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GB/T 38866-2020: Dichlorosilane for electronic industry
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 38866-2020 | English | 259 |
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Dichlorosilane for electronic industry
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GB/T 38866-2020
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Basic data | Standard ID | GB/T 38866-2020 (GB/T38866-2020) | | Description (Translated English) | Dichlorosilane for electronic industry | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 14,182 | | Date of Issue | 2020-07-21 | | Date of Implementation | 2021-02-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 38866-2020: Dichlorosilane for electronic industry---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Dichlorosilane for electronic industry
ICS 71.100.20
G86
National Standards of People's Republic of China
Dichlorosilane for the electronics industry
2020-07-21 released
2021-02-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed and managed by the National Semiconductor Equipment and Material Standardization Technical Committee (SAC/TC203).
Drafting organizations of this standard. Hubei Jingxing Technology Co., Ltd., Hubei Institute of Standardization and Quality, Luoyang China Silicon High-Tech Co., Ltd.
Company, Tangshan Sanfu Electronic Materials Co., Ltd., Hubei Optics Valley Standard Innovation Technology Co., Ltd., Guangdong Huate Gas Co., Ltd., Zhejiang
SEAT Electronic Materials Co., Ltd., Shanghai Huaai Chromatographic Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd., Shanghai Metrology and Testing
Technology Research Institute, Lianxiong Investment (Shanghai) Co., Ltd., Suizhou Information and Standardization Institute, Dazhou Quality and Technical Supervision, Inspection and Testing Center, West
South Chemical Research and Design Institute Co., Ltd.
The main drafters of this standard. Feng Lei, Ye Jiaai, Gong Rui, Yang Jian, Liu Chang, Wan Ye, Zhang Yuanyuan, Wang Chunying, Dai Shuai, Xie Qiuqi, Yuan Le,
Fu Zhuhong, Yu Jinlong, Yang Li, Yu Qingyu, Fang Hua, Cao Zuobin, Qu Qing, Chen Ying, Li Chunhua, Huang Hui, Tan Pengcheng, Deng Yuanfang, Zhou Pengyun, Li Wei,
Fang Aili, Tan Yiling.
Dichlorosilane for the electronics industry
1 Scope
This standard specifies the technical requirements, inspection rules, test methods, signs, packaging, transportation, storage and safety of dichlorosilane used in the electronics industry
Requirements.
This standard applies to dichlorosilane prepared by disproportionation method.
2 Normative references
The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this article
Pieces. For undated references, the latest version (including all amendments) applies to this document.
GB 190 Dangerous Goods Packaging Mark
GB/T 602 Preparation of standard solutions for impurity determination in chemical reagents
GB/T 3723 General Rules for Sampling Safety of Industrial Chemical Products
GB/T 4842 Argon
GB/T 5099 steel seamless gas cylinder
GB/T 7144 Gas cylinder color mark
GB/T 8984 Determination of carbon monoxide, carbon dioxide and hydrocarbons in gases by gas chromatography
GB/T 11446.1-2013 electronic grade water
GB/T 14193 Liquefied gas cylinder filling regulations
GB 15258 Regulations for the preparation of chemical safety labels
GB/T 16804 Gas cylinder warning label
GB/T 28726 Gas analysis Helium ionization gas chromatography
GB/T 32566 Stainless steel welded gas cylinder
GB/T 34972 Determination of metal content in gases for electronics industry inductively coupled plasma mass spectrometry
TSGR0006 Gas Cylinder Safety Technical Supervision Regulation
Regulations on the Safety Management of Hazardous Chemicals (Promulgated by Order No. 344 of the State Council of the People's Republic of China on January 26,.2002, February.2011
(Revised and adopted at the 144th executive meeting of the State Council on the 16th)
Regulations on Safety Supervision of Special Equipment (2009 Edition, Order No. 549 of the State Council of the People's Republic of China)
3 Technical requirements
The technical requirements of dichlorosilane should meet the requirements of Table 1.
Table 1 Technical requirements
Project name indicator
Dichlorosilane (SiH2Cl2) purity (volume fraction)/10-2 ≥99.99
Silicon tetrachloride (SiCl4) content (volume fraction)/10-6 ≤25
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