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GB/T 25915.9-2018: Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration
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Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration
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GB/T 25915.9-2018
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Basic data | Standard ID | GB/T 25915.9-2018 (GB/T25915.9-2018) | | Description (Translated English) | Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | C70 | | Classification of International Standard | 13.040.35 | | Word Count Estimation | 26,287 | | Date of Issue | 2018-06-07 | | Date of Implementation | 2018-10-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 25915.9-2018: Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration
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Cleanrooms and associated controlled environments--Part 9. Classification of surface cleanliness by particle concentration
ICS 13.040.35
C70
National Standards of People's Republic of China
Clean room and related controlled environment
Part 9. Classification of surface cleanliness by particle concentration
Part 9. Classificationofsurfacecleanlinessbyparticleconcentration
(ISO 14644-9.2012, IDT)
Published on.2018-06-07
2018-10-01 implementation
State market supervision and administration
China National Standardization Administration issued
Content
Foreword III
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and Definitions 1
4 Abbreviations 2
5 grading system 2
6 Confirmation of conformity 5
Appendix A (informative) Surface Characteristics 7
Appendix B (informative) Specific particle size range descriptor 10
Appendix C (informative) Parameters affecting SCP grading 12
Appendix D (informative) Determination of surface cleanliness by particle concentration 14
Reference 21
Foreword
GB/T 25915 "Clean Room and Related Controlled Environment" contains 10 parts.
--- Part 1. Classification of air cleanliness by particle concentration;
--- Part 2. Confirmation of continuous monitoring and periodic testing technical conditions in accordance with GB/T 25915.1;
--- Part 3. Detection methods;
--- Part 4. Design, construction and start-up;
--- Part 5. Operation;
--- Part 6. Vocabulary;
--- Part 7. Isolation devices (clean hoods, glove boxes, isolators, micro-environments);
--- Part 8. Classification of air cleanliness by chemical concentration;
---Part 9. Classification of surface cleanliness by particle concentration;
--- Part 10. Classification of surface cleanliness by chemical concentration.
This part is the ninth part of GB/T 25915.
This part is drafted in accordance with the rules given in GB/T 1.1-2009.
This section uses the translation method equivalent to ISO 14644-9.2012 "Clean rooms and related controlled environments Part 9. by particle concentration
Sub-surface cleanliness level.
This part is proposed and managed by the National Cleanroom and Related Controlled Environment Standardization Technical Committee (SAC/TC319).
This section was drafted by. Zhongtian Daocheng (Suzhou) Clean Technology Co., Ltd., Shenzhen Jilong Clean Technology Co., Ltd., Suzhou Antaikong
Gas Technology Co., Ltd., Suzhou Industrial Park Jiahe Environmental Technology Engineering Co., Ltd., Suzhou Purification Engineering Installation Co., Ltd., China Electronics
Cheng Design Institute, China Power Investment Engineering Research and Testing Center, China Electronics Society Clean Technology Branch, Shenzhen Yitian Purification Technology Co., Ltd.
Beijing Shiyuan Xida Engineering Technology Co., Ltd., China Engineering Physics Research Institute, Shenzhen Xinke Special Decoration Engineering Company.
The main drafters of this section. Jiang Yan, Yin Xiaodong, Wang Daqian, Huang Jihui, Jin Zhen, Yuan Xiaodong, Jiang Naijun, Wang Wei, Zhang Liqun, Xia Qunyan,
Su Gangmin, Wu Xiaoyuan, Shi Xiaolei, and Yan Shaotong.
Introduction
The clean room and associated controlled environment provide pollution control at the level applicable to contamination-sensitive operations. Benefit from pollution control
Products and processes include aerospace, microelectronics, optics, nuclear energy and life sciences (pharmaceutical, medical devices, food, medical) and other industries.
GB/T 25915.1-2010~ GB/T 25915.8-2010 is specifically for suspended particles and chemical pollution,
GB/T 25916.1-2010 and GB/T 25916.2-2010 are for biological contamination. Designed in clean rooms and other controlled environments,
In addition to surface cleanliness grading, many factors should be considered in technical conditions, operation and control. These factors are in GB/T 25915 and
A detailed description is provided in other parts of GB/T 25916.
This section refers to the classification of surface cleanliness by measuring the particle concentration. This section also lists the steps for determining the surface particle concentration and
Some test methods.
If the regulatory body has relevant regulations or guidelines, the test procedures can be modified as appropriate.
Clean room and related controlled environment
Part 9. Classification of surface cleanliness by particle concentration
1 Scope
This part of GB/T 25915 clarifies the solid surface cleanliness by particle concentration in clean rooms and related controlled environments.
level. Information on surface characteristics and recommended methods of detection and measurement are given in Appendix A~Appendix D.
This section applies to all solid surfaces in clean rooms and related controlled environments, such as walls, ceilings, floors, production environments, tools, equipment.
And products. The surface cleanliness level (SCP) classified by particle concentration is limited to particles having a particle diameter of 0.05 μm to 500 μm.
This section does not consider the following.
---Specific process cleanliness and suitability requirements;
--- Surface cleaning steps;
---Material characteristics;
--- Matters involving mutual bonding or usually related to time and process;
--- Selection and use of grading and testing statistical methods;
--- Other characteristics of particles, such as electrostatic charge, ionic charge, microorganisms and so on.
2 Normative references
The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this article.
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 25915.6-2010 Clean rooms and related controlled environments - Part 6. Vocabulary (ISO 14644-6.2007, IDT)
3 Terms and definitions
The following terms and definitions as defined in GB/T 25915.6-2010 apply to this document.
3.1
Specific particle size range descriptor descriptorforspecificparticlesizeranges
A descriptor that distinguishes SCP levels for a specific particle size range.
Note. This descriptor can be used for particle sizes that are of particular interest or outside the classification system and can be stated separately or as a supplement to the SCP level.
3.2
Direct measurement method directmeasurementmethod
There is no intermediate step to measure the contamination method.
3.3
Indirect measurement method indirectmeasurementmethod
A method of measuring pollution with an intermediate step.
3.4
Solid surface solidsurface
The interface between the solid and the other phase.
3.5
Surface particle surfaceparticle
A solid or liquid substance that is discretely distributed and adheres to a surface of interest, excluding film-like materials that cover the entire surface.
Note. Surface particles are particles that adhere by chemical and/or physical interactions.
3.6
Surface cleanliness surfacecleanlinessbyparticleconcentration; SCP
The condition of the surface particle concentration.
Note. Surface cleanliness is determined by the material and type characteristics, various stress loads (the complexity of the load acting on the surface), and the prevailing environmental conditions and
Other factors are determined.
3.7
Surface cleanliness level surfacecleanlinessbyparticleconcentrationclass
SCP level SCPclass
The surface per square meter is concerned with the level of maximum allowable value of particle size particle concentration (SCP1 to 8).
3.8
Surface cleanliness grading surfacecleanlinessbyparticleconcentrationclassification
SCP classification SCPclassification
The maximum allowable concentration (or process for determining the level) of surface particles representing the particle size of interest per square meter expressed in ISO SCPN level.
3.9
Surface particle concentration
The number of discrete particles per unit area of the surface area of interest.
4 Abbreviations
The following abbreviations apply to this document.
AFM. atomic force microscopy (atomicforcemicroscopy)
CNC. Condensation Nuclear Counter (condensationnucleuscounter)
EDX. energy dispersive X-ray spectroscopy (energydispersive X-rayspectroscopy)
ESCA. Electron spectroscopy for chemical analysis
IR. infrared (absorption spectroscopy) [infrared (absorptionspectroscopy)]
OPC. Optical Particle Counter (optical particle counter)
PET. polyethylene terephthalate (polyethylene terephthalate)
SCP. Surface cleanliness by particle concentration
SEM. scanning electron microscopy (scanningelectronmicroscopy)
UV. ultraviolet (spectroscopy) [ultraviolet (spectroscopy)]
WDX. Wavelength-dispersive X-ray spectroscopy
5 grading system
5.1 ISO -SCP classification formula
In the clean room and related controlled environments, the surface cleanliness level (SCP) by particle concentration is expressed by the level number N, which is
The maximum allowable concentration of particles of the particle size of interest on the surface is determined. N is determined by the formula (1), which represents a particle of interest (D) particle per square
The maximum total concentration allowed for the rice surface. CSCP; D.
CSCP; D=k
10N
(1)
In the formula.
CSCP; D---the maximum allowable total concentration of particles per square meter greater than or equal to the particle size of interest, CSCP; D reserved no more than 3
Non-zero significant digits, rounded to the nearest integer;
N --- SCP grading numbers, limited to SCP1 ~ SCP8; SCP grading number N corresponds to micron
Measured particle size D;
Note. N represents the base 10 index of the particle concentration of the reference particle size of 1 μm.
D --- focus on particle size in micrometers (μm);
k --- constant 1, in micrometers (μm).
Note 1. Due to the dynamic nature of particle generation and transmission, the SCP rating based on particle concentration is a time- and process-dependent value.
Note 2. Due to the complexity of statistical evaluation and numerous reference materials, the selection and application of grading and testing statistical methods are not described in this part of GB/T 25915.
The concentration CSCP;D derived according to formula (1) should be used as the determined value. Table 1 shows the selected SCP level and particle size of interest.
The maximum allowable concentration of the surface.
Table 1 SCP grade units selected for clean rooms and related controlled environments are the number of particles per square meter.
SCP level
Particle size
≥0.05μm ≥0.1μm ≥0.5μm ≥1μm ≥5μm ≥10μm ≥50μm ≥100μm ≥500μm
SCP1 level (200) 100 20 (10)
SCP2 (2000) 1000.200 100 (20) (10)
SCP3 (20000) 10000.2000 1000 (200) (100)
SCP Level 4 (200000) 100000.20000 10000.2000 1000 (200) (100)
SCP5 level 1000000.200000 100000.20000 10000.2000 1000 (200)
SCP6 level (10000000).2000000 1000000.200000 100000.20000 10000.2000
SCP7 level 100000002000000 1000000.200000 10000.20000
SCP8 level 100000002000000 1000000.200000
The values in the table are particle concentrations greater than or equal to the particle size of interest per square meter of surface and SCP rating (CSCP; D).
The numbers in parentheses, the corresponding particle size is not suitable for classification; other particle sizes are selected for classification.
The minimum area used for the test should be statistically representative of the surface of interest.
Note. For lower SCP level grading, there are a large number of measurements to establish valid values.
Description.
X --- focus on particle size, D (μm);
Y --- particle concentration of particle size ≥ D on the surface, CSCP; D (pieces/m2);
1 --- SCP1 level;
2 --- SCP2 level;
3 --- SCP3 level;
4 --- SCP4 level;
5 --- SCP5 level;
6 --- SCP6 level;
7 --- SCP7 level;
8 --- SCP level 8.
Figure 1 SCP rating
The hierarchical solid line on Figure 1 is for grading and the dashed line is not for grading.
Note. The particle distribution on the surface is generally not normally distributed, but is affected by various factors such as roughness, porosity, electrostatic charge, sedimentation mechanism, etc.
See Appendix A).
Example. SCP level 5 (1 μm) means that there may be up to 105 particles with a particle size of ≥ 1 μm (D = 1) per square meter of surface. SCP
Grade 5 (10 μm) means that there may be up to 104 particles having a particle size of ≥10 μm (D=10) per square meter per square meter of surface. Measured
Any other particles of particle size (D = x), such as concentrations below the corresponding SCP level, are at SCP level 5 (xμm)
Within the standard.
Descriptors can be used when the particle size is outside the classification system, or when focusing only on a narrow particle size range and individual particle sizes (see Appendix B).
5.2 Representation method
The SCP level is expressed as follows. SCPN level (Dμm).
The representation of the clean room and related controlled environment SCP levels should also include the following.
a) the type of surface being measured;
b) the area of the surface being measured;
c) The measurement method used.
Details of the measurement methods used, including sampling techniques and measuring devices, should be included in the test report.
The particle size of attention should be agreed between the purchaser and the supplier.
The grading of the SCP is illustrated by the diameter of the measured particles.
Example 1 SCP2 grade (0.1 μm); wafer or glass substrate, surface area 310 cm2; surface particle counter.
Example 2 SCP grade 5 (0.5 μm); inner wall of the bottle, surface area.200 cm 2 ; liquid diffusion - liquid particle counter.
5.3 General information on surface cleanliness by particle concentration
The concentration of airborne particles is generally related to the concentration of surface particles. The relationship is determined by many factors, such as airflow turbulence, settlement
Surface properties such as amount, settling time, settling velocity, concentration in air, and electrostatic charge (see A.2.4). To measure the surface by particle concentration
Cleanliness should take into account the various parameters affecting the test (see Appendix C) and surface characteristics (see Appendix A).
6 Confirmation of conformity
6.1 Overview
Compliance with the requirements of the SCP level agreed upon by the acquirer is to be tested and provided with reports of test conditions and test results.
The details confirming its conformity (see 6.3) are to be agreed between the acquirer and the supplier prior to testing.
6.2 Testing
Compliance verification tests should be performed in a controlled environment using calibrated instruments and applicable test methods.
The direct and indirect test methods given in Appendix D can be used to confirm compliance. The common test methods described in the catalog are not all.
It is agreed that other methods with equivalent accuracy can be used.
Note. Even the correct application of different measurement methods will produce different results, and their effectiveness is the same.
Repeated measurements are recommended.
The test method and test environment shall be agreed between the purchaser and the supplier.
Since the electrostatic charge will increase the sedimentation of the particles to the surface, measures should be taken in advance to reduce the electrostatic charge around the test area, such as the surface is non-conductive.
Electrostatic, ungrounded or neutralized charges can generate electrostatic charges (see Appendix A). This may change the test results.
6.3 Test report
The test results for each surface are to be recorded and submitted in the form of a comprehensive report indicating that they are consistent with the specified SCP level or not
symbol. The test report must include at least the following.
a) Basic data.
--- Test date and time.
---The name and address of the test unit.
--- Tester's name.
b) Referenced documents.
---standard.
---guide.
---Regulations.
c) Environmental data.
--- Sampling environmental conditions (ie temperature, humidity, cleanliness).
--- Environmental conditions (ie temperature, humidity, cleanliness) at the time of measurement (not necessary for direct method).
---Measure the location (room, etc.).
d) Sample.
--- Clear identification of test objects.
--- Description of the test object.
--- Test the pattern and sketch of the sample.
e) Test plan.
--- Photos and/or sketches explaining the test plan.
--- Description of the operating parameters.
--- Description of the measurement point.
--- Description of the hardware used.
f) Measuring device.
--- Instruments and devices and current calibration certificates.
---Measuring range.
--- Description of the calibration certificate.
g) Test.
--- Relevant details of the test methods used, as well as a description of the available data for the deviation test method (eg agreed).
--- Surface conditions before sampling (such as after cleaning, after packaging, in an atmospheric or vacuum environment).
---Specified detection and measurement steps/methods.
--- Occupancy status during sampling and measurement.
---Specified test methods.
---All agreed documents (such as raw data, background particle concentration, images, graphics, cleaning and packaging).
--- Sampling duration, location and location (not required for direct method).
---Measure duration, location and location (required for direct method).
--- Notable observations during sampling (measurement) (if applicable).
--- The number of measurements taken.
--- The clear location and area of the surface being measured, and indicate the specific coordinates of the surface.
h) Results and analysis.
--- If applicable, visually inspect the surface to be measured before and after measurement.
---Measured values and analysis of measured values.
---Data quality description.
--- Focus on the particle size range.
--- The results of all tests performed, including particle size data for a given particle size.
--- Surface cleanliness by particle concentration level, expressed in SCPN level.
--- Acceptance criteria for clean surfaces, such as the demand side and the supplier have agreed.
Appendix A
(informative appendix)
Surface characteristics
A.1 Description of the surface
Determining surface properties is generally based on surface texture (such as roughness, porosity), mechanical properties (such as hardness), and physicochemical properties (such as
Surface electrostatic charge and surface tension). After considering each characteristic, select the surface cleanliness grading test method, or as a test knot
Auxiliary instructions for the fruit.
A.2 Surface characteristics
A.2.1 Roughness
A.2.1.1 Description
Surface roughness has an effect on many physical properties of the surface. Surface roughness is not easily described by a single parameter, nor is it surface solid.
Has characteristics. Roughness exists in two basic planes. a plane at right angles to the surface, the characteristics of which can be described by height; the plane in which the surface lies,
For "texture", its characteristics are described by waviness. The surface roughness can be determined mechanically or optically.
A.2.1.2 Testing
A common mechanical method for determining roughness is to use a stylus instrument (see, for example, ISO 4287 or GB/T 10610-2009/
ISO 4288.1996).
A common optical method for determining roughness and porous surface structures is microscopy (optical, confocal, interferometric, with or without tunneling)
Should, beveled section).
A.2.2 Porosity
A.2.2.1 Definition and description
Porosity is a measure of the hollow space within a material and is expressed as a fraction between 0 and 1, or a percentage between 0% and 100%.
---Efficient porosity (also known as open porosity) is the volume of the total volume in which the fluid can effectively flow (excluding
The ratio of voids or voids that are not connected at one end to the total volume.
--- Large pores refer to pores having a diameter greater than or equal to 50 nm. Fluid flow through the macropores is described by bulk phase diffusion.
--- Mesopores refer to pores having a diameter greater than or equal to 2 nm but less than 50 nm.
---Microporous means a pore having a diameter of less than 2 nm. The movement in the micropores is active diffusion.
A.2.2.2 Testing
There are several estimation methods for the porosity of a given material or a mixed material called a material matrix.
The volume/density method is fast and accurate (generally within ±2% of the actual porosity). Measuring the volume and quality of materials, using materials
Dividing the mass by the material density gives the volume that the material should occupy after subtracting the volume of the hole. Therefore, the volume of the hole is equal to the total volume minus the material
The volume of the material, or directly expressed as. (pore volume) = (total volume) - (material volume).
The water saturation method is a bit more difficult, but more accurate and more direct. Take a known volume of material and a known volume of water. Slowly pour the material into the water
In the process, the material is saturated. Allow the material to soak in water for a few hours to ensure that the material is fully saturated. Then the remaining will not be saturated
The water is poured from the upper part of the bucket and its volume is measured. The volume of the original water in the bucket minus the volume of the remaining water is the volume of the hole, or directly stated
To be. (pore volume) = (total volume of water) - (volume of remaining water).
The mercury intrusion method (mercury porosimeter) requires the sample to be placed in a special filling device that can empty the sample, followed by the introduction of liquid mercury. Retest
The size of the mercury pack as a function of the applied pressure. The greater the applied pressure, the smaller the holes that mercury can enter. In general, this kind of party
The method is used for a pore size range of 300 μm to 0.0035 μm. Because of concerns about the safety of mercury, it has been developed
Several non-mercury indentation techniques should be considered as an alternative.
Nitrogen adsorption is used to determine the fine porosity in the material. Nitrogen gas can be condensed on the walls of the pores having a pore diameter of less than 0.090 μm. The condensation
The amount can be measured by volume or mass.
A.2.3 Hardness
There are many national and international standards for measuring the hardness of various types of materials. Hardness measurement often takes the penetration of a spherical or needle-shaped diamond, hard
The indentation of the object or the rebound characteristics of the impactor is indicated.
ASTME 18-07 has a Rockwell method, a Brinell method, a Shore method, and a Vickers method for measuring the hardness of a metal. At the beginning of the test, according to the sample
Thickness, metal composition and expected hardness, choose geometry and pressure.
A.2.4 Static electricity
A.2.4.1 Definition and description
Static electricity is defined as the charge generated by electron imbalance on the surface of a material. The electrostatic field generated by this electronic imbalance will affect the object
Determination of the cleanliness of the body surface. Electrostatic discharge (ESD) is defined as the transfer of charge between objects with different potentials.
Any relative motion and physical separation of the material, or the flow of solids, liquids, or gases carrying particles, can generate electrostatic charges.
Common sources of electrostatic discharge (ESD) include articles made from humans, common polymeric materials, and processing equipment. Direct contact with static power
A raw ESD, or an ESD that occurs due to an electric field from a charged object, can damage parts.
A charged surface attracts and captures particulate contaminants. If the selected surface cleanliness method is determined for surface particles (see D.2.3.3.5)
If the test is connected, the measurement result may be inaccurate due to insufficient particle peeling. Therefore, measures should be taken to reduce the ESD effect and adopt indirect
This is especially true when measuring.
A.2.4.2 Testing
Determining the ESD characteristics of the sample surface or helping to assess its effect on surface particle stripping efficiency (eg IEC 61340-5-1,
ISO 10015, IESTRP-CC022.2, SEMIE 43-0301, SEMIE 78-0706).
A.2.5 Surface tension
A.2.5.1 Definition
Surface tension is the energy required to add a surface area unit. Usually defined as γ, expressed in coke per square meter (J/m2), or cattle per
Rice (N/m) is indicated.
A.2.5.2 Testing
The most famous method is to measure the contact angle using the "droplet method" (see [22] in the...
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