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GB/T 31987-2015: Gas for electronic industry -- Germane
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 31987-2015 | English | 239 |
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Gas for electronic industry -- Germane
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GB/T 31987-2015
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Basic data | Standard ID | GB/T 31987-2015 (GB/T31987-2015) | | Description (Translated English) | Gas for electronic industry -- Germane | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 11,118 | | Date of Issue | 2015-09-11 | | Date of Implementation | 2016-05-01 | | Quoted Standard | GB 190; GB/T 3723; GB 5099; GB/T 5832.3; GB 7144; GB 14193; GB 15258; GB 16804; GB/T 26571; GB/T 28726 | | Regulation (derived from) | National Standard Announcement 2015 No.25 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements germane, test methods, marking, packaging, storage and security. This standard applies to restore germanium chloride, sulfuric acid electrolytic oxidation germanium, germanium, magnesium alloy and the reaction such as hydrochloric acid obtained by the method germane products. It is used for chemical reagents, production of high-purity germanium, chemical vapor deposition, diffusion, amorphous silicon, epitaxy, ion implantation, and other fields. | GB/T 31987-2015: Gas for electronic industry -- Germane---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry - Germane
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industrial gas germane
Issued on. 2015-09-11
2016-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
Please note that some of the content of this document may involve patents. Distribution of this document
Institutions do not assume the responsibility to identify these patents.
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. Shanghai Hua love Chromatography Technology Co., Ltd., Foshan City, Walter Gas Co., Hao bright chemical research
Design Institute Limited, the national chemical industrial gas Product Quality Supervision and Inspection Center (Fujian), Southwest Chemical Industry Research and Design Institute Limited.
The main drafters of this standard. Fang Hua, Peiyou Hong, Guo Xiuli, Lin Yuwei, melting Chen, Zhou Pengyun.
Electronic industrial gas germane
1 Scope
This standard specifies the technical requirements germane, test methods, marking, packaging, storage and security.
This standard applies to restore germanium chloride, sulfuric acid electrolytic oxidation germanium, germanium, magnesium alloy and the reaction such as hydrochloric acid obtained by the method germane products.
It is used for chemical reagents, production of high-purity germanium, chemical vapor deposition, diffusion, amorphous silicon, epitaxy, ion implantation, and other fields.
Molecular formula. GeH4.
Molecular Weight. 76.662 (according to 2011 international relative atomic mass calculation).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
5832.3 gas trace moisture measurement GB/T Part 3. cavity ring-down spectroscopy
GB 7144 cylinders color logo
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726 helium ionization gas analysis by gas chromatography
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2011 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 Technical requirements
Quality germane shall comply with the requirements of Table 1.
Table 1 Technical Specifications
Item Index
Germane (GeH4) purity (volume fraction)/10-2 ≥ 99.999
Hydrogen (H2) content (volume fraction)/10-6 < 50
Oxygen (O2) argon (Ar) content (volume fraction)/10-6 ≤ 2
Nitrogen (N2) content (volume fraction)/10-6 ≤ 2
Carbon monoxide (CO) content (volume fraction)/10-6 ≤ 1
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