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GB/T 40566-2021: Granular polysilicon produced by fluidized bed method - Determination of hydrogen - Pulse heating inert gas fusion infrared absorption method
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Granular polysilicon produced by fluidized bed method - Determination of hydrogen - Pulse heating inert gas fusion infrared absorption method
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GB/T 40566-2021
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Basic data | Standard ID | GB/T 40566-2021 (GB/T40566-2021) | | Description (Translated English) | Granular polysilicon produced by fluidized bed method - Determination of hydrogen - Pulse heating inert gas fusion infrared absorption method | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H82 | | Word Count Estimation | 9,996 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 40566-2021: Granular polysilicon produced by fluidized bed method - Determination of hydrogen - Pulse heating inert gas fusion infrared absorption method
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Granular polysilicon produced by fluidized bed method - Determination of hydrogen - Pulse heating inert gas fusion infrared absorption method
ICS 29.045
CCSH82
National Standards of People's Republic of China
Determination of Silicon Hydrogen Content of Particles by Fluidized Bed Method
Pulse heating inert gas melting infrared absorption method
Released on 2021-10-11
2022-05-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Table of contents
Foreword Ⅰ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Principle 1
5 Interference factor 1
6 Reagents and materials 2
7 Instruments and equipment 2
8 Sample preparation 2
9 Test Step 2
10 Results processing 4
11 Precision 4
12 Test report 4
13 Quality Assurance and Control 5
Appendix A (informative) Instrument reference working conditions 6
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
Please note that some of the contents of this document may involve patents. The issuing agency of this document is not responsible for identifying patents.
This document was proposed and managed by the National Semiconductor Equipment and Material Standardization Technical Committee (SAC/TC203).
Drafting organizations of this document. Wuxi Product Quality Supervision and Inspection Institute, Shanghai Safe Semiconductor Materials Co., Ltd., and the upper reaches of the Yellow River in Qinghai
Photovoltaic Industry Technology Branch of Power Development Co., Ltd., Jiangsu Zhongneng Silicon Technology Development Co., Ltd., Xinjiang Xinte New Energy Materials Testing
Heart Co., Ltd., Wuxi Institute of Analysis and Testing, China Electronics Standardization Institute, Wuxi Metrology and Testing Institute, Leshan Product Quality Supervision
Supervisory Inspection Office, Luoyang China Silicon High-Tech Co., Ltd., CECEP Solar Energy Technology (Zhenjiang) Co., Ltd., Jicui New Material Research and Development Co., Ltd.,
Changzhou University, Fujian Institute of Metrology, Shanghai Institute of Materials, Suzhou Bofeik Analytical Technology Service Co., Ltd.
The main drafters of this document. He Li, Yang Jun, Wang Meijuan, Jiang Wei, Ding Binbin, Bao Jun, Liu Xiaoxia, Lu Wenfeng, Wang Xuhui, Wang Bin, Wang Ganqiang,
Liang Hong, Chu Dongxu, Qiu Yanmei, Ma Yunfeng, Huang Guoping, Wang Taoxia, Xue Xiaoqiang, Luo Haiyan, Ma Chongxian, He Yongqiang.
Determination of Silicon Hydrogen Content of Particles by Fluidized Bed Method
Pulse heating inert gas melting infrared absorption method
1 Scope
This document describes a method for measuring the hydrogen content in granular silicon by pulse heating inert gas fusion infrared absorption method.
This document is applicable to the determination of hydrogen content in granular silicon by the fluidized bed method, and other silicon materials are used as reference.
Note. The measurement range of hydrogen content in this document depends on the range of the hydrogen analyzer used, and the maximum measurement range is 0.00008mg~2.5mg of hydrogen. By quality
The measurement range of the hydrogen analyzer indicated by the number (%) varies with the amount of the sample weighed. For example, the mass fraction of the maximum measurement range of 1g sample is
0.000008%~0.25%; The mass fraction of the maximum measuring range of 0.15g sample is 0.00006%~1.66%.
2 Normative references
The content of the following documents constitutes an indispensable clause of this document through normative references in the text. Among them, dated quotations
Only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
This document.
GB/T 6379.2 Accuracy of measurement methods and results (accuracy and precision) Part 2.Determine the repeatability of standard measurement methods
Basic methods of sex and reproducibility
GB/T 8170 Numerical rounding rules and the expression and determination of limit values
GB/T 14264 Terminology of Semiconductor Materials
3 Terms and definitions
The terms and definitions defined in GB/T 14264 are applicable to this document.
4 Principle
The sample is placed in a degassed graphite sleeve crucible, heated and melted under an inert atmosphere, and the hydrogen in the sample is released in the form of hydrogen molecules (H2)
Put and enter the carrier gas stream, the hydrogen molecules will be converted into water (H2O) after passing through the hot copper oxide with the carrier gas stream, which is detected in a special infrared cell. root
According to the change of infrared absorption intensity signal, the hydrogen content is calculated.
5 Disturbing factors
5.1 The main factors that have a greater impact on the test results are the uniformity of the sample, the cleanliness of the sample surface, the purity of the inert gas, the graphite crucible and the
The purity of the auxiliary material (high-purity nickel capsule), the accuracy and uncertainty of the calibration sample value, the accuracy of the electronic balance, the operating parameters of the instrument
Optimize selection, etc.
5.2 Inert gas (helium or argon) is used as the carrier gas in the test instrument, and its impurities may affect the accuracy of the test results.
Use high-purity inert gas to improve the accuracy of test results.
5.3 The impurity elements of graphite crucible and auxiliary materials may absorb part of the released hydrogen, and the hydrogen content of graphite crucible and auxiliary materials is also
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