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GB/T 38614-2020: Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 38614-2020 | English | 339 |
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Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator
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GB/T 38614-2020
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Basic data | Standard ID | GB/T 38614-2020 (GB/T38614-2020) | | Description (Translated English) | Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | N10 | | Classification of International Standard | 01.040.39 | | Word Count Estimation | 18,157 | | Date of Issue | 2020-04-28 | | Date of Implementation | 2020-11-01 | | Quoted Standard | GB/T 11336-2004; GB/T 38616-2020 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | | Summary | This standard specifies the measurement conditions, measurement systems and measurement methods of nano-positioning and scanning platforms (hereinafter referred to as platforms) based on flexible hinge mechanisms and piezoelectric ceramic drives. This standard applies to the research, design, production, testing and use of the platform. | GB/T 38614-2020: Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator
ICS 01.040.39
N10
National Standards of People's Republic of China
Based on flexible hinge mechanism and piezoelectric ceramic driver
Nano positioning and scanning platform measurement method
2020-04-28 release
2020-11-01 implementation
State Administration of Market Supervision and Administration
Issued by the National Standardization Management Committee
Contents
Foreword Ⅲ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Measurement conditions 1
5 Measuring instruments 1
6 Measurement method 1
6.1 Axial stroke 1
6.2 Accuracy 2
6.3 One-way repeated positioning accuracy 2
6.4 Bidirectional repeat positioning accuracy 3
6.5 Hysteresis error 4
6.6 Linearity 5
6.7 Displacement resolution 6
6.8 Angle pendulum deviation 6
6.9 Straightness 8
6.10 Flatness 9
6.11 Quadrature error 10
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed and managed by the National Standardization Technical Committee for Electronic Measuring Instruments (SAC/TC153).
This standard was drafted by. Shenyang Jianzhu University, Sanying Precision Control (Tianjin) Instrument Co., Ltd., Guangdong University of Technology, China Metrology Department
Academy of Sciences, Suzhou Haotong Instrument Technology Co., Ltd., Shenyang University of Science and Technology.
The main drafters of this standard. Xu Ying, Dai Jing, Shao Meng, An Dong, Shi Yushu, Jia Jing, Dai Chao, Wen Jie, Shi Huaitao.
Based on flexible hinge mechanism and piezoelectric ceramic driver
Nano positioning and scanning platform measurement method
1 Scope
This standard specifies the measurement of nanopositioning and scanning platform (hereinafter referred to as platform) based on flexible hinge mechanism and piezoelectric ceramic driver
Measurement conditions, measurement systems and measurement methods.
This standard applies to the research, design, production, testing and use of the platform.
2 Normative references
The following documents are essential for the application of this document. For dated references, only the dated version applies to this article
Pieces. For the cited documents without date, the latest version (including all amendments) applies to this document.
GB/T 11336─2004 straightness error detection
GB/T 38616-2020 Terminology for nanopositioning and scanning platform
3 Terms and definitions
The terms and definitions defined in GB/T 38616-2020 apply to this document.
4 Measurement conditions
The platform measurement should meet the following conditions.
a) The measurement site should be free of dust, vibration, airflow disturbance and strong magnetic field that affect the measurement accuracy;
b) The ambient temperature during measurement is (20 ± 1) ℃, and its change should not be greater than 0.5 ℃/h;
c) The relative humidity of the environment during the measurement is (50 ± 5)%;
d) Before the measurement, confirm that the platform has no appearance defects that affect the correctness of the measurement and the measurement results;
e) The platform is in normal working state during measurement.
5 Measuring instruments
It is recommended to use a laser interferometer (hereinafter referred to as interferometer) in this standard, and the auto-collimator can also be used for angular deviation.
Full measurement requirements.
6 Measurement methods
6.1 Axial travel
6.1.1 Measurement procedure
Align the interferometer strictly to the platform, and perform the axial stroke measurement according to the following steps.
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