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Database: 189759 (19 Oct 2025)
GB/T 16523-1996 English PDF
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GB/T 16523-1996
: Specification for round quartz photomask substrates
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GB/T 16523-1996
English
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Specification for round quartz photomask substrates
GB/T 16523-1996
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Basic data
Standard ID
GB/T 16523-1996 (GB/T16523-1996)
Description (Translated English)
Specification for round quartz photomask substrates
Sector / Industry
National Standard (Recommended)
Classification of Chinese Standard
L55
Classification of International Standard
31.2
Word Count Estimation
8,830
Date of Issue
9/9/1996
Date of Implementation
5/1/1997
Quoted Standard
GB 191-1990; GB 2828-1987; GB 2829-1987; GB 7328-1987; GB 9622.2-1988,
Adopted Standard
SEMI P4-1992, MOD
Issuing agency(ies)
State Bureau of Technical Supervision
Summary
This standard specifies the technical requirements of the circular quartz photomask substrates, test methods and so on. This standard applies to round quartz photomask substrates.