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Database: 189759 (26 Oct 2025)
SJ 20711-1998 English PDF
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SJ 20711-1998
: General specification for step and repeat exposure systems
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SJ 20711-1998
English
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General specification for step and repeat exposure systems
SJ 20711-1998
PDF similar to SJ 20711-1998
Standard similar to SJ 20711-1998
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Basic data
Standard ID
SJ 20711-1998 (SJ20711-1998)
Description (Translated English)
General specification for step and repeat exposure systems
Sector / Industry
Electronics Industry Standard
Classification of Chinese Standard
N46
Word Count Estimation
11,167
Date of Issue
3/18/1998
Date of Implementation
5/1/1998
Quoted Standard
GB 191-90; GB 3768-83; GB 5080.7-86; GB 6388-86
Summary
This standard specifies the step projection exposure machine (hereinafter referred to as exposure machine) classification, requirements, quality assurance requirements and delivery of the most preparation. This standard applies to large specifications IC (VLSI) and application specific integrated chip (ASIC) and micro-lithography equipment other devices. Other types of exposure can also refer to the use of the machine.
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