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GB/T 31986-2015: Gas for electronic industry -- Perfluoropropane
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 31986-2015 | English | 149 |
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Gas for electronic industry -- Perfluoropropane
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GB/T 31986-2015
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Basic data | Standard ID | GB/T 31986-2015 (GB/T31986-2015) | | Description (Translated English) | Gas for electronic industry -- Perfluoropropane | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 7,757 | | Date of Issue | 2015-09-11 | | Date of Implementation | 2016-05-01 | | Quoted Standard | GB 190; GB/T 3723; GB 5099; GB/T 5832.3; GB 7144; GB/T 8984; GB 14193; GB 15258; GB 16804; GB/T 26571; GB/T 28726 | | Regulation (derived from) | National Standard Announcement 2015 No.25 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This Standard specifies the technical requirements Octafluoropropane, test methods, packaging, labeling, storage and security. This Standard applies hexafluoropropylene heptafluoropropane or preparation in fluoride, and by distillation, adsorption and catalytic purification technology Octafluoropropane products, as well as carbon and fluorine direct synthesis reaction Octafluoropropane products. It is used as an etching gas or a cleaning gas in electronics industry plasma etching process. | GB/T 31986-2015: Gas for electronic industry -- Perfluoropropane---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(Electronic industrial gas octafluoropropane)
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industrial gas octafluoropropane
Issued on. 2015-09-11
2016-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
Please note that some of the content of this document may involve patents. Distribution of this document
Institutions do not assume the responsibility to identify these patents.
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. National Chemical Industrial Gases Product Quality Supervision and Inspection Center (Fujian), Zhejiang Chemical Research Institute Co.,
Foshan City, Walter Gas Co., Ltd., Suzhou Jin-Hong Gas Co., Ltd., Shanghai, love Chromatography Technology Co., Ltd., in the light of Hao
Engineering Research and Design Institute Co., Ltd., Sichuan measured standard material Technology Co., Ltd., Tianjin Changlu Watson Chemical Co., Southwest Chemical Industry Research
Design Institute Limited.
The main drafters of this standard. Lin Yuwei Chen melt, Shiwan Jun, Fang Road, Heng Yi Liao, Jin Xianghua, Sun Meng, Fang Hua, Sun Funan, Founder, Cuixue Wen,
Zhou Pengyun.
Electronic industrial gas octafluoropropane
1 Scope
This standard specifies the technical requirements Octafluoropropane, test methods, packaging, labeling, storage and security.
This standard applies hexafluoropropylene or seven fluorine propane in fluoride, and by distillation, adsorption and catalytic purification technology Octafluoropropane products,
As well as carbon and fluorine direct synthesis reaction Octafluoropropane products. It as an etching gas or cleaning in the electronics industry, plasma etching process
gas.
Molecular formula. C3F8.
Molecular Weight. 188.017 (according to 2011 international relative atomic mass).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
5832.3 gas trace moisture measurement GB/T Part 3. cavity ring-down spectroscopy
GB 7144 cylinders color logo
GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726 helium ionization gas analysis by gas chromatography
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2011 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 Technical requirements
Quality Octafluoropropane shall comply with the requirements of Table 1.
Table 1 Technical Specifications
Item Index
Octafluoropropane (C3F8) purity (volume fraction)/10-2 ≥ 99.999 99.99
(Oxygen-argon) (O2 Ar) content (volume fraction)/10-6 < 110
Nitrogen (N2) content (volume fraction)/10-6 < 520
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