evaluation and Representation
JJG28-2000 flat crystal verification procedure
JB/T 7401-1994 Plane Flat
Use of this specification should be done with the current valid version of the above cited documents.
3 Overview
The plane equal thickness interferometer (hereinafter referred to as the instrument) uses the principle of equal thickness light wave interference to measure the surface of the object.
The optical measuring instrument of the face can be divided into first and second grade according to the indication error of the instrument. Divided into light by sodium light according to its structure
Source, non-standard planar flat crystal and laser light source, two plane equal thickness interferometers with standard planar flat crystal. Outside
The shape structure and optical principle are shown in Figure 1, Figure 2 and Figure 3, Figure 4, respectively.
Figure 1 Outline structure diagram without standard flat crystal
4 Measurement characteristics
4.1 Repeatability of interference fringe spacing measurement
Repeatability does not exceed 0.020mm.
4.2 Measuring the error of the micro eyepiece
Not more than 0.005mm in any 1mm; not more than 0.010mm in the whole process 8mm.
4.3 The amount of fringe caused by the objective system
The amount of stripe bending at a distance of about 1 mm on both sides of the direction of the field of view of the field of view does not exceed 0.010 mm, and the rest does not exceed
......
| Standard ID | JJF 1100-2016 (JJF1100-2016) | | Description (Translated English) | Calibration Specification for Flat Equal Thickness Interferometers | | Sector / Industry | Metrology & Measurement Industry Standard | | Classification of Chinese Standard | A52 | | Word Count Estimation | 15,153 | | Date of Issue | 2016-11-30 | | Date of Implementation | 2017-05-30 | | Older Standard (superseded by this standard) | JJF 1100-2003 | | Drafting Organization | China Institute of Testing Technology, China Institute of Metrology | | Administrative Organization | National Geometric Engineering Parameter Measurement Technical Committee | | Regulation (derived from) | State Administration of Quality Supervision, Inspection and Quarantine Notice No.119 of 2016 | | Issuing agency(ies) | State Administration of Quality Supervision, Inspection and Quarantine | | Standard ID | JJF 1100-2003 (JJF1100-2003) | | Description (Translated English) | Calibration Specification for Flat Equal Thickness Interferometers | | Sector / Industry | Metrology & Measurement Industry Standard | | Classification of Chinese Standard | A52 | | Word Count Estimation | 14,132 | | Date of Issue | 2003-05-12 | | Date of Implementation | 2003-11-12 | | Older Standard (superseded by this standard) | JJG 336-1983 | | Drafting Organization | China Testing Technology Research Institute | | Administrative Organization | National Engineering geometric parameters measured Technical Committee | | Issuing agency(ies) | State Administration of Quality Supervision, Inspection and Quarantine | | Summary | This standard applies to the thickness of the interferometer calibration plane, etc., not to be read only estimate the amount of bending of the interference fringes similar interference calibration device. |
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