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GB/T 31058-2014: Gases for electronic industry -- Silicon tetrafluoride
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 31058-2014 | English | 169 |
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Gases for electronic industry -- Silicon tetrafluoride
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GB/T 31058-2014
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Basic data | Standard ID | GB/T 31058-2014 (GB/T31058-2014) | | Description (Translated English) | Gases for electronic industry -- Silicon tetrafluoride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 7,73 | | Date of Issue | 12/12/2014 | | Date of Implementation | 7/1/2015 | | Quoted Standard | GB 190; GB/T 3723; GB 5099; GB 7144; GB 14194; GB 15258; GB 16804; GB/T 26571; GB/T 28726-2012; GB/T 28727 | | Regulation (derived from) | National Standards Bulletin 2014 No. 30 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements for silicon tetrafluoride, test methods, marking, packaging, transportation and storage and so on. This standard applies to fluorite sulfuric acid method, hexafluorosilicate thermal decomposition method, | GB/T 31058-2014: Gases for electronic industry -- Silicon tetrafluoride---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gases for electronic industry - Silicon tetrafluoride
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industrial gas silicon tetrafluoride
Issued on. 2014-12-22
2015-07-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. Institute of Physical and Chemical Engineering of Nuclear Industry China Nuclear New Technology Development Co., Foshan City, Walter Gas Co., Ltd., Mitsubishi Electric Green
Molecular materials (Tianjin) Co., Ltd., Shanghai, love Chromatography Technology Co., Ltd., Guizhou University, Southwest Chemical Industry Research and Design Institute Limited.
The main drafters of this standard. Deng Jianping, Li to teach, Fu red cast, Tang Youlun, Cuixue Wen, Fang Hua, Tangan Jiang, Zhou Pengyun.
Electronic industrial gas silicon tetrafluoride
1 Scope
This standard specifies the technical requirements for silicon tetrafluoride, test methods, marking, packaging, transportation and storage and so on.
This standard applies to fluorite sulfuric acid method, hexafluorosilicate thermal decomposition method, direct fluorination of elemental silicon silicon tetrafluoride Prepared. It is mainly used
Electronics Industry of plasma etching, light-emitting diode P type doped silicon source ion implantation process, epitaxial deposition and diffusion of optical fiber with high purity
Raw quartz glass, is also an important raw material production of polysilicon.
Molecular formula. SiF4.
Molecular Weight. 104.0786128 (at 2009 International Atomic relative quality).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
GB 7144 cylinders color logo
GB 14194 provisions permanent gas filling
GB l5258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726-2012 helium ionization gas analysis by gas chromatography
GB/T 28727 Determination of sulfide gas analysis by gas chromatography flame photometric
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2002 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 Technical requirements
Technical requirements for silicon tetrafluoride should be in accordance with Table 1 requirements.
Table 1 Technical Specifications
Item Index
Purity silicon tetrafluoride (volume fraction)/10-2 ≥ 99.99 99.999
Hydrogen (H2) content (volume fraction)/10-6 < 21
(Oxygen-argon) (O2 Ar) content (volume fraction)/10-6 < 20 0.5
Nitrogen (N2) content (volume fraction)/10-6 < 604
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