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JJF 1351-2012 English PDF

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JJF 1351-2012: Calibration Specification for Scanning Probe Microscopes
Status: Valid

JJF 1351: Evolution and historical versions

Standard IDContents [version]USDSTEP2[PDF] delivered inStandard Title (Description)StatusPDF
JJF 1351-2012English399 Add to Cart 3 days [Need to translate] Calibration Specification for Scanning Probe Microscopes Valid JJF 1351-2012
JJF 1351-1990English199 Add to Cart 2 days [Need to translate] O.T.N. or Primary Standard for 14.8MeV Neutron Absorbed Dose Obsolete JJF 1351-1990

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Basic data

Standard ID JJF 1351-2012 (JJF1351-2012)
Description (Translated English) Calibration Specification for Scanning Probe Microscopes
Sector / Industry Metrology & Measurement Industry Standard
Classification of Chinese Standard A52
Classification of International Standard 17.040
Word Count Estimation 17,127
Quoted Standard JJF 1001-2011; GB/T 19067.1-2003
Regulation (derived from) AQSIQ Announcement No. 96 of 2012
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine
Summary This standard applies to the geometric surface morphology of the measurement object scanning probe microscope calibration. Scanning probe microscope according to its design principles are different, according to the actual situation calibration select the

JJF 1351-2012: Calibration Specification for Scanning Probe Microscopes

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Calibration Specification for Scanning Probe Microscopes People's Republic of China National Metrology Technical Specifications Scanning probe microscope calibration specification Issued on. 2012-06-18 2012-09-18 implementation The State Administration of Quality Supervision, Inspection and Quarantine released SPM Calibration Specification es Focal point. the National Technical Committee of length measuring geometry The main drafting units. China Aviation Industry Corporation Beijing Great Wall Measurement and Testing Technology Research Institute Shanghai Measurement and Testing Technology Research Institute Guizhou Academy of Metrology Participated in the drafting unit. China Institute of Metrology This specification length measuring geometry commissioned the National Technical Committee is responsible for interpretation The main drafters of this specification. Zhu Zhenyu (China Aviation Industry Corporation Beijing Great Wall Measurement and Testing Technology Institute The study) Ren Dongmei (China Aviation Industry Corporation Beijing Great Wall Measurement and Testing Technology Institute The study) Fuyun Xia (Shanghai Institute of Measurement and Testing) Li Yuan (Shanghai Institute of Measurement and Testing) Lv Xiaojie (Guizhou Metrology Institute) Drafters participate. Luming Zhen (China Institute of Metrology) Lihua Feng (China Aviation Industry Corporation Beijing Great Wall Measurement and Testing Technology Institute The study)

table of Contents

Introduction (Ⅱ) 1 Scope (1) 2. References (1) 3 Terms and Definitions (1) 3.1 a scanning probe microscope (1) 3.2 SPM Z drift (1) 4 Overview (1) 5 Metrological characteristics (2) 5.1 Z drift scanning probe microscope (2) 5.2 X, Y-axis displacement measurement error (2) 5.3 Z-axis displacement measurement error (2) 5.4 scanning probe microscope measurement repeatability (2) 5.5 X, Y coordinates of the orthogonality errors (2) Calibration Condition 6 (2) 6.1 environmental conditions (2) 6.2 Standard (2) 7 calibration items and calibration methods (3) 7.1 Z drift scanning probe microscope (3) 7.2 X, Y-axis displacement measurement error (4) 7.3 Z-axis displacement measurement errors (5) 7.4 scanning probe microscope measurement repeatability (6) 7.4.1 X, Y-axis measurement repeatability (6) 7.4.2 Z-axis measurement repeatability (6) 7.5 X, Y coordinates of the orthogonality errors (6) 8 calibration results expression (7) 9 Recalibration interval (7) Measurement Uncertainty Appendix A scanning probe microscope calibration results assessment (8)

Introduction

The specification for the initial release. Development of this specification is intended primarily to solve the industrial calibration in scanning probe microscopy ask question. Specifications prepared in reference to some theoretical research on nano-metrology in the field of international and measured actual nano Work some experimental data as a basis for developing this specification. Scanning probe microscope calibration specification

1 Scope

This specification is applicable to the geometric surface topography measurement object scanning probe microscope calibration. Scanning probe microscope according to its different design principles need to select the particular measurement calibration according to the actual situation Sex. There are special requirements for measuring tasks, such as high measurement traceability requirements, the scope of the calibration is not standardized. 2. References This specification references the following documents. JJF 1001-2011 common measurement terms and definitions GB/T 19067.1-2003 Geometrical product specifications (GPS) Surface texture measurement standard outline Associate - Part 1. Physical measurement standards For dated references, only the dated edition applies to this specification; undated reference documents Member, the latest edition (including any amendments) applies to this specification.

3 Terms and Definitions

3.1 scanning probe microscopy scanningprobemicroscope (SPM) Having a scanning probe microscope measurement function collectively. Mainly containing an atomic force microscope (AFM), scanning tunneling Road microscope (STM) and the like. 3.2 SPM Z drift SPMZ-directiondrift Z scanning probe microscope to measure the drift point measurement.

4 Overview

Scanning probe microscope with high resolution, real-time, in-situ imaging features. The samples without special requirements, without Drying of the sample, shape, hardness, purity and other restrictions, in the atmosphere, the environment and even the solution at room temperature imaging. wide Pan used in nanotechnology, materials science, physics, chemistry and life sciences fields. 1 SPM typical structure example of FIG. 1- probe; 2- measurement sample; 3- Workbench

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