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GB/T 4061-2009: Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
Status: Valid GB/T 4061: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 4061-2009 | English | 149 |
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Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
| Valid |
GB/T 4061-2009
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| GB/T 4061-1983 | English | 199 |
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Polycrystalline silicon--Examination method--Assessment of sandwiches on cross-section by chemical corrosion
| Obsolete |
GB/T 4061-1983
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PDF similar to GB/T 4061-2009
Basic data | Standard ID | GB/T 4061-2009 (GB/T4061-2009) | | Description (Translated English) | Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H80 | | Classification of International Standard | 29.045 | | Word Count Estimation | 5,590 | | Date of Issue | 2009-10-30 | | Date of Implementation | 2010-06-01 | | Older Standard (superseded by this standard) | GB/T 4061-1983 | | Regulation (derived from) | National Standard Approval Announcement 2009 No.12 (Total No.152) | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the order of trichlorosilane and silicon tetrachloride as raw materials in the polycrystalline silicon rod cross-section mezzanine chemical corrosion test methods to restore hydrogen reduction furnace out. This standard test on mezzanine section apply to trichlorosilane and silicon tetrachloride as raw materials, fine silicon core of fever, reduced with hydrogen in the reduction furnace deposition of polycrystalline silicon grown out of the bar. | GB/T 4061-2009: Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
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Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
ICS 29.045
H80
National Standards of People's Republic of China
Replacing GB 4061-1983
Polycrystalline silicon sandwich section chemical corrosion test methods
Posted 2009-10-30
2010-06-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard replaces GB 4061-1983 "section polycrystalline silicon sandwich chemical corrosion test methods."
This standard compared with the original standards, the main changes are as follows.
--- Increased "terms", "Reagents and Equipment";
--- To increase the content of "test";
--- Cut direction for sample processing and sample size increases the content requirements.
This standard by the National Standardization Technical Committee of semiconductor equipment and materials proposed.
This standard by the National Standardization Technical Committee materials and equipment at the Technical Committee of semiconductor material.
This standard was drafted. Luoyang Sino-silicon high-tech Co., Ltd.
Drafters of this standard. Yuan Jin Man.
This standard replaces the standards previously issued as follows.
--- GB 4061-1983.
Polycrystalline silicon sandwich section chemical corrosion test methods
1 Scope
This standard specifies the order trichlorosilane and silicon tetrachloride as raw material in a reduction furnace hydrogen reduction of silicon polycrystalline rod section sandwich chemical
Corrosion test methods.
This standard test on the mezzanine section apply to trichlorosilane and silicon tetrachloride as raw materials for the thin silicon core heating element, in the reduction furnace
Hydrogen reduction deposition grow out of polycrystalline silicon rods.
2 principle of the method
This method uses a chemical etching method, according to the hydrofluoric acid - nitric acid solution on the polycrystalline silicon sandwich section and the temperature difference between the interlayer oxidation corrosion rate
Do not be tested.
3 Terms
3.1
Silica concentric structure of polycrystalline silicon was mixed cross section.
3.2
Due to temperature fluctuations caused by differences in the crystalline density, grain size or color of polycrystalline silicon on the cross-section, showing a crystal silicon core
A ring-like structure of the Centre, also called temperature ring (temperaturecircle).
4 Reagents and Equipment
4.1 Reagents
4.1.1 Water. more than 2MΩ · cm water (25 ℃).
4.1.2 Hydrofluoric acid (HF). chemically pure.
4.1.3 nitric acid (HNO3). chemically pure.
4.2 Equipment
4.2.1 Containers. hydrofluoric acid corrosion resistant material.
4.2.2 Exhaust hood. the use of acid gas corrosion material.
5 Sample Preparation
5.1 Sampling sites
In addition to the bridge silicon polycrystalline silicon core rod straight lap or polycrystalline silicon rod from graphite chuck 10cm and outdoor sampling period (Figure 1).
5.2 Sample Size
A direction perpendicular to the direction of cut thin silicon core thickness greater than 3mm flat wafers.
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