Powered by Google-Search & Google-Books www.ChineseStandard.net Database: 169760 (Oct 16, 2021)
HOME   Quotation   Tax   Examples Standard-List   Contact-Us   Cart
  

JJF 1100-2003

JJF 1100-2003_English: PDF (JJF1100-2003)
Standard IDContents [version]USDSTEP2[PDF] delivered inStandard Title (Description)Related StandardStatusGoogle Book
JJF 1100-2003English489 Add to Cart Days<=3 Calibration Specification for Flat Equal Thickness Interferometers JJF 1100-2003 Obsolete JJF 1100-2003
 

BASIC DATA
Standard ID JJF 1100-2003 (JJF1100-2003)
Description (Translated English) Calibration Specification for Flat Equal Thickness Interferometers
Sector / Industry Metrology & Measurement Industry Standard
Classification of Chinese Standard A52
Word Count Estimation 14,132
Date of Issue 2003-05-12
Date of Implementation 2003-11-12
Older Standard (superseded by this standard) JJG 336-1983
Drafting Organization China Testing Technology Research Institute
Administrative Organization National Engineering geometric parameters measured Technical Committee
Issuing agency(ies) State Administration of Quality Supervision, Inspection and Quarantine
Summary This standard applies to the thickness of the interferometer calibration plane, etc., not to be read only estimate the amount of bending of the interference fringes similar interference calibration device.

JJF 1100-2003
Calibration Specification for Flat Equal Thickness Interferometers
National Metrology Technical Specification of the People's Republic
Plane equal thickness interferometer calibration specification
Released on.2003-05-12
Implementation of.2003-11-12
The General Administration of Quality Supervision, Inspection and Quarantine issued
Plane equal thickness interferometer calibration specification
FlatEq
Instead of JJG336-1983
This specification was approved by the General Administration of Quality Supervision, Inspection and Quarantine on May 12,.2003, and
Implemented on November 12,.2003.
Focal Point. National Geometric Quantity Engineering Measurement Technology Committee
Responsible for drafting unit. China Testing Technology Research Institute
This specification is interpreted by the focal point
The main drafters of this specification.
Zhaoqing (China Testing Technology Research Institute)
Chen Yongkang (China Testing Technology Research Institute)
Participate in the drafters.
Li Jianmin (China Testing Technology Research Institute)
Cao Jian (China Testing Technology Research Institute)
table of Contents
1 range (1)
2 Citations (1)
3 Overview (1)
4 Measurement characteristics (1)
4.1 Repeatability of interference fringe spacing measurement (1)
4.2 Measuring error of micrometer eyepiece (1)
4.3 The amount of fringe caused by the objective system (1)
4.4 Instrument indication error (2)
5 Calibration conditions (3)
5.1 Environmental conditions (3)
5.2 Calibration standard and corresponding equipment (4)
6 Calibration items and calibration methods (4)
6.1 Repeatability of interference fringe spacing measurement (4)
6.2 Measuring error of micrometer eyepiece (4)
6.3 The amount of fringe caused by the objective system (4)
6.4 Instrument indication error (5)
7 Calibration result expression (5)
8 re-study interval (5)
Appendix A Calibration Certificate Contents (6)
Appendix B Analysis of Measurement Uncertainty of Indication Error of Planar Equal Thickness Interferometer (7)
Plane equal thickness interferometer calibration specification
1 Scope
This specification is applicable to the calibration of planar equal thickness interferometers. It is not applicable to the same type of interference that can only estimate the amount of interference fringe.
The calibration of the device.
2 Citations
JJF 1001-1998 General measurement terms and definitions
JJF 1059-1999 Measurement Uncertainty Evaluation and Representation
JJG28-2000 flat crystal verification procedure
JB/T 7401-1994 Plane Flat
Use of this specification should be done with the current valid version of the above cited documents.
3 Overview
The plane equal thickness interferometer (hereinafter referred to as the instrument) uses the principle of equal thickness light wave interference to measure the surface of the object.
The optical measuring instrument of the face can be divided into first and second grade according to the indication error of the instrument. Divided into light by sodium light according to its structure
Source, non-standard planar flat crystal and laser light source, two plane equal thickness interferometers with standard planar flat crystal. Outside
The shape structure and optical principle are shown in Figure 1, Figure 2 and Figure 3, Figure 4, respectively.
Figure 1 Outline structure diagram without standard flat crystal
4 Measurement characteristics
4.1 Repeatability of interference fringe spacing measurement
Repeatability does not exceed 0.020mm.
4.2 Measuring the error of the micro eyepiece
Not more than 0.005mm in any 1mm; not more than 0.010mm in the whole process 8mm.
4.3 The amount of fringe caused by the objective system
The amount of stripe bending at a distance of about 1 mm on both sides of the direction of the field of view of the field of view does not exceed 0.010 mm, and the rest does not exceed