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GB/T 34972-2017 English PDF

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GB/T 34972-2017: Determination of metal content in gases -- Inductively coupled plasma mass spectrometry method
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PDF similar to GB/T 34972-2017


Standard similar to GB/T 34972-2017

GB/T 34710.2   GB/T 34710.3   GB/T 34544   GB/T 14601   GB/T 34971   

Basic data

Standard ID GB/T 34972-2017 (GB/T34972-2017)
Description (Translated English) Determination of metal content in gases -- Inductively coupled plasma mass spectrometry method
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard G86
Classification of International Standard 71.040.40
Word Count Estimation 9,972
Date of Issue 2017-11-01
Date of Implementation 2018-02-01
Regulation (derived from) National Standard Announcement 2017 No. 29
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34972-2017: Determination of metal content in gases -- Inductively coupled plasma mass spectrometry method


---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Determination of metal content in gases-Inductively coupled plasma mass spectrometry method ICS 71.040.40 G86 National Standards of People's Republic of China Electronic industry - Determination of metal content in gases Inductively coupled plasma mass spectrometry Posted.2017-11-01 2018-02-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted unit. Shanghai Institute of Measurement and Testing Technology, Southwest Chemical Research and Design Institute Co., Ltd., Gome Instruments, Guangdong Huate Gas Co., Ltd., Beijing Huayu Tongfang Chemical Technology Development Co., Ltd., Suzhou Jinhong Gas Co., Ltd., Shanghai Huai'ai Chromatography Technology Co., Ltd., Hao bright chemical research and Design Institute Co., Ltd.. The main drafters of this standard. Chen Ying, Jiang Yang, Zhou Peng Yun, Niu Yan East, Fu Zhuhong, Du Hansheng, Jiang Luo, Xu Junzhou, Fang Hua, Chang Xia. Electronic industry - Determination of metal content in gases Inductively coupled plasma mass spectrometry

1 Scope

This standard specifies the application of inductively coupled plasma mass spectrometry Determination of metal content in the electronics industry with a method of content. Metal yuan The determination range of the prime is shown in Table 1. This standard applies to the type of gas used in the electronics industry.Oxygen, nitrogen, argon, helium, hydrogen, ammonia, hydrogen chloride, silane, high purity chlorine, sulfur hexafluoride, trichlorination Boron, nitrogen trifluoride, nitrous oxide, hexafluoroethane, hexafluorobutadiene and other gases. This standard applies to the electronics industry gas sampling state. Table 1 Determination of metal elements Elemental determination range/(μg/L) Elemental determination range/(μg/L) Li 0.0001 to 100.0 Ce 0.0005 to 100.0 Be 0.0005 to 100.0 Pr 0.0005 to 100.0 Na 0.0001 to 100.0 Nd 0.0005 to 100.0 Mg 0.0005 to 100.0 Pm 0.0005 to 100.0 Al 0.001-100.0 Sm 0.0005-100.0 K 0.001-100.0 Eu 0.0005-100.0 Ca 0.001-100.0 Gd 0.0005-100.0 Sc 0.001-100.0 Tb 0.0005-100.0 Ti 0.0001 to 100.0 Dy 0.0005 to 100.0 V 0.0001 to 100.0 Ho 0.0005 to 100.0 Cr 0.0005 ~ 100.0 Er 0.0005 ~ 100.0 Mn 0.0001 to 100.0 Tm 0.0005 to 100.0 Fe 0.001 to 100.0 Yb 0.0005 to 100.0 Co 0.0005 to 100.0 Lu 0.0005 to 100.0 Ni 0.001-100.0 Hf 0.0005-100.0 Cu 0.0005 ~ 100.0 Ta 0.0005 ~ 100.0 Zn 0.0001-100.0 W 0.001-100.0 Ga 0.001-100.0 Re 0.0005-100.0 Ge 0.001-100.0 Os 0.0005-100.0 Rb 0.0005 to 100.0 Ir 0.0001 to 100.0 Sr 0.0001 ~ 100.0 Pt 0.001 ~ 100.0 Y 0.0001 ~ 100.0 Au 0.0001 ~ 100.0 Zr 0.0005 to 100.0 Hg 0.001 to 100.0

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