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GB/T 38616-2020: Terminology for nano positioning and scanning stage
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 38616-2020 | English | 259 |
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Terminology for nano positioning and scanning stage
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GB/T 38616-2020
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Basic data | Standard ID | GB/T 38616-2020 (GB/T38616-2020) | | Description (Translated English) | Terminology for nano positioning and scanning stage | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | N10 | | Classification of International Standard | 01.040.39 | | Word Count Estimation | 14,136 | | Date of Issue | 2020-04-28 | | Date of Implementation | 2020-11-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | | Summary | This standard specifies the definition of the nanopositioning and scanning platform (hereinafter referred to as the platform). This standard applies to the definition of nanopositioning and scanning platform product parameters. | GB/T 38616-2020: Terminology for nano positioning and scanning stage---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Terminology for nano positioning and scanning stage
ICS 01.040.39
N10
National Standards of People's Republic of China
Nanopositioning and scanning platform terminology
2020-04-28 release
2020-11-01 implementation
State Administration of Market Supervision and Administration
Issued by the National Standardization Management Committee
Contents
Foreword Ⅲ
1 Scope 1
2 General terms 1
3 Testing terms 2
Index 7
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed and managed by the National Standardization Technical Committee for Electronic Measuring Instruments (SAC/TC153).
This standard was drafted by. Shenyang Jianzhu University, Sanying Precision Control (Tianjin) Instrument Co., Ltd., Guangdong University of Technology, China Metrology Science
Research Institute, Suzhou Haotong Instrument Technology Co., Ltd., Shenyang University of Science and Technology.
The main drafters of this standard. Xu Ying, Dai Jing, An Dong, Shao Meng, Shi Yushu, Jia Jing, Dai Chao, Wen Jie, Wang He.
Nanopositioning and scanning platform terminology
1 Scope
This standard defines the definition of terms for nanopositioning and scanning platform (hereinafter referred to as platform).
This standard applies to the definition of product parameters for nanopositioning and scanning platforms.
2 General terms
2.1
Piezoactuator
Ceramic element that uses longitudinal piezoelectric effect to convert electrical energy into mechanical energy.
2.2
Flexurehingemechanism
A special motion pair that uses elastic deformation of the material to generate displacement, has no mechanical friction, high motion sensitivity, high displacement resolution, etc.
Features, often used in platform transmission guide mechanism.
Note. According to the shape of the cross-sectional cut, flexible hinges can be divided into. right-angle type, oval shape, transition fillet type and perfect circle, as shown in Figure 1.
a) Right-angle flexible hinge b) Elliptical flexible hinge c) Transition rounded flexible hinge d) True round flexible hinge
Figure 1 Flexible hinges classified according to the cross-sectional cut shape
2.3
Nanopositioning and scanning stage
Platform with nanometer-level positioning and scanning function based on piezoelectric ceramic driver and flexible hinge mechanism.
2.4
Platform material stagematerial
The substance used to manufacture the mechanical structure of the platform body.
2.5
Platform size
The geometric quantity that characterizes the outer contour of the platform.
Note. usually in millimeters (mm).
2.6
Platform movement dimension stagedegreeoffreedom
The number of independent platform motion space coordinate directions.
Note. It can be divided into 1D, 2D, and 6D platforms.
2.7
Speed stability
The ability of the platform to maintain a constant speed during the scanning process.
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