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GB/T 25898-2010 English PDF

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GB/T 25898-2010: Instrumented nanoindentation test -- Indentation hardness and modulus of thin film
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Basic data

Standard ID GB/T 25898-2010 (GB/T25898-2010)
Description (Translated English) Instrumented nanoindentation test -- Indentation hardness and modulus of thin film
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard A42
Classification of International Standard 19.06
Word Count Estimation 16,136
Date of Issue 1/10/2011
Date of Implementation 5/1/2011
Quoted Standard GB/T 22458-2008; GB/T 21838.4-2008
Regulation (derived from) Announcement of Newly Approved National Standards 2011 No. (No. 166 overall) 1
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This Standard specifies the test film indentation hardness and elastic modulus of instrumented nanoindentation test methods. This Standard is applicable to a film attached to a solid surface. Pressed into the direction perpendicular to the direction of the sample surface, the indentation depth in the nanometer range is usually also be extended to a few microns.

GB/T 25898-2010: Instrumented nanoindentation test -- Indentation hardness and modulus of thin film


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Instrumented nanoindentation test. Indentation hardness and modulus of thin film ICS 19.060 A42 National Standards of People's Republic of China Instrumented nanoindentation test methods Film indentation hardness and elastic modulus Issued on. 2011-01-10 2011-05-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Table of Contents

Preface Ⅰ Introduction Ⅱ 1 Scope 1 2 Normative references 1 3 Terms and definitions, symbols 1 4 Test Principle 1 5 2 testing requirements 6 Test Procedure 2 7 Analysis 5 8 9 Test report Reference 10

Foreword

Please note that some of the content of this standard may involve patents. The standard release mechanism should not bear the responsibility to identify these patents. This standard was proposed by the Chinese Academy of Sciences. This standard by the National Standardization Technical Committee of nano technology (SAC/TC279) centralized. This standard was drafted. Baoshan Co., Mechanics Institute of Iron and Steel. The main drafters of this standard. Xiu-Fang Wang, Zhang Taihua, Song Hongwei, Yang Xiaoping, Yang Rong, Huan Yong.

Introduction

Measurement of hardness and elastic modulus of the film is often used as a means to control its quality. For the film micro/nano-scale, often using Compliance Test Method Hardness is difficult to measure accurately the hardness and elastic modulus can not be measured. In recent years, instrumented nanoindentation technology development Quickly becoming one of the most important test methods for characterizing nano-mechanics field, for the determination of hardness and elastic modulus of the film provides a Effective means. When the use of instrumented nanoindentation hardness and elastic modulus Determination of the film, in addition to being the instrument, the environment, methods and testers And so on a number of factors, but also may be affected by the sample itself, such as substrate support film, the film and the substrate matching relations. related How to eliminate the influence of factors such as the instrument and select the appropriate test conditions instrumented nanoindentation test, "GB/T 22458-2008 Instrumented nanoindentation test methods Law "the relevant provisions, has done a detailed provisions. The main purpose of this standard is to provide as much as possible Pressure can exclude the impact of the base film of the hardness and elastic modulus of the test method. Instrumented nanoindentation test methods Film indentation hardness and elastic modulus

1 Scope

This standard specifies the test film indentation hardness and elastic modulus of instrumented nanoindentation test methods. This standard applies to the solid surface attached to the film. Pressed into the direction perpendicular to the direction of the sample surface, the indentation depth range is usually satisfied M order of magnitude, but also can be extended to a few microns.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 22458-2008 instrumented nanoindentation General test method GB/T Instrumented indentation test - Part 4 21838.4-2008 metal material hardness and materials parameters. metal and nonmetal Test methods for coating layer (ISO 14577-4.2007, MOD) 3 Terms and definitions, symbols 3.1 Terms and Definitions GB/T 22458-2008 defined in 3.1 and the following terms and definitions apply to this standard. 3.1.1 Single stiffness measure singlestiffnessmeasurement Quasi-static loading obtained load - unload portion depth curve, determine the bonding material in a single maximum indentation depth at Contact stiffness measurement method. 3.1.2 Continuous stiffness measurement continuousstiffnessmeasurement On the basis of the quasi-static loading superimposed a small dynamic alternating load to the same frequency alternating displacement due to keeping small Constant amplitude, measured alternating load and alternating displacement signal amplitude and phase, thereby determining the material during the loading phase with indentation depth change Measurement of continuous contact stiffness [1,2]. 3.2 Symbols and names GB/T 22458-2008 of 3.2 symbols and names apply to this standard.

4 Test principle

4.1 nano stiffness measurement method based on a single indentation test to obtain the maximum penetration depth in the material at the hardness and elastic modulus Principle, see GB/T 22458-2008 4.1 and 4.2, Appendices C and G. 4.2 nano-based continuous stiffness measurement method indentation test to obtain hardness and elastic modulus of the material with the indentation depth curve The principle, see GB/T 22458-2008 Appendix H.

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