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GB/T 36306-2024: Cleanroom and associated controlled environments - Technical requirements of air chemical contamination control
Status: Valid GB/T 36306: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 36306-2024 | English | 379 |
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Cleanroom and associated controlled environments - Technical requirements of air chemical contamination control
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GB/T 36306-2024
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| GB/T 36306-2018 | English | 719 |
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Cleanrooms and associated controlled environments -- Guidelines for airborne chemical contamination control
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GB/T 36306-2018
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PDF similar to GB/T 36306-2024
Basic data | Standard ID | GB/T 36306-2024 (GB/T36306-2024) | | Description (Translated English) | Cleanroom and associated controlled environments - Technical requirements of air chemical contamination control | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | C70 | | Classification of International Standard | 13.040.35 | | Word Count Estimation | 18,182 | | Date of Issue | 2024-03-15 | | Date of Implementation | 2024-10-01 | | Older Standard (superseded by this standard) | GB/T 36306-2018 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 36306-2024: Cleanroom and associated controlled environments - Technical requirements of air chemical contamination control
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 13.040.35
CCSC70
National Standards of People's Republic of China
Replaces GB/T 36306-2018
Cleanrooms and related controlled environments
Technical requirements for air chemical pollution control
Released on 2024-03-15
2024-10-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Pollution sources 1
5 Air Chemical Pollution Control 2
6 Detection and Monitoring 3
Appendix A (Informative) Selection of Clean Room Construction Materials 5
Appendix B (Informative) Electronic Industry Clean Room Air Chemical Pollution Control System 7
Appendix C (Informative) Microelectronics Industry Clean Room Air Chemical Pollutant Control Data Sheet 9
Appendix D (Informative) Chemical Concentration Control Measures during Clean Room Construction Phase 11
Reference 13
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting is required.
This document replaces GB/T 36306-2018 "Guidelines for Control of Air Chemical Contamination in Clean Rooms and Related Controlled Environments" and
Compared with GB/T 36306-2018, in addition to structural adjustments and editorial changes, the main technical changes are as follows.
a) The scope of application of the standard has been changed (see Chapter 1, Chapter 1 of the.2018 edition);
b) Deleted the terms such as air molecular pollution, environmental response monitoring method, pollutants, and gas phase air purification device (see the.2018 edition of
3.1, 3.2, 3.3, 3.4);
c) Added terms such as air cleanliness and released gas classified by chemical concentration (see 3.1 and 3.3);
d) The definition of air chemical pollutants has been changed (see 3.2, 3.5 of the.2018 edition);
e) The pollution sources were changed and added (see 4.1, 4.2, 4.1 of the.2018 edition), and the classification and categorization were deleted (see
4.2);
f) Added general requirements, design, construction, operation and maintenance and other air chemical pollution control content (see 5.1, 5.2, 5.3, 5.4), deleted
Determine whether there is pollution and the situation, and the content of control measures (see 6.1 and 6.2 of the.2018 edition);
g) Changed the title "Detection" to "Detection and Monitoring" (see Chapter 6, Chapter 5 of the.2018 edition), and changed the content of the detection (see
6.1, 5.1 and 5.2 of the.2018 edition), added monitoring content (see 6.2).
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed and coordinated by the National Technical Committee for Cleanrooms and Related Controlled Environments (SAC/TC319).
This document was drafted by. China Electronics Engineering Design Institute Co., Ltd., China Electronics System Engineering Third Construction Co., Ltd., China
Electronic System Engineering Second Construction Co., Ltd., Institute of Atmospheric Physics, Chinese Academy of Sciences, Suzhou Antai Air Technology Co., Ltd., Shenzhen Yi
Tianjin Purification Technology Co., Ltd., Tianjin University, Suzhou Huatai Air Filter Co., Ltd., China Association for Standardization, Binzhou Yuneng Electronic Materials Co., Ltd.
Co., Ltd., Beijing Dyna Experimental Technology Co., Ltd., Yantai Baoyuan Purification Co., Ltd., Jianghan University, Shanghai Indoor Environment Purification Industry
Association, China Electronics Jingtai Electronic Engineering Co., Ltd., Liz Holdings Co., Ltd., Wuxi Lambton Technology Co., Ltd., Zhongkai University of Agriculture and Engineering,
Huanggang Luban Pharmaceutical Co., Ltd., Shanghai Heyi Purification Equipment Manufacturing Co., Ltd., Foshan Nanhai Dongfang Aolong Pharmaceutical Co., Ltd., Shenzhen
Shenzhen China Construction Southern Environment Co., Ltd.
The main drafters of this document are. Yan Dong, Liu Junjie, Wang Qixun, Sun Yang, Li Wei, Xia Qunyan, Chen Siyuan, Huo Jinpeng, Hao Yinbo, Hu Maocong,
Wu Zhijian, Geng Wentao, Wang Fang, Xi Xiaopeng, Ding Lixing, Yang Yuntao, Yang Ziqiang, Chen Xifu, Wang Yan, Yan Bin, Pei Jingjing, Zhou Shuzhen, Xu Baoping,
Xu Yibin, Zhang Changan, Yang Li, Yang Xiaolong, Bai Bing.
The previous versions of this document and the documents it replaces are as follows.
---First published in.2018 as GB/T 36306-2018;
---This is the first revision.
Introduction
The air chemical pollution control technology in this document is mainly aimed at clean rooms and related controlled environments with air chemical pollution control requirements.
The molecular size of air chemical pollutants ranges from 0.1nm to 3nm. They usually exist in the form of gas or vapor. Conventional high-efficiency filtration
It cannot be effectively removed by filters and ultra-high efficiency filters, and cannot be detected by particle counters.
There are many types of chemical pollutants in the air. Different pollutants have different chemical properties. The concentration of some pollutants can vary with the temperature,
The air pollution is changing with humidity, and the source of pollutants is very random. With the development of purification technology and materials, air chemical pollutants can
Effectively controlled and removed, it can ensure that air chemical pollutants in clean rooms and related controlled environments meet environmental limit requirements.
Cleanrooms and related controlled environments
Technical requirements for air chemical pollution control
1 Scope
This document specifies the technical requirements for the control of air chemical pollutants in clean rooms and related controlled environments, including pollution sources, air chemical pollution control
Control, testing and monitoring etc.
This document applies to the control of airborne chemical contamination in cleanrooms and related controlled environments.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 25915.8-2021 Cleanrooms and related controlled environments Part 8.Air cleanliness by chemical concentration (ACC)
grade
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
The ISO -ACC represents the maximum permissible concentration of a given chemical type or group of chemicals in grams per cubic meter.
Note. Biomacromolecules are classified as particles and are not included in this definition.
[Source. GB/T 25915.8-2021, 3.1.2]
3.2
Existing in gaseous or vapor form, its chemical properties may have adverse effects on the products, processes, and equipment in the clean room and related controlled environments
substance.
3.3
outgassing
Chemical substances released from equipment and materials in gaseous or vaporous form.
[Source. GB/T 25915.8-2021, 3.1.7, modified]
4 Pollution sources
4.1 Outdoor pollution sources
Chemical substances present in the outdoor atmosphere that may harm products, processes, and equipment in clean rooms mainly include sulfur oxides, nitrogen oxides,
substances, ozone, ammonia, volatile organic compounds, etc.
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