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Measurement methods of drift rate of scanning probe microscope
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GB/T 29190-2012
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Basic data | Standard ID | GB/T 29190-2012 (GB/T29190-2012) | | Description (Translated English) | Measurement methods of drift rate of scanning probe microscope | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | A60 | | Classification of International Standard | 17.180.99 | | Word Count Estimation | 20,252 | | Quoted Standard | GB/T 15000.3; JJF 1001; JJF 1059; ISO 18115 | | Regulation (derived from) | National Standards Bulletin No. 41 of 2012 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the SPM drift rate terminology and definitions, abbreviations, measurement procedures, performance parameters specifications, and scanned images based on SPM drift rate measurement basic method. This standard applies to 0. 01nm/s t |
GB/T 29190-2012: Measurement methods of drift rate of scanning probe microscope---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Measurement methods of drift rate of scanning probe microscope
ICS 17.180.99
A60
National Standards of People's Republic of China
Scanning probe microscope drift rate measurement method
Issued on. 2012-12-31
2013-06-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Preface Ⅰ
Introduction Ⅱ
1 Scope 1
2 Normative references 1
3 Terms and definitions, abbreviations 1
4 Measurement 2
5 Requirement 2
5.1 Instrument Requirements 2
5.2 Environmental Requirements 2
6 measuring step 2
7 3 Measurement Report
Appendix A (normative) image correlation analysis 4
Appendix B (normative) Characteristic Point Method 7
Annex C (normative) Non-periodic grating method 9
Annex D (informative) method atomic grating 12
Appendix E (normative) Measurement Method Comparison 14
References 15
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
Please note that some of the content of this document may involve patents. Release mechanism of the present document does not assume responsibility for the identification of these patents.
This standard is proposed and interpreted by the Chinese Academy of Sciences.
This standard by the National Standardization Technical Committee of nano technology (SAC/TC279) centralized.
This standard was drafted. University of Science and Technology of China, Shanghai Institute of Measurement and Testing.
The main drafters of this standard. Huang Wenhao, aerospace Chen, Li Yuan, Fuyun Xia, such as the Chu family, Jia-wen, Newton, Zhu Wulin, Liu.
Introduction
Scanning probe microscopy (ScanningProbeMicroscope, hereinafter referred to as SPM) nano science and technology in the main tool of
one. For SPM having nanometer or even atomic-scale resolution, which is stability with time and instrument design, operation and use of the environment is closely
Related. As SPM important specifications, the size of the drift rate is directly related to performance of SPM. For example, distortion-free image
Continuous acquisition, sample local physicochemical properties measurement, real-time observation of the sample surface dynamics, micro-nano assembly and manipulation. In addition, the drift
The size of the rate for the evaluation of the instrument also has an important guiding significance. Currently, many SPM configuration drift compensation module or closed-loop control module; do
Tube drift rate greatly reduced, but the drift persists. Therefore, SPM and drift rate measurements in the definition of x, y and z directions of drift rate
Standardized methods has important significance.
This standard gives the SPM drift velocity in x, y and z direction of the measurement method, in order to drift in the instrument manufacturer specifications
Data to help users characterize the instrument drift.
Scanning probe microscope drift rate measurement method
1 Scope
This standard specifies the terms and definitions SPM drift rate, abbreviations, measurement procedures, performance parameter specifications, and SPM-based scanning
The drift rate of the image of the basic methods of measurement.
This standard applies to 0.01nm/s to drift rate 10nm/s measurements. This standard does not apply to wander measurement image correction.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 15000.3 standard for the work of (3) the general principles of the standard sample value and statistical methods;
JJF1001 common measurement terms and definitions;
JJF1059 Evaluation and Expression of Uncertainty in Measurement (ISO GUM.1995, IDT);
ISO 18115 Surface chemical analysis noun, Part 2. scanning probe microscopy applicable term (Surfacechemical
analysis-Vocabulary-Part 2. Termsusedinscanning-probemicroscopy).
3 Terms and definitions, abbreviations
GB/T 20000.1 and the following definition of terms and definitions, abbreviations apply to this document.
3.1 Terms and Definitions
3.1.1
Drift drift
SPM instrument probe relative to the deviation of the actual position and the set position of the sample.
Note. All parameter settings are likely to drift, such as x, y, z displacement direction of the laser spot position on the cantilever, the optical near-field scanning optical microscope
Source strength. This standard, the drift is defined as the x, y and z directions, the probe relative to the sample is set to change the location.
3.1.2
Drift rate driftrate
Drift with the time interval than a certain time interval.
Note 1. The time interval is usually chosen as the adjacent images obtained by scanning continuously between.
Note 2. The drift rate can be given as a drift rate x, y and z directions, or corresponding synthetic vector magnitude.
3.1.3
Set time settlingtime
From the point of the selected area of \u200b\u200bthe sample to be measured or the sample begins to wander measurement interval.
NOTE. Set the time usually selected for 5min ~ 60min.
3.2 Acronyms
The following abbreviations apply to this document.
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