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GB/T 31353-2014 English PDF

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GB/T 31353-2014: Test methods for bow of sapphire substrates
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PDF similar to GB/T 31353-2014


Standard similar to GB/T 31353-2014

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Basic data

Standard ID GB/T 31353-2014 (GB/T31353-2014)
Description (Translated English) Test methods for bow of sapphire substrates
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard H21
Classification of International Standard 77.040.99
Word Count Estimation 8,858
Date of Issue 12/31/2014
Date of Implementation 9/1/2015
Quoted Standard GB/T 2828.1; GB/T 6619; GB/T 14264
Regulation (derived from) National Standards Bulletin 2014 No. 33
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies the sapphire cutting discs, abrasive sheet, polished (hereinafter referred to as sapphire substrate sheet) Test Method curvature. This standard applies to the diameter of 50.8 mm ~ 304.8 mm, a thickness of the test piece sapphire s

GB/T 31353-2014: Test methods for bow of sapphire substrates

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Test methods for bow of sapphire substrates ICS 77.040.99 H21 National Standards of People's Republic of China Sapphire substrate sheet bend of the test method Issued on. 2014-12-31 2015-09-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. Please note that some of the content of this document may involve patents. Distribution of this document Institutions do not assume the responsibility to identify these patents. The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and National Semiconductor Equipment and Materials Standards Materials Branch of the Technical Committee (SAC/TC203/SC2) jointly proposed and managed. This standard was drafted. Jiangsu GCL soft control equipment Technology Development Co., Ltd., Shanghai Institute of Optics and Fine Mechanics, Beijing can be Sunshine New Energy Technology Co., Ltd. The main drafters of this standard. Xue against the United States, Wei Mingde, Huangxiu Kang, Hang Yin, forest fragrance, Xiao Zongjie. Sapphire substrate sheet bend of the test method

1 Scope

This standard specifies the sapphire cutting discs, abrasive sheet, polished (hereinafter referred to as sapphire substrate sheet) Test Method curvature. This standard applies to the diameter of 50.8mm ~ 304.8mm, thickness not less than 200μm testing sapphire substrate sheet curvature.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 2828.1 Sampling procedures for inspection - Part 1. by acceptance quality limit (AQL) retrieval batch inspection sampling plan GB/T 6619 wafer curvature testing methods GB/T 14264 semiconductor material terms

3 Terms and Definitions

GB/T 14264 and defined by the following terms and definitions apply to this document. 3.1 Curvature of the bow Deflected without holding the wafer in planes and in the center of the reference plane between the planes. 3.2 The median plane datum plane mediansurfacereferenceplane Designated by the wafer is less than the nominal diameter of the plane three equidistant points on the circumference of the diameter of the decision.

4 Method summary

4.1 Contact test The sapphire substrate sheet is placed on three fulcrum reference ring 3 forms a fulcrum reference plane, the use of low pressure indicator measuring displacement Sapphire substrate sheet test center distance from the reference plane, flip the substrate sheet, repeat the test. Half the difference between the two test values \u200b\u200bdenotes a substrate Curvature of the sheet. 4.2 Non-contact test The sapphire substrate sheet is placed on three reference fulcrum ring, three fulcrum formed a reference plane, the use of non-contact displacement sensor Test sapphire substrate sheet center distance from the reference plane, flip the substrate sheet, repeat the test. Half the difference between the two test values \u200b\u200brepresent Bending of the substrate sheet. 4.3 white light interferometric test Sapphire laser irradiation surface of the substrate sheet, the light reflected through the superposition of interference, the interference pattern recorded by the optical imaging system, the level of the beginning of shape Test appearance; in the Z-axis direction of the objective lens continues to move slightly, in each position thereof, the optical imaging system to collect image photographing, shaped

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