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GB/T 14851-2025: Electronic specialty gas - Phosphine
Status: Valid GB/T 14851: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 14851-2025 | English | 199 |
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3 days [Need to translate]
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Electronic specialty gas - Phosphine
| Valid |
GB/T 14851-2025
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| GB/T 14851-2009 | English | 189 |
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3 days [Need to translate]
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Gas for electronic industry -- Phosphine
| Valid |
GB/T 14851-2009
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| GB/T 14851-1993 | English | 519 |
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4 days [Need to translate]
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Gas for electronic industry. Phosphine
| Obsolete |
GB/T 14851-1993
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PDF similar to GB/T 14851-2025
Basic data | Standard ID | GB/T 14851-2025 (GB/T14851-2025) | | Description (Translated English) | Electronic specialty gas - Phosphine | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 10,126 | | Date of Issue | 2025-03-28 | | Date of Implementation | 2025-10-01 | | Older Standard (superseded by this standard) | GB/T 14851-2009 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 14851-2025: Electronic specialty gas - Phosphine---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
GB/T 14851-2025 English version. Electronic specialty gas - Phosphine
ICS 71.100.20
CCSG86
National Standard of the People's Republic of China
Replace GB/T 14851-2009
Electronic special gas phosphine
Released on 2025-03-28
2025-10-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document replaces GB/T 14851-2009 "Phosphine gas for use in the electronics industry". Compared with GB/T 14851-2009, except for the structure
In addition to adjustments and editorial changes, the main technical changes are as follows.
--- Changed the technical requirements that phosphine should meet (see Chapter 4, Chapter 3 of the.2009 edition);
--- Added a chapter on "Sampling" (see Chapter 5);
--- Changed the determination method of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, other hydrocarbons, and arsenic content (see
6.2, 4.4, 4.5, 4.6 of the.2009 edition);
--- Added the determination method of silane and hydrogen sulfide content (see 6.2);
--- Changed the method for determining moisture content (see 6.3, 4.8 of the.2009 edition);
--- Changed the determination method of metal elements and other elements (see 6.4, 4.9 of the.2009 edition);
--- Added the determination method of germane content (see 6.5);
--- Added the method for determining particle content (see 6.6);
--- Added a chapter on "Inspection Rules" (see Chapter 7);
--- Changed the requirements for marking, packaging, transportation, storage and safety information (see Chapter 8, Chapter 5 of the.2009 edition).
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).
This document was drafted by. Southwest Chemical Research and Design Institute Co., Ltd., Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Shanghai Zhengfan Technology
Technology Co., Ltd., Guangdong Huate Gas Co., Ltd., Fujian Jiuce Gas Co., Ltd., CSIC (Handan) Perri Special
Gas Co., Ltd., Suzhou Jinhong Gas Co., Ltd., Jiangxi Huate Electronic Chemicals Co., Ltd., Hubei Heyuan Gas Co., Ltd.
Quanjiao Nanda Optoelectronic Materials Co., Ltd., Dalian Free Trade Zone Kelide Chemical Technology Development Co., Ltd., Zhejiang Provincial Institute of Standardization, Haohua
Southwest Branch of Gas Co., Ltd., Suzhou Ivite New Materials Co., Ltd., Shanghai Shennan Special Gas Co., Ltd., Shanghai Huaai Chromatography
Analysis Technology Co., Ltd., Dalian Data Gas Co., Ltd., Shanghai Fanwei Instrument Equipment Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Shanghai
Feize Technology Co., Ltd., Shanghai Institute of Metrology and Testing Technology, Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd., Zhejiang Dongkai Semiconductor Technology
Technology Co., Ltd., Heli Gas (Shanghai) Co., Ltd., Kunming Guangruida Special Gas Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd.
The company’s Wuhan Branch and Southwest Research and Design Institute of Chemical Industry Co., Ltd. Shuangliu Branch.
The main drafters of this document are. Sun Funan, Zeng Qingteng, Li Dongsheng, Fu Zhuhong, Wang Bailin, Cao Suying, He Jingyu, Sha Ting, Ni Shanshan,
Wan Juanxiu, Zhu Ming, Wang Xinxi, Sun Meng, Dai Xi, Xu Xiaotian, Fang Qiang, Sun Jian, Shi Yini, Zhao Jian, Zheng Xinquan, Chen Jie, Wu Liang, Fang Hua, Li Yang,
Yang Kang, Tang Zhongwei, Huang Hui, Shi Weifeng, Jiang Yang, Li Chunhua, Gong Bing, Wang Dawei, Yi Dawen, Li Yang, Liang Yongqiang, Liang Chengke, Gao Jing, Lai Xiaofeng,
Tan Yiling, Zhou Pengyun, Wang Ke, Xiong Zhuang.
The previous versions of this document and the documents it replaces are as follows.
---First published in.1993 as GB/T 14851-1993, first revised in.2009;
---This is the second revision.
Electronic special gas phosphine
1 Scope
This document specifies the technical requirements, sampling, test methods, inspection rules, marking, packaging, transportation, storage and safety of electronic grade phosphine.
information.
This document applies to electronic grade phosphine prepared by thermal decomposition of phosphorous acid, hydrolysis of phosphides and purification.
2 Normative references
The contents of the following documents constitute essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB 190 Dangerous Goods Packaging Marking
GB/T 3723 General safety rules for sampling of industrial chemical products
GB/T 5099 (all parts) Seamless steel gas cylinders
GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy
GB/T 7144 Color marking of gas cylinders
GB/T 14193 Regulations for filling liquefied gas cylinders
GB 15258 Provisions for the preparation of chemical safety labels
GB/T 16804 Gas Cylinder Warning Label
GB/T 26570.1 Determination of particle content in gases - Light scattering method - Part 1.Determination of particle content in pipeline gases
GB/T 26571 Specification for the storage period of special gases
GB/T 28726 Gas analysis - Helium ionization gas chromatography
GB/T 34972 Determination of metal content in gases for use in the electronics industry - Inductively coupled plasma mass spectrometry
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
TSG23 Gas Cylinder Safety Technical Regulations
3 Terms and definitions
There are no terms or definitions that require definition in this document.
4 Technical requirements
The technical requirements for phosphine shall comply with the provisions of Table 1.
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