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GB/T 38447-2020 English PDF

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GB/T 38447-2020: Micro-electromechanical system technology - Fatigue testing method of MEMS structure using resonant vibration
Status: Valid

Standard ID	Contents [version]	USD	STEP2	[PDF] delivered in	Standard Title (Description)	Status	PDF
GB/T 38447-2020	English	339	Add to Cart	4 days [Need to translate]	Micro-electromechanical system technology - Fatigue testing method of MEMS structure using resonant vibration	Valid	GB/T 38447-2020

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Basic data

Standard ID	GB/T 38447-2020 (GB/T38447-2020)
Description (Translated English)	Micro-electromechanical system technology - Fatigue testing method of MEMS structure using resonant vibration
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	L55
Classification of International Standard	31.200
Word Count Estimation	18,146
Date of Issue	2020-03-06
Date of Implementation	2020-07-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration

GB/T 38447-2020: Micro-electromechanical system technology - Fatigue testing method of MEMS structure using resonant vibration

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Micro-electromechanical system technology--Fatigue testing method of MEMS structure using resonant vibration ICS 31.200 L55 National Standards of People's Republic of China Microelectromechanical system (MEMS) technology MEMS structure resonance fatigue test method Released on 2020-03-06 2020-07-01 implementation State Administration of Market Supervision and Administration Issued by the National Standardization Management Committee

Foreword I 1 Scope 1 2 Normative references 1 3 Terms and definitions 1 4 Test method 1 4.1 General 1 4.2 Test equipment 1 4.3 Test environment 2 4.4 Sample requirements 2 4.5 Test condition 3 4.6 Test Step 3 4.7 Test report 4 Appendix A (informative appendix) Test example 5 of integrated vibration excitation and detection structure electrostatic device 5 Appendix B (informative appendix) Test examples of external drive and integrated strain structure (displacement detection) devices 8 Appendix C (informative appendix) Fatigue life theory of brittle materials based on Paris law and Weibul distribution Expression 10 Appendix D (informative appendix) Analysis example 13 Reference 15

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard was proposed and managed by the National Micro-Electromechanical Technology Standardization Technical Committee (SAC/TC336). This standard was drafted by. Peking University, China Machine Productivity Promotion Center, Beijing Zhixin Sensor Technology Co., Ltd., Shenyang Guoyi Testing Technology Co., Ltd., Zhejiang Boya Precision Machinery Co., Ltd., North University of China, Beijing Bichuang Technology Co., Ltd. The main drafters of this standard. Zhang Wei, Zhang Yating, Yu Zhenyi, Lu Xuegui, Zhu Yue, Shi Yunbo, Li Haibin, Cheng Yixuan, Zhou Haonan, Chen Demin. Microelectromechanical system (MEMS) technology MEMS structure resonance fatigue test method

1 Scope

This standard specifies the test methods for resonance fatigue testing of MEMS structures, including equipment, test environment, sample requirements, test conditions and experiment procedure. This standard applies to resonance fatigue testing of MEMS structures.

2 Normative references

The following documents are essential for the application of this document. For dated references, only the dated version applies to this article Pieces. For the cited documents without date, the latest version (including all amendments) applies to this document. GB/T 2298 Glossary of mechanical vibration, shock and condition monitoring GB/T 10623 Terminology of mechanical properties of metallic materials GB/T 26111 Technical terms for microelectromechanical system (MEMS)

3 Terms and definitions

The terms and definitions defined in GB/T 2298, GB/T 10623, GB/T 26111 and the following apply to this document. 3.1 Load ratio The algebraic ratio of the maximum value and the minimum value during periodic loading. 3.2 Instantaneous failure strength The breaking strength of static test or resonance vibration test in the process of rapid amplitude growth. 3.3 Reference strength Static strength or instantaneous destruction strength.

4 Test method

4.1 General The fatigue test is performed by applying resonance vibration of the expected vibration amplitude to the sample. When the sample fails or reaches the predetermined test time or times After several hours, the test is over. 4.2 Test equipment 4.2.1 Overview The test equipment can generate vibration with constant amplitude and stable frequency to the test structure. The test system consists of an exciter and a pickup sensor (below

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