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GB/T 35049-2018 English PDF

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GB/T 35049-2018: Vacuum technology -- Leak testing method by quadrupole mass spectrometer
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Basic data

Standard ID GB/T 35049-2018 (GB/T35049-2018)
Description (Translated English) Vacuum technology -- Leak testing method by quadrupole mass spectrometer
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard J78
Classification of International Standard 23.160
Word Count Estimation 27,253
Date of Issue 2018-05-14
Date of Implementation 2018-12-01
Regulation (derived from) National Standards Announcement No. 6 of 2018
Issuing agency(ies) State Administration for Market Regulation, China National Standardization Administration

GB/T 35049-2018: Vacuum technology -- Leak testing method by quadrupole mass spectrometer

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(Vacuum Technology Quadrupole Mass Spectrometer Leak Detection Method) ICS 23.160 J78 National Standards of People's Republic of China Vacuum technology quadrupole mass spectrometer leak detection method Published on.2018-05-14 2018-12-01 implementation State market supervision and administration China National Standardization Administration issued

Content

Foreword I Introduction II 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 4 General requirements 3 4.1 Environmental Requirements 3 4.2 Equipment Requirements 3 4.3 Tracer gas purity 3 4.4 Personnel qualification 3 4.5 Tracer Gas Selection 3 4.6 Quality number selection 3 4.7 Instrument Calibration 4 5 leak detection method 4 5.1 blowing method 4 5.2 Vacuum chamber method 8 5.3 Quadrupole mass spectrometry non-vacuum accumulation method 11 5.4 Sniffer method 15 6 leak detection files 18 6.1 Leak Detection Record 18 6.2 Leak Detection Report 18 Appendix A (Normative Appendix) Leak Detection Records for Four Leak Detection Methods 19 Appendix B (Normative Appendix) Leak Detection Report 23

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard was proposed by the China Machinery Industry Federation. This standard is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18). This standard was drafted. Beijing Satellite Environmental Engineering Research Institute, Hefei Zhihai Photoelectric Technology Co., Ltd., Anhui Puyi Technology Co., Ltd. Company, Shenyang Vacuum Technology Research Institute. The main drafters of this standard. Dou Renchao, Sun Lichen, Yan Rongxin, Hong Xiaopeng, Meng Donghui, Liu Lei, Ren Guohua, Feng Qi, Shi Jijun, Huang Wenping, Chen Ran, Han Wei, Yu Xinfa, Shao Rongping, Wang Jian, Liu Xingyue, Zhang Liwei, Wang Yong, Sun Lizhi, Wang Lingling.

Introduction

The quadrupole mass spectrometer is widely used in aerospace, aviation, and has many advantages in detecting substances, high sensitivity in leak detection, and stable test results. Leak detection in the fields of electronics, nuclear power, and vacuum. However, there is currently no uniform, standardized leak rate determination based on quadrupole mass spectrometer leak detection. Measurement methods and standards, so that the detection methods and calculation methods used by vacuum and other units in different industries are different, making it impossible Give full play to the advantages of qualitative and quantitative detection, and the test results between various industry units are not comparable, so quadrupole mass spectrometry leak detection The application of the law in various industries is greatly restricted, which is not conducive to the promotion and application of quadrupole mass spectrometers in various industries. The development of this standard can standardize the method selection, operation flow, operation steps of the quadrupole mass spectrometer in the product sealing performance testing process. The results are calculated, which makes the results of quadrupole mass spectrometry leak detection between different industries and fields comparable, thus improving the product sealing quality and increasing production. Sealing reliability of the product. Vacuum technology quadrupole mass spectrometer leak detection method

1 Scope

This standard specifies the general requirements for the implementation of four commonly used quadrupole mass spectrometry leak detection methods. Each type of leak detection method is applied to the system and system group. Requirements for procedures, leak detection procedures, etc. and requirements for leak detection documents. This standard is applicable to the leak detection work using the quadrupole mass spectrometer in the vacuum industry and other industries. It is applicable to the component level and sub-component. Sealing performance testing of system-level and system-level products.

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article. Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB/T 9445 Non-destructive testing personnel qualification and certification GB/T 12604.7 Non-destructive testing term leak detection GB/T 13966 Analytical Instrument Terminology

3 Terms and definitions

The following terms and definitions as defined in GB/T 12604.7 and GB/T 13966 apply to this document. 3.1 Response time responsetime From the application of the tracer gas to the inlet end of the leak hole, to the mass spectrometer output indication (deducting the background value) to reach the maximum change value (deducting the background value) The time elapsed after 63% of the leak signal value). Note. The unit is seconds (s). 3.2 Clear time clear-uptime Start by applying the tracer gas from the inlet end of the leak hole, and output the indicated value (minus the background value) to the quadrupole mass spectrometer. The time elapsed when 37% of the maximum leak signal value (after subtracting the background value). 3.3 Calibrate the leak hole standardleak A calibration leak that provides a known flow rate to a specified gas under specified conditions (temperature, pressure). 3.4 Positive pressure calibration leak pressureleak The inlet end pressure is higher than one atmosphere, the outlet end pressure is one atmosphere, and a calibrated leak is known for a certain gas leak rate. 3.5 Background signal backgroundsignal Quadrupole mass spectrometry in the absence of tracer gas, due to residual tracer gas or other factors that can cause the response of the leak detector The instrument produces a stable or fluctuating output signal.

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