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GB/T 29190-2012 English PDF

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GB/T 29190-2012: Measurement methods of drift rate of scanning probe microscope
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Basic data

Standard ID GB/T 29190-2012 (GB/T29190-2012)
Description (Translated English) Measurement methods of drift rate of scanning probe microscope
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard A60
Classification of International Standard 17.180.99
Word Count Estimation 20,252
Quoted Standard GB/T 15000.3; JJF 1001; JJF 1059; ISO 18115
Regulation (derived from) National Standards Bulletin No. 41 of 2012
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies the SPM drift rate terminology and definitions, abbreviations, measurement procedures, performance parameters specifications, and scanned images based on SPM drift rate measurement basic method. This standard applies to 0. 01nm/s t

GB/T 29190-2012: Measurement methods of drift rate of scanning probe microscope

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Measurement methods of drift rate of scanning probe microscope ICS 17.180.99 A60 National Standards of People's Republic of China Scanning probe microscope drift rate measurement method Issued on. 2012-12-31 2013-06-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Table of Contents

Preface Ⅰ Introduction Ⅱ 1 Scope 1 2 Normative references 1 3 Terms and definitions, abbreviations 1 4 Measurement 2 5 Requirement 2 5.1 Instrument Requirements 2 5.2 Environmental Requirements 2 6 measuring step 2 7 3 Measurement Report Appendix A (normative) image correlation analysis 4 Appendix B (normative) Characteristic Point Method 7 Annex C (normative) Non-periodic grating method 9 Annex D (informative) method atomic grating 12 Appendix E (normative) Measurement Method Comparison 14 References 15

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. Please note that some of the content of this document may involve patents. Release mechanism of the present document does not assume responsibility for the identification of these patents. This standard is proposed and interpreted by the Chinese Academy of Sciences. This standard by the National Standardization Technical Committee of nano technology (SAC/TC279) centralized. This standard was drafted. University of Science and Technology of China, Shanghai Institute of Measurement and Testing. The main drafters of this standard. Huang Wenhao, aerospace Chen, Li Yuan, Fuyun Xia, such as the Chu family, Jia-wen, Newton, Zhu Wulin, Liu.

Introduction

Scanning probe microscopy (ScanningProbeMicroscope, hereinafter referred to as SPM) nano science and technology in the main tool of one. For SPM having nanometer or even atomic-scale resolution, which is stability with time and instrument design, operation and use of the environment is closely Related. As SPM important specifications, the size of the drift rate is directly related to performance of SPM. For example, distortion-free image Continuous acquisition, sample local physicochemical properties measurement, real-time observation of the sample surface dynamics, micro-nano assembly and manipulation. In addition, the drift The size of the rate for the evaluation of the instrument also has an important guiding significance. Currently, many SPM configuration drift compensation module or closed-loop control module; do Tube drift rate greatly reduced, but the drift persists. Therefore, SPM and drift rate measurements in the definition of x, y and z directions of drift rate Standardized methods has important significance. This standard gives the SPM drift velocity in x, y and z direction of the measurement method, in order to drift in the instrument manufacturer specifications Data to help users characterize the instrument drift. Scanning probe microscope drift rate measurement method

1 Scope

This standard specifies the terms and definitions SPM drift rate, abbreviations, measurement procedures, performance parameter specifications, and SPM-based scanning The drift rate of the image of the basic methods of measurement. This standard applies to 0.01nm/s to drift rate 10nm/s measurements. This standard does not apply to wander measurement image correction.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 15000.3 standard for the work of (3) the general principles of the standard sample value and statistical methods; JJF1001 common measurement terms and definitions; JJF1059 Evaluation and Expression of Uncertainty in Measurement (ISO GUM.1995, IDT); ISO 18115 Surface chemical analysis noun, Part 2. scanning probe microscopy applicable term (Surfacechemical analysis-Vocabulary-Part 2. Termsusedinscanning-probemicroscopy). 3 Terms and definitions, abbreviations GB/T 20000.1 and the following definition of terms and definitions, abbreviations apply to this document. 3.1 Terms and Definitions 3.1.1 Drift drift SPM instrument probe relative to the deviation of the actual position and the set position of the sample. Note. All parameter settings are likely to drift, such as x, y, z displacement direction of the laser spot position on the cantilever, the optical near-field scanning optical microscope Source strength. This standard, the drift is defined as the x, y and z directions, the probe relative to the sample is set to change the location. 3.1.2 Drift rate driftrate Drift with the time interval than a certain time interval. Note 1. The time interval is usually chosen as the adjacent images obtained by scanning continuously between. Note 2. The drift rate can be given as a drift rate x, y and z directions, or corresponding synthetic vector magnitude. 3.1.3 Set time settlingtime From the point of the selected area of \u200b\u200bthe sample to be measured or the sample begins to wander measurement interval. NOTE. Set the time usually selected for 5min ~ 60min. 3.2 Acronyms The following abbreviations apply to this document.

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