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GB/T 25915.10-2021: Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
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GB/T 25915.10-2021
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Basic data | Standard ID | GB/T 25915.10-2021 (GB/T25915.10-2021) | | Description (Translated English) | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | C70 | | Word Count Estimation | 30,332 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 25915.10-2021: Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
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Cleanrooms and associated controlled environments - Part 10.Classification of surface cleanliness by chemical concentration
ICS 13.040.35
CCSC70
National Standards of People's Republic of China
Clean room and related controlled environment Part 10.
Classification of surface cleanliness grades according to chemical concentration
(ISO 14644-10.2013, IDT)
Released on 2021-08-20
2022-03-01 implementation
State Administration of Market Supervision and Administration
Issued by the National Standardization Management Committee
Table of contents
Foreword Ⅲ
Introduction Ⅳ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Rating 2
5 Surface cleanliness inspection/measurement, monitoring and conformity certification of chemical pollution 4
Appendix A (Informative) Conversion of various concentrations of surface chemicals 6
Appendix B (informative) Factors affecting the test and results 12
Appendix C (informative) Basic elements of cleanliness assessment 13
Appendix D (informative) Method of testing surface cleanliness by chemical concentration 14
Appendix E (Informative) Test Report 23
References 24
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
This document is part 10 of GB/T 25915 "Clean Room and Related Controlled Environment". GB/T 25915 has released the following
part.
---Part 1.Classify air cleanliness according to particle concentration;
---Part 2.Monitoring of air particle concentration in clean rooms;
---Part 3.Detection method;
---Part 4.Design, construction, start-up;
---Part 5.Operation;
---Part 6.Vocabulary;
---Part 7.Isolation device (clean wind hood, glove box, isolator, microenvironment);
---Part 8.Classification of air cleanliness (ACC) grades according to chemical concentration;
---Part 9.Classification of surface cleanliness grades according to particle concentration;
---Part 10.Classification of surface cleanliness grades according to chemical concentration;
---Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air.
This document is equivalent to ISO 14644-10.2013 "Cleanrooms and related controlled environments Part 10.Division of surfaces by chemical concentration
Cleanliness class".
Please note that some of the contents of this document may involve patents. The issuing agency of this document is not responsible for identifying patents.
This document was proposed and managed by the National Standardization Technical Committee for Cleanrooms and Related Controlled Environments (SAC/TC319).
Drafting organizations of this document. Laser Fusion Research Center of China Academy of Engineering Physics, Shenzhen Jilong Clean Technology Co., Ltd., Suzhou City
Metrology and Testing Institute, China Electronic System Engineering Second Construction Co., Ltd., Suzhou Hongyuan Purification Technology Co., Ltd., Shaanxi Zhongdian Jingtai Electronic Engineering
Cheng Co., Ltd., Suzhou Antai Air Technology Co., Ltd., Yantai Baoyuan Purification Co., Ltd., Shenzhen Lifeng Purification Engineering Co., Ltd., China
Standardization Association, China National Accreditation Center for Conformity Assessment, Shanghai Indoor Environmental Purification Industry Association, Shanghai Fengshen Environmental Equipment Engineering Co., Ltd.
The company, Wuxi Hanjia Medical Technology Co., Ltd., Shanghai Haoze Norui Air Purification Technology Co., Ltd., and Maomeng (Shanghai) Engineering Technology Co., Ltd.
Limited company.
The main drafters of this document. Yuan Xiaodong, Huang Jihui, Zhang Xiuchun, Hou Yi, Sun Yucheng, Miao Xinxiang, Fan Guofeng, Shi Hongping, Wang Daqian,
Bing Shaotong, Jin Zhen, Tong Guangcai, Xia Weijia, Lu Haibing, Wang Fang, Cui Yan, Yang Yuntao, Chen Hanqing, Yan Caiping, Chen Jingjing, Yuan Youhua, Tao Qingbao.
Introduction
GB/T 25915 adopts the ISO 14644 series of international standards, and the settings of each part are consistent with the international standards. It is planned to consist of 15 parts
constitute.
---Part 1.Classify air cleanliness according to particle concentration. The purpose is to distinguish the degree of particle contamination.
---Part 2.Monitoring of air particle concentration in clean room. The purpose is to guide the monitoring of particle pollution to avoid possible pollution
risk.
---Part 3.Detection method. The purpose is to guide the detection of various pollution and related environmental elements in the clean room.
---Part 4.Design, construction, and start-up. The purpose is to guide the design, construction and start-up of the clean room.
---Part 5.Run. The purpose is to guide the operation of the clean room.
---Part 6.Vocabulary. The purpose is to unify and standardize technical terminology.
---Part 7.Isolation device (clean wind hood, glove box, isolator, microenvironment). The purpose is to propose the basis of isolation device for clean room
This requirement.
---Part 8.Classify air cleanliness (ACC) according to chemical concentration. The purpose is to distinguish the degree of air chemical pollution.
---Part 9.Classification of surface cleanliness grades according to particle concentration. The purpose is to distinguish the degree of particle contamination on the surface.
---Part 10.Classification of surface cleanliness grades according to chemical concentration. The purpose is to distinguish the degree of chemical contamination on the surface.
---Part 12.Technical requirements for monitoring the concentration of nanoparticles in the air. The purpose is to propose the detection of nano-level particle pollution
Require.
---Part 13.Surface cleaning that meets the requirements of particle and chemical cleanliness. The purpose is to put forward the cleaning requirements for the surface of the clean room to
Avoid the risk of particles and chemical contamination that may be produced.
---Part 14.Evaluate the applicability of the equipment according to the concentration of particle pollution. The purpose is to pass the related equipment that may produce particles in the clean room
Contamination test to determine the suitability of the equipment.
---Part 15.Evaluate the suitability of equipment and materials according to the concentration of chemical pollutants. The purpose is to pass the cleanliness of related equipment
Testing of chemical contamination in the room to determine the suitability of the equipment.
---Part 16.Improving the energy efficiency of clean rooms and air purification devices. The purpose is to save the energy consumption of clean room operation.
This document is based on Part 8 to further determine the classification method of surface molecular pollutants. Since molecular pollutants are usually
Under the circumstances, it exists in many forms (including molecules, ions, atoms, particles, etc.) on the surface of contaminated components, which is difficult to characterize by size and quantity.
This document uses the quality of pollutants per unit area as the basis for dividing surface cleanliness. At the same time, considering that some application
State pollution is very sensitive, and the allowable amount of surface pollutants is very small. Therefore, for extremely low concentrations, molecules, atoms, and atoms per unit area are used.
It is expressed by the number of ions, and the conversion formula of atomic concentration is also given.
Clean room and related controlled environment Part 10.
Classification of surface cleanliness grades according to chemical concentration
1 Scope
This document defines the surface cleanliness of the presence of relevant compounds or chemical substances (including molecules, ions, atoms, and particles) in a clean room.
Clarity grading system.
This document applies to all surfaces in clean rooms and related controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and
Device.
Note 1.This document only considers the chemical properties of microparticles, and does not consider the physical properties of microparticles. This document does not cover the interaction between contaminants and surfaces.
Note 2.This document does not involve the process of pollution generation, and does not involve time-related influencing factors (sedimentation, sedimentation, aging, etc.) and process-related activities
(Such as transfer, processing, etc.), nor does it involve statistical quality control technical guidelines to ensure compliance.
2 Normative references
The contents of the following documents constitute the indispensable clauses of this document through normative references in the text. Among them, dated quotations
Only the version corresponding to that date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
This document.
GB/T 25915.6 Clean room and related controlled environment Part 6.Vocabulary (GB/T 25915-2010, ISO 14644-6.2007,
IDT)
Note. ISO 14644-6.2007 has been abolished, and my country still retains the corresponding national standard.
3 Terms and definitions
The following terms and definitions defined in GB/T 25915.6 apply to this document.
3.1
Classified by chemical concentration air cleanliness aircleanlinessbychemicalconcentration; ACC
The maximum allowable concentration of a given chemical substance or group of chemical substances is expressed in ISO -ACCN grade, and the unit is grams per cubic meter (g/m3).
Note. This definition does not include biological macromolecules, biological macromolecules are regarded as microparticles.
3.2
Contaminantcategory
A collective term for a group of compounds that have specific and similar hazards when deposited on a surface of interest.
3.3
Chemical contamination
Chemical substances (non-fine particles) that are harmful to products, processes, or equipment.
3.4
Solid surface
The interface between the solid phase and another phase.
3.5
Surface
The interface between the two phases.
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